OMR0031

External Connection (P.20) for wiring. Refer to section 17.

ZR

ZF ZP ZCU D1 D2 D3 ZR1 1-K1M18 20 AMJ 10.2 Misc.

Rotary Actuator

Without air cushion With air cushion Air-hydro 50 P694020-20 P694020-21 P694020-23 63 P694030-20 P694030-21 P694030-23 80 P694040-20 P694040-21 P694040-23 100 P694050-20 P694050-21 P694050-23 Corresponding parts u, o, !0, !3 are included as a set. u, o, !0, !3, @3 are included as a set. u, o, !0, !3 are included as a set.

Series CE1

39.5 46 54 78 81 40.5 D-A9ll 3 12 16 38 43 81.5 46 52.5 60.5 84.5 87.5 91 D-F7NT 9.5 18.5 22.5 44.5 49.5 47 43.5 50 58 82 85 88.5 D-F9ll 7 16 20 42 47 44.5 42.5 49 57 81 84 87.5 D-F9lWl 6 15 19 41 46 43.5 4.4-16

70astamb1

20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 13 14 15.5 16.5 19 19 47 51 58 58 72 72 4 4 5 5 5 5 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 6 6 7 7 10 10 M10 x 1.25 26.5 26.5 31 31 37.5 37.5 1/8 1/4 1/4 3/8 3/8 1/2 84 84 94 94 114 114 4 4 5 9 135 139 156 156 190 190 46 52 65 75 95 114 22 30 35 35 40 40 9 6.5 Up to 500 Up to 500 Up to 600 Up to 600 Up to 800 Up to 800 10 14 18

mb1

20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 13 14 15.5 16.5 19 19 47 51 58 58 72 72 4 4 5 5 5 5 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 6 6 7 7 10 10 M10 x 1.25 26.5 26.5 31 31 37.5 37.5 1/8 1/4 1/4 3/8 3/8 1/2 84 84 94 94 114 114 4 4 5 9 135 139 156 156 190 190 46 52 65 75 95 114 22 30 35 35 40 40 9 6.5 Up to 500 Up to 500 Up to 600 Up to 600 Up to 800 Up to 800 10 14 18

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

(21) AS23l1FG-02-08(S)A 8 13.2 34.9 (35) 23.5 46 14.2 21 (22) AS23l1FG-02-10(S)A 10 15.9 20.9 38.1 (38.2) 24.7 47.3 15.6 23 (23) AS33l1FG-02-06(S)A 6 8.2 16.5 29.9 (30) 17.5 40.1 AQ 1/4 17 (17.5) 12.9 13 ASV 13.3 42 (42) AS33l1FG-02-08(S)A 8 13.2 37.1 23.5 59.9 14.2 43 (43) AS33l1FG-02-10(S)A 10 15.9 17.4 23 41.2 26.1 62.5 15.6 46 (46) AS33l1FG-02-12(S)A 12 18.5 42.5 28.3 64.7 17 48 (48)

AC Servo Motor Driver (SSCNET /H Type)

Pr.1 Setting value Set value set by PLC program (Unit) 0:mm 1 to 20(x10-2mm/min) 1:inch 1 to 20(x10-3inch/min) 2:degree 1 to 20(x10-3degree/min) (Note 1) 3:PLS 1 to 50(PLS/s) (Note 1) The command speed range by setting Pr.83 Speed control 10 x multiplier setting for degree axis" to valid: 1 to 20(x10-2degree/min). -64- Pr.9 Acceleration time 0, Pr.10 Deceleration time 0 Pr.9 Acceleration

C95Series

B TA ~ TL TU TC TX TE TO TR n TS TH TF Z " TOH10 MB-S03 32 46 62 45 8.5 62 50 74 12 7 13 10 35 47 89 12 g.070 MII-S04 40 52 80 60 10 80 63 97 17 9 17 12 45 60 93 16 +8-070 50 65 80 60 10 92 75 109 17 9 17 12 45 60 105 1 6gmo Mounting plate (Double clevis) MII-S06 63 75 100 70 15 11 0 90 130 20 11 22 14 60 80 105 201.084 80 95 100 70 15 130 11 0 150 20 11 22 14 50 80 129 20 1 1)84 Ma,510

Nozzle Type Ionizer

Blow Velocity Distribution (Supply Pressure: 0.3 MPa) qEnergy saving static neutralization nozzle IZN10E-01 wHigh flow rate nozzle IZN10E-02 0 0 100 100 Distance [mm] Distance [mm] 200 200 4 m/s 14 m/s 300 300 11 m/s 3 m/s 400 400 8 m/s 2 m/s 500 30 30 20 10 0 10 20 500 30 30 20 10 0 10 20 Distance (Horizontal) [mm] Distance (Horizontal) [mm] 8 IZN10E Series Flow Rate Characteristics qEnergy

VCW

(mm) Electrical entry P Port size A B C D E F H K L M Model Grommet: G Conduit: C DIN connector: D Conduit terminal: T Q R Q R Q R S Q R S 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 22 45 44 43 58 40.5 46.5 99 43 66 1/8 VCW21 18 36 67 31 8.5 12.5 28 18 12.8 M4 22 46 44 44 58 41.5 46.5 99 44 66 1/4 22 40 80.5 36.5 11 15 32 20 19 M5 24 56.5 46 54.5 60 52 48.5 101 54.5 68 1/4, 3/8 VCW31 30 50 85.5

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

MLGPL (ball bushing)/A, DB, E dimensions A E A E Bore size (mm) Bore size (mm) DB st50 5020 74 115 152 174 16 15 52 74 136 36 132 32 40 40 34.5 196 25 89 128 169 196 20 21 62 89 153 46 149 42 50 50 141.5 156 199 25 41 84 131 152 172 199 20 16 37 57 84 63 63 29.5 144.5

AC Servo Motor Driver (Pulse input type)

10 5 20 10 5 (Pulley ratio 4/7) ratio) Parameter *1,*2 Para.

Refrigerated Air Dryer

Applicable dryer Weight lb [g] A B A 0.8 [20] 0.8 [20] AME 8.7 [220] 9.4 [240] 0.08 [35] IDF-FL209 IDFB3E AMF IDFB4E 14.8 [375] 7.7 [195] 0.12 [55] IDF-FL203 B IDFB6E ZFC 13.3 [340] 0.15 [70] IDF-FL204 IDFB8E 10.4 [265] SF 14.8 [375] 0.17 [75] IDF-FL205 IDFB11E 0.4 [10] SFD [17.3] 440 [14.5] 370 [0.26] 120 IDF-FL206 IDFB15E LLB (IDF-FL209) (IDF-FL203 to 208, 213, 214) IDFB22E 21.7 [550] 14.4

Refrigerated Air Dryer

Note 4) Option H (Auto-drain bowl type: Metal bowl) is only applicable to the IDFA6E-20.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

(mm) Electrical entry P Port size A B C D E F H K L M Model Grommet: G Conduit: C DIN connector: D Conduit terminal: T Q R Q R Q R S Q R S 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 22 45 44 43 58 40.5 46.5 99 43 66 1/8 VCW21 18 36 67 31 8.5 12.5 28 18 12.8 M4 22 46 44 44 58 41.5 46.5 99 44 66 1/4 22 40 80.5 36.5 11 15 32 20 19 M5 24 56.5 46 54.5 60 52 48.5 101 54.5 68 1/4, 3/8 VCW31 30 50 85.5

HRX-OM-Q026

/300-A-40. 8-9 8.2.4 HRSH100/150/200/250-W-20/40. 8-10 8.3 Flow Diagram . 8-11 8.3.1 HRSH-A-20/40. 8-11 8.3.2 HRSH-W-20/40. 8-12 8.4 Cooling Capacity . 8-13 8.4.1 HRSH100-A-20/40. 8-13 8.4.2 HRSH150-A-20/40. 8-13 8.4.3 HRSH200-A-20/40. 8-14 8.4.4 HRSH250-A-20/40. 8-14 8.4.5 HRSH300-A-20/40. 8-15 8.4.6 HRSH100-W-20/40. 8-16 8.4.7 HRSH150-W-20/40. 8-16 8.4.8 HRSH200-W-20/40. 8-17 8.4.9 HRSH250

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

25 None Note) The minimum bending radius of each cable is 20 mm.

PSxx-OMS0006CN

-100.0100.0 kPa T 2 N NPN1 P PNP1 A1 A M SI*2 () P (psi)*1 1 2kPaMPa A2 B () M5 M5 M5 B 01 R1/8 N01 NPT1/8 D + 1 L 2m -8No.PS-OMS0006CN-G / A ZS-46-A1 3X8L (2 ) B ZS-46-A2 3X8L (2 ) ZS-46-B + ZS-46-D ZS-46-3L 3 2m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4H 6mm ZS-46-C6H 1/4 inch ZS-46-N7H 4mm ZS-46-C4L 6mm ZS-46-C6L 1/4 inch ZS-46-N7L -9No.PS-OMS0006CN-G LCD LCD

MK

/Flange Rod end width across flats 10 10 21 21 46 46 Data Part no.