Vacuum Unit

Number of Manifold Stations that can be Operated Simultaneously in page 18.

Digital Flow Switch (Integrated display type)

Name Lead wire colour Function 1 L+ Brown 18 to 30 VDC 2 N.C.

CLA

1 14 40 " 56.5 15 25 SO 226 a 11 6 13.5 18 150 92 180 72 315 80 15 Series eLA Dimensions Rear Flange Type/CLAG Name plate \0 indICate locl

AN

Model Port size Effective area (mm2) Weight (g) ANB1-01 22 81 25 18 35 93 30 21 94 107 46 24 175 133 50 41 462 190 74 41 612 230 74 60 871 271 86 70 A B C Dimensions (mm) 1 8 ANB1-02 15 10 51 22 1 4 ANB1-03 35 3 8 ANB1-04 60 1 2 ANB1-06 90 3 4 ANB1-10 160 1 1 1 ANB1-12 280 1 4 ANB1-14 450 1 2 610 Construction/Parts/Dimensions ANB1-01 to 04 JIS symbol ANB1-04: PP ANB1-06 to 14 How to Order

3 Port Solenoid Valve/

A B C D E F G H J K Y300T-A 4.2 82 41 71.5 35 14 7 19 4 41 Y400T-A 5.2 96 48 86.1 40 18 9 26 5 50 Ordering Example Dual residual pressure release valve with soft start-up function VP544-5DZ1-03-X538 1 pc. Filter regulator AW30-03G-A 1 pc. Spacer with bracket Spacer with bracket Y300T-A 3 pcs. Piping adapter E300-03-A 2 pcs. Each product is not assembled.

3 Port Solenoid Valve/

A B C D E F G H J K Y300T-A 4.2 82 41 71.5 35 14 7 19 4 41 Y400T-A 5.2 96 48 86.1 40 18 9 26 5 50 Ordering Example Dual residual pressure release valve with soft start-up function VP544-5DZ1-03-X538 1 pc. Filter regulator AW30-03G-A 1 pc. Spacer with bracket Spacer with bracket Y300T-A 3 pcs. Piping adapter E300-03-A 2 pcs. * Each product is not assembled.

Valve Direction: Single Solenoid Coil on Opposite Side of A and B Ports, Stations: 18, A, B Port Size: N3 (One-touch Fitting for ø5/32"), P, R Port Thread: N (NPT)

Valve Direction: Single Solenoid Coil on Opposite Side of A and B Ports, Stations: 18, A, B Port Size: One-touch Fitting for ø5/32", P, R Port Thread: NPT

0.55

Note 2) Refer to page 41.

KS/KX

Calle 18 69-05 Apart.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

LED Display 22 Specification 25 Specifications 25 Dimensions 26 End Plate Model Indication and How to Order 27 Summary of Product parts 28 Mounting and Installation 30 Wiring 30 Specification 32 Specifications 32 Dimensions 33 IO-Link Master Unit Model Indication and How to Order 40 Summary of Product parts 40 Mounting and Installation 41 Wiring 41 LED Display 42 Specification 44 Specifications

PF-OMM0004_C

13.6 2.7 14 PF3W720 3/8 1/2 78 54 30 60 40.6 15.2 27 18 39 30 18 13.6 2.7 12 PF3W740 1/2 3/4 98 71 38 68 48.6 19.2 32 28 49 35 28 16.8 2.7 12 PF3W711 3/41 124 92 46 77 57.6 23 41 42 63 48 28 18 3.5 14 S T U V W WX Y Z PF3W704 24 22 32 40 50 4.5 5 1.5 PF3W720 28 22 32 40 50 4.5 5 1.5 PF3W740 34 30 42 48 58 4.5 5 1.5 PF3W711 44 36 48 58 70 5.5 7 2 -81No.PF-OMM0004-D PF3W721 A AA B D E F G

Cylinder with lock

Mounting of seals 1) Rod seal, cushion seal ( and in Fig. 18) Installing directions of the seal are specified. Apply grease all over the seal and inner surface of the bushing as shown in Fig. 19. If it is difficult to apply grease due to a small bore size etc., use a precision screwdriver. 2) Piston seal ( in Fig. 18) Install with care not to twist the piston seal.

Series CE1

200, 300, 500 194 145 32 20 77 84 98.5 M18 X 1.5 21 7 18 P T* X M N O Q Z L Bore size (mm) 32 40 50 63 Rc(PT) 1/8 57.5 41 34 5.5 M6 X 1 56 30 14 Rc(PT) 1/8 64.5 41 40 5.5 M6 X 1 62 30 14 Rc(PT) 1/4 76.5 49 50 6.6 M8 X 1.25 61.5 35 19 Rc(PT) 1/4 89.5 49 60 9 M10 X 1.5 64 35 19 * Refer to p.4.4-8 regarding the rod end nut which is included. * Dimensions for auto switch model D-F79W. 4.4-12

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

10 15.3 4.2 19 ZH15DS-10-03-12 22.45 AMJ 93.3 58.5 41 10 15.3 4.2 19 ZH15DL-10-03-12 22.45 (Mounting hole) Model I J K L M N O P Misc.

HRX-OM-Y098

Alarms that allow continuous pump operation are shown in Table 5.4-18 Alarms that allow continuous pump operation (1/2) and Table 5.4-19 Alarms that allow continuous pump operation (2/2).

MHZ

Normally closed Normally open MHZL2-16S 16 12 27 145 MHW MHZL2-20S 20 18 33 290 Single MHZL2-25S 25 22 50 515 MRHQ 13 acting MHZL2-10C 10 8 70 38 MHZL2-16C 16 12 140 Single acting, Normally closed Misc. 57 MHZL2-20C 20 18 290 85 MHZL2-25C 25 22 515 DNote 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at center of stroke.

MHZ

9@0@2 MHZA-A0603C MHZA2-6C MHZA-A0607 MHZA2-6H Main body of adaptor Mounting screw for adaptor Seal kit MHZA-A0608 MHZA2-6K End boss assembly MHZA-A0609 MHZA2-6M MHZA-A0610 MHZA2-6E 12-2-18 18 Parallel Style Air Gripper Compact Series (Without Auto Switch) Series MHZA2-6/MHZAJ2-6 Construction: With Dust Cover MHZAJ2-6 Double acting/With fingers open Single acting/Normally open @2 i !

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

10 18 The body mounting reference plane should be used as a standard when mounting onto equipment.

VZA2000

port (A side) (R1, R2 port) (P , A, B port) 2 x Rc 18 3 x Rc , 18 14 2 x M5 x 0.8 sub-plate side 2 position double: VZA4241-01 02 Pilot port (B side) Body side Pilot port (A side) 2 x M5 x 0.8 body side 2 x 4.5 Mounting hole 2 x Rc 18 18 14 3 x Rc , 2 x M5 x 0.8 sub-plate side Pilot port (A side) (R1, R2 port) (P , A, B port) Pilot port (B side) Sub-plate side 1760 Series VZA4000 5 Port