Fieldbus system (CC-Link compliant) Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 24 V Type +COM EX510-S102 Terminal No. 1 3 5 7 9 11 13 15 17 19 Output No. 0 2 4 6 8 10 12 14 0 V Type + + + + + + + + -COM Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 0 V Type + + + + + + + + -COM : Only a flat cable type manifold (P kit) can be connected to EX510-S 02 .
Actuator mounting A Model Bolt size Maximum tightening torque [Nm] Amm) mm LEKFS16 M3 0.63 3.5 23.5 LEKFS25 M4 1.5 4.5 24 LEKFS32 M5 3.0 5.5 30 LEKFS40 M6 5.2 6.6 31 4. When mounting the actuator, leave a gap of 40mm or more to allow for bending of the actuator cable. 20 - 3.4 Precaution on maintenance Warning 1.
Company Bs PLC I/O card Connector pin assignment (pin layout) Company As PLC I/O card Connector pin assignment (pin layout) Change of PLC manufacturers (Company A to Company B) + + + + 2F 2E 2D 2C 2B 2A 11 13 15 17 19 1B 1D 1F 21 23 25 27 29 2B 2D 2F 29 28 27 26 25 24 23 22 21 20 + + 19 18 17 16 15 14 13 12 11 10 + + 1F 1E 1D 1C 1B 1A 10 12 14 16 18 1A 1C 1E 20 22 24 26 28 2A 2C 2E General
Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations
1 4 2.3 15 12 20 50 73 AMC220 40 56 88 100 22 Depth 8 Body size A B C M3 x 0.5 71 88 101 101 121 55 63 83 96 96 116 1 4 3 8 , 56 75 102 118 135 153 AMC320 75 120.5 140.5 2.3 15 20 30 50 123.5 24 55 2 3 5 6 8 9 Depth 8 M4 x 0.7 1 2 3 4 AMC520 102 173.5 193.5 3.2 Depth 8 20 20 30 70 176.5 , 40 70 On the type for the AMC220, an R 1/4 fitting can be attached by removing the drain cock.
When using the IR1200-A and 2200-A series, contact your SMC sales representative. 11. When installing a pressure gauge to the product, do not apply pressure more than the maximum display pressure. This will cause a malfunction. Handling Caution 1.
Max. operating pressure Symbol 16 23 40 VCHR 1.6 mm 0.7 MPa Without sub-plate (with mounting screw M3 x 8L, 2 pcs.)
Without flow adjustment valve (using ZS-33-M) With flow adjustment valve (using ZS-33-MS) Install the product (with bracket) using the M3 screws (4 pcs.). Bracket thickness is approximately 1.2 mm. Refer to the dimension drawing of the bracket (page 71) for mounting hole dimensions.
Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 11 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)
Solenoid on side B 1 3 5 7 9 17 29 31 3 Input block connector Connects the Input block.
O: Sensor: OFF 1: Sensor: ON 3 Input block connector Connects the Input block. 12 8 Output block connector Connects the solenoid valve, Output block etc. 4 SW 1 5 13 9 Safety Instructions SI unit 5 Display window LED display shows the SI unit status. 2 6 14 10 HW 6 Switch protective cover Sets the address etc. with the switch inside. 31 29 27 25 23 17 3 7 21 19 15 11 Address setting mode
Current model 1 L Released into atmosphere No fixed throttle 4 to 11 L Fixed throttle * Poor quality of air may cause operation failure. Select a model that is suitable for the desired air cleanliness by referring to Air Preparation Equipment Model Selection Guide (pages 2 and 3) for air quality. OUT IN (SUP.) OUT IN (SUP.)
Dynamic viscosity [m2/s] Viscosity [Pas] Density [kg/m3] Formulas below can be used for common units 1cP = 1mPas = 10-3Pas 1cSt = 1mm2/s = 10-6m2/s Pulsation Attenuating Capacity The process pump generates pulsation because it discharges a liquid using two diaphragms.
Manufacturer M4 x 0.7 M3 x 0.5 Thread size 32.5 21.5 Effective thread length (mm) 8 6 Quantity 2 4 P.C.D. 46 45 Motor mounting area When mounting a coupling on the motor, mount it within the dimensional range shown on the left. A A B Section BB P.C.D.
Input of set values Setting of P1L/n1L Setting of P_1/n_1 P1AH/n1AH P1dH/n1dH P1AL/n1AL P1dL/n1dL P1H/n1H H_1 H1 (Page 29) (Page 29) (Page 31) 4. Selection of display colour SoG/SoR/REd/GRN (Page 32) 5. Completed [F 1] Setting of OUT1 is completed. -27No.PF-OMN0012-H
Chamfering causes a narrower detection distance range. 1.0 ~ 2.0mm H O W T O O R D E R A I R C AT C H S E N S O R S E R I E S ISA Min 2.0mm ACCESSORIES A I R C AT C H S E N S O R S E R I E S ISA Bracket ISA-1-A Gauge G33-3-01 ISA 01 O U T P U T 11 NPN 15 PNP Min 3.0mm N O.
(Green) Indicator light Load Enclosure IP40 Environment resistance Blue DC () 3.4 3-wire 25AWG 2 m Lead wire with connector 11
(Green) Indicator light Load Enclosure IP40 Environment resistance Blue DC () 3.4 3-wire 25AWG 2 m Lead wire with connector 11
base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, SS5YJ3 OTHER SIZE RATING, VALVE, SS5YJ3 MFLD SYJ3000, 1K, SS5YJ3 OTHER SIZE RATING, 0.66069 lb
base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, SS5YJ3 BUILT IN FITTING LESS THAN 1/4, VALVE, SS5YJ3 MFLD SYJ3000, UJ, SS5YJ3 BUILT IN FITTING LESS THAN 1/4, 0.99208 lb