The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MANIFOLD ASSY, VALVE, SS5YJ3 MFLD SYJ3000, UJ, SS5YJ3 BUILT IN FITTING

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MANIFOLD ASSY, VALVE, SS5YJ3 MFLD SYJ3000, 1J, SS5YJ3 OTHER SIZE RATING, .52800 lb

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MANIFOLD ASSY, VALVE, SS5YJ3 MFLD SYJ3000, 1J, SS5YJ3 OTHER SIZE RATING, .55000 lb

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MANIFOLD ASSY, VALVE, SS5YJ3 MFLD SYJ3000, 1J, SS5YJ3 OTHER SIZE RATING, .57200 lb

base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MFLD, BASE MT, SYJ3000 SERIES, VALVE, SS5YJ3 MFLD SYJ3000, 1J, SS5YJ3 OTHER SIZE RATING, .59400 lb

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MANIFOLD ASSY, VALVE, SS5YJ3 MFLD SYJ3000, 1J, SS5YJ3 OTHER SIZE RATING, .59400 lb

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MANIFOLD ASSY, VALVE, SS5YJ3 MFLD SYJ3000, 1J, SS5YJ3 OTHER SIZE RATING, .61600 lb

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MANIFOLD ASSY, VALVE, SS5YJ3 MFLD SYJ3000, UJ, SS5YJ3 BUILT IN FITTING

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MANIFOLD ASSY, VALVE, SS5YJ3 MFLD SYJ3000, 1J, SS5YJ3 OTHER SIZE RATING, .66000 lb

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MANIFOLD ASSY, VALVE, SS5YJ3 MFLD SYJ3000, 1J, SS5YJ3 OTHER SIZE RATING, .70400 lb

Stroke Reading Cylinder and Counter

W or less 20 VA or less 10 W or less 20 VA or less 10 W or less 20 VA or less 10 W or less Between case and AC line: 1500 VAC for 1 min.

Angular Air Gripper Series MHC2/MHCA2/MHCM2

A part z1 m1 = 20 x 3 x 4 x 2.7 x 10-6 = 6.48 x 10-4 (kg) Weight calculation m1 = a x b x c x Relative density IZ1 Inertial moment around Z1 axis IZ1 = {m1 (a2 + b2) / 12} x 10-6 = {6.48 x 10-4 x (202 + 32)/12} x 10-6 = 2.21 x 10-8 (kg.m2) = 2.21 x 10-8 + 6.48 x 10-4 x 16.42 x 10-6 = 0.20 x 10-6 (kg.m2) IA Inertial moment around Z axis IA =IZ1 + m1r12 x 10-6 z f2 z2 B part r2 = 23.5(mm)

Integrated Controller

200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Mep L3 [mm] L3 [mm] L3 [mm] L3 [mm] m 600 600 600 600 L3 Z 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg

HRX-OM-W002

20 30 40 0 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 0 10 20 30 40 [] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] [] Circulating fluid temperature[] Circula Circulating fluid temperature[] 50Hz 60Hz 60Hz 50Hz 50Hz

HRX-OM-X084

/20. 9-1 9.1.2 HRR010-W-10/20. 9-3 9.1.3 Refrigerant with GWP reference . 9-5 9.1.4 Communication specification . 9-5 9.2 Outline dimensions . 9-6 9.2.1 HRR010-A-10/20. 9-6 9.2.2 HRR010-W-10/20. 9-7 9.3 Flow Chart . 9-8 9.3.1 HRR010-A-10/20. 9-8 9.3.2 HRR010-W-10/20. 9-8 HRR Series HRX-OM-X084 Contents 9.4 Cooling capacity . 9-9 9.4.1 HRR010-A -10. 9-9 9.4.2 HRR010-W-10. 9-9 9.4.3 HRR010-

Slide Unit Series CX2/CXWM/CXWL

CX2N CXWM (Slide bearing) CXWL (Ball bushing bearing) 20 32 10 25 20 Allowable M1 (= M3) moment (Nm) 4 5 16 15 3 2 1 10 0.5 0.4 0.3 Allowable Moment (M2) (Nm) 0.2 10 16 15 20 25 32 Bore size (mm) CX2N 0.098 0.294 1.029 CXWM 0.108 0.549 0.809 1.029 2.695 0.1 25 50 75 100 125 150 175 200 CXWL 0.108 0.549 0.809 1.201 2.695 Cylinder stroke (mm) Note) M2 is steady regardless of the strokes

Slide Unit Series CX2/CXWM/CXWL

CX2N CXWM (Slide bearing) CXWL (Ball bushing bearing) 20 32 10 25 20 Allowable M1 (= M3) moment (Nm) 4 5 16 15 3 2 1 10 0.5 0.4 0.3 Allowable Moment (M2) (Nm) 0.2 10 16 15 20 25 32 Bore size (mm) CX2N 0.098 0.294 1.029 CXWM 0.108 0.549 0.809 1.029 2.695 0.1 25 50 75 100 125 150 175 200 CXWL 0.108 0.549 0.809 1.201 2.695 Cylinder stroke (mm) Note) M2 is steady regardless of the strokes

HRX-OM-X071

] 1000 32 32 25 25 1000 5 5 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circullating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9-11 Heating capacity (HRR050-A/W-20-) 9.5.2 HRR050-A/W-402000 2000 Ambient temp Ambient temp 1500 1500 Heating capacity[W] Heating capacity[W] 40 40 32 32 25 25 1000 1000 5 5 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature

XL

Fluid 5 to 40C (41 to 104F) Operating temperature C 0.2M to 1 x 10 -6 {1.5k to 7.5 x 10 -9} Operating pressure Pa {Torr} 5 8 5 8 Conductance l/s 1.3 x 10 -8 {1 x 10 -7} at ordinary temperatures, excluding gas permeation 1.3 x 10 -11 {1 x 10 -10} at ordinary temperatures, excluding gas permeation Internal External Leakage Pa m3/s {Torr l/s} KF16 KF25 KF16 KF25 Flange type/size Principle materials

High Vacuum Angle Valve, XL Series

Fluid 5 to 40C (41 to 104F) Operating temperature C 0.2M to 1 x 10 -6 {1.5k to 7.5 x 10 -9} Operating pressure Pa {Torr} 5 8 5 8 Conductance l/s 1.3 x 10 -8 {1 x 10 -7} at ordinary temperatures, excluding gas permeation 1.3 x 10 -11 {1 x 10 -10} at ordinary temperatures, excluding gas permeation Internal External Leakage Pa m3/s {Torr l/s} KF16 KF25 KF16 KF25 Flange type/size Principle materials