Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

Bit6: The short circuit of the valve output or digital output 01h to 64h to Get Channel diagnosis 0Ah 83h Ch0 to 31 BYTE 1 2 has been detected.

Fieldbus system EtherNet/IP compatible SI Unit

Round head screw (M3 x 8), 4 pcs. EX600-ZMV2 (Specified for SY series) Enclosed parts: Round head screw (M4 x 6), 2 pcs. Roun1d head screw (M3 x 8), 4 pcs. (2) End plate bracket EX600-ZMA2 Enclosed parts: Round head screw (M4 x 20), 1 pc. P tithe screw (4 x 14), 2 pcs. EX600-ZMA3 (Specified for SY series) Enclosed parts: Round head screw (M4 x 20) with washer, 1 pc.

SFOD-OMT0010

Power supply connector . 31 5.1 Connector specifications . 31 (1) Main control power supply connector: C PWR . 31 (2) Motor drive power connector: M PWR . 31 (3) Motor control power supply connector: CI . 32 5.2 Wiring . 33 (1) Wiring of the power supply connector . 33 (2) Wiring of the stop switch . 34 6.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Body through hole MI W S CEP1 CE1 Max. tightening torque (Nm) Model MIW8 MIS8 MIW12 MIS12 MIW20 MIS20 MIW25 MIS25 MIW32 MIS32 Bolt CE2 M2.5 x 0.45 0.5 ML2B M3 x 0.5 0.88 C J G5-S M5 x 0.8 4.3 CV M6 x 1 7.3 MVGQ M8 x 1.25 17.5 Max. tightening torque (Nm) Bolt Model MIW8 MIS8 MIW12 MIS12 MIW20 MIS20 MIW25 MIS25 MIW32 MIS32 CC M3 x 0.5 0.88 Caution RB M3 x 0.5 0.88 1.

Escapements Series MIW/MIS

Body through hole Max tightening torque (Nm) Model MIW8 MIS8 MIW12 MIS12 MIW20 MIS20 MIW25 MIS25 MIW32 MIS32 Bolt M2.5 x 0.45 0.5 M3 x 0.5 0.88 M5 x 0.8 4.3 M6 x 1 7.3 M8 x 1.25 17.5 Max tightening torque (Nm) Bolt Model MIW8 MIS8 MIW12 MIS12 MIW20 MIS20 MIW25 MIS25 MIW32 MIS32 M3 x 0.5 0.88 Caution M3 x 0.5 0.88 1.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Body through hole MI W S CEP1 CE1 Max. tightening torque (Nm) Model MIW8 MIS8 MIW12 MIS12 MIW20 MIS20 MIW25 MIS25 MIW32 MIS32 Bolt CE2 M2.5 x 0.45 0.5 ML2B M3 x 0.5 0.88 C J G5-S M5 x 0.8 4.3 CV M6 x 1 7.3 MVGQ M8 x 1.25 17.5 Max. tightening torque (Nm) Bolt Model MIW8 MIS8 MIW12 MIS12 MIW20 MIS20 MIW25 MIS25 MIW32 MIS32 CC M3 x 0.5 0.88 Caution RB M3 x 0.5 0.88 1.

SMC Pneumatic Clean Series

Note 1) Sampling air flow rate: Number of particles contained in 75l of air Note 2) Actuator: 1 million cycles Solenoid valve: 2 million cycles Particle generation characteristics of CM2 Particle generation characteristics of CXSL Particle generation characteristics of CY1B 106 106 106 Particle concentration (particles/m3) Particle concentration (particles/m3) Particle concentration (particles

SMC Pneumatic Clean Series

Note 1) Sampling air flow rate: Number of particles contained in 75l of air Note 2) Actuator: 1 million cycles Solenoid valve: 2 million cycles Particle generation characteristics of CM2 Particle generation characteristics of CXSL Particle generation characteristics of CY1B 106 106 106 Particle concentration (particles/m3) Particle concentration (particles/m3) Particle concentration (particles

Fieldbus system EtherNet/IP TM compatible SI Unit

Round head screw (M3 x 8), 4 pcs. EX600-ZMV2 (Specified for SY series) Enclosed parts: Round head screw (M4 x 6), 2 pcs. Round head screw (M3 x 8), 4 pcs. (2)End plate bracket EX600-ZMA2 Enclosed parts: Round head screw (M4 x 20), 1 pc. P tight screw (4 x 14), 2 pcs. EX600-ZMA3 (Specified for SY series) Enclosed parts: Round head screw (M4x20) with washer, 1 pc.

24

Attach the auto switch to the auto switch mounting bracket with the hexagon socket head cap screw (M3 x 14 L). The tightening torque for the M3 hexagon socket head cap screw is 0.5 to 0.8 Nm. 2. Fix the auto switch mounting nut and the auto switch mounting bracket temporarily by tightening the hexagon socket head cap screw (M2.5 x 5 L). 3.

RSQ

Note Applicable auto switch (N) Bore size (mm) 12 16 20 32 40, 50 Extended Compressed D-A7/A8 D-A7H D-A73C/A80C D-F7 D-F7V, D-F7NT D-F7W/J79W D-F7WV D-F79F D-J79/J79C D-F7BAL/F7BAVL Switch mounting screw (M3 x 0.5 x 8l) Square nut 9.6 3.9 16 20 BQ-1 14.9 4.9 14.9 3.4 Switch mounting nut Switch mounting screw (M3 x 0.5 x 10l) Switch spacer 18.6 8.8 32 40 50 27.5 13.7 BQ-2 Applicable

Compact Type

x 0.5 thread depth 3.5 10 9 + Stroke 2.7 8 6.7 2-M3 x 0.5 thread depth 3.5 (Piping port) 20 20.5 5.5 Stroke 42 + Stroke 5.5 4.5 13.4 32 + Stroke 5 + Stroke 12 2.75 11 1.2 M3 x 0.5 x 3 L (Hexagon socket head set screw) M8 x 1.25 x 7.5 L (Bolt holder) 0.5 25 0.2 25 0.2 5.3 5.3 16 32 31 2-M3 x 0.5 through 3.4 through 6.5 counterbore with depth 5 (Opposite side: Same) 5.5 2-M3 x 0.5 through

Compact Type Dual-Rod Cylinder Series CXSJ

x 0.5 thread depth 3.5 10 9 + Stroke 2.7 8 6.7 2-M3 x 0.5 thread depth 3.5 (Piping port) 20 20.5 5.5 Stroke 42 + Stroke 5.5 4.5 13.4 32 + Stroke 5 + Stroke 12 2.75 11 1.2 M3 x 0.5 x 3 L (Hexagon socket head set screw) M8 x 1.25 x 7.5 L (Bolt holder) 0.5 25 0.2 25 0.2 5.3 5.3 16 32 31 2-M3 x 0.5 through 3.4 through 6.5 counterbore with depth 5 (Opposite side: Same) 5.5 2-M3 x 0.5 through

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

x 0.5 M3 x 0.5 M3 x 0.5 M4 x 0.7 JK JU M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 P M3 x 0.5 M3 x 0.5 M3 x 0.5 M5 x 0.8 PA M3 x 0.5 M3 x 0.5 M3 x 0.5 M5 x 0.8 Q S SD SF SU UU WA WB WC WD M3 x 0.5 M3 x 0.5 M3 x 0.5 M4 x 0.7 WE WF XA XB XC YA YB YC Size 3.5 16 50.5 10.8 24.4 9.4 25 9.5 2H9 2 4.8 20 22.5 2H9 2 11 2H9 2 1 3.5 18 56 13.4 26.2 11.3 28 10 2H9 2 5.3 21 24.5 2H9 2 11.5 2H9 2 2 3.5 20.5 60

CXS

x 0.5 thread depth 3.5 10 9 + Stroke 2.7 8 6.7 MX 2-M3 x 0.5 thread depth 3.5 (Piping port) 20 MTS 20.5 5.5 MY Stroke 42 + Stroke CY 5.5 4.5 13.4 32 + Stroke MG 5 + Stroke 12 2.75 11 1.2 M3 x 0.5 x 3l (Hexagon socket head set screw) M8 x 1.25 x 7.5l (Bolt holder) CX 0.5 D-X 25 0.2 25 0.2 5.3 5.3 16 32 31 20Data 2-M3 x 0.5 through 3.4 through 6.5 counterbore with depth 5 (Opposite side: Same

CXS

head set screw) M8 x 1.25 x 7.5l (Bolt holder) CX 0.5 D-X 25 0.2 25 0.2 5.3 5.3 16 32 31 20Data 2-M3 x 0.5 through 3.4 through 6.5 counterbore with depth 5 (Opposite side: Same) 5.5 2-M3 x 0.5 through M2.5 x 0.45 x 6l (Hexagon socket head cap screw) M3 x 0.5 x 12.5l (Hexagon head bolt) M3 x 0.5 (Hexagon nut) (12) (5 + Stroke) 2.75 2-M3 x 0.5 through 25 0.2 4 8-28-23 23 Series CXSJ Dimensions

MGP

Hexagon socket head cap screw (M3 x 0.5 x 16l) 2 pcs.

Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

Parameter type Content Value Size (Words) Bit15: CH31 : Bit0: CH16 0x0108 CH16-31 Valve ON/OFF counter 0: disable, 1: enable 1 Bit15: CH31 : Bit0: CH16 0x0109 CH16-31 Open circuit detection 0: disable, 1: enalbe 1 CH16-31 Output setting during communication fault Bit15: CH31 : Bit0: CH16 0: disable, 1: enable 1 0x010A CH16-31 Output value during communication fault Bit15: CH31 : Bit0: CH16

MXF

For details, refer to page 8-30-31. 8-6-14

MU

37 48 CE 3.5 3.5 3.5 5.5 6 DA 53 67 85 103 122 CB 23 27 31 37 48 CA 53 67 85 103 122 Size 25 32 40 50 63 Size 25 32 40 50 63 Part No.