ARX Series Dimensions Dimensions 4-R .1(2.5) .47 (12) .98 (25) 1.63 (41.5) .67 (17) 1.34 (34) .94 (24) .65 (16.5) 1.02 (26) Panel nut Gasket .43 (11) .06 (1.5) .94 (24) 1.73 (44) .21 (5.4) Max. panel thickness .18 (4.5) .06 (1.6) 2.13 (54) Install the gasket underneath the panel or bracket (bonnet side). Tighten the panel nut by hand without the use of tools. 3
Pilot Pressure Range Vacuum/Low Ordinary pressure Pilot pressure (MPa) Operating pressure (MPa) 5-5-25 2 Flow Characteristics/Weight Flow characteristics Port size 1 2 (IN OUT) 2 3 (OUT EXH) Weight (kg) Valve model C [dm3/(sbar)] C [dm3/(sbar)] b Cv b Cv 19 0.43 5.5 18 0.47 5.4 23 0.32 6.2 42 0.39 10 28 0.36 7.6 26 0.35 7.0 1 (IN) , 2 (OUT) 3 (EXH) 3 8 1 2 3 4 VPA3145 3 4 1.0 Port size
(For type 20, 41, 42 and 45) Pilot pressure range SS5YA Fill the same as SS5Y . 3 5 7 3 5 7 Pilot pressure MPa Specify the part numbers for valves and options together beneath the manifold base part number. (Example) SS5YA5-42-03-02 1 set (Type 42, 3 station manifold base part no.) SYA5140 1 set (Single air operated valve part no.) SYA5240 1 set (Double air operated valve part no.)
MSQB1A(Size:1) Rotary Table Rotary Table Series MSQ Size:1, 2, 3, 7 Compact and light weight design Compact and light weight design Coming out in September, 2001 A Size Weight(g) Model 70 105 150 250 1 2 3 7 MSQB1A MSQB2A MSQB3A MSQB7A B mm Size Model A B C D 1 2 3 7 MSQB1A MSQB2A MSQB3A MSQB7A 50.5 56 60 73.5 28 30 34.5 41 25 28 30.5 34.5 16 18 20.5 23 C D Scale :100% (MSQB1A) Flexible
loading [oz / gr] 7.1 / 200 9.7 / 7.1 / 11.5 / 325 275 200 Nominal electric absorption [A / W] 2.2 / 170 2.7 / 210 3.3 / 250 4.3 / 330 5.9 / 450 6.1 / 470 Max. electric absorbtion [A / W] 2.9 / 220 3.4 / 260 4.3 / 330 5.6 / 430 7.8 / 600 8.0 / 620 Fan electric absorption [A / W] 0.30 / 27 0.54 / 40 Acoustic pressure level at 1 mt [dbA] < 70 Weight [lb / Kg] 75 / 34 82 / 37 86 / 39 90 / 41
06 6kgticnf 11 30psi 12 45 psa 13 150 psi 22 23 24 26 41 I t al (Silicon) Low Temperatufe L Porl Connection NIL PT Thr6ad PF Parallel Pip Thread t l{PT Amarican National Standard Pioe Thread Acceesoris t l{ll Standard Lever Control Lengrth (0.25 to 3.35 inches) (6lo 85mm) D High Pressure Signal Spring K 1/2 Split Range Spring E Longsr Lever Control Length (2.35 to 4.33 inchss) (60 lo 11omm
U C S O H L 1 Series IRV Dimensions IRV1000 IRV2000 53 55 41 30 50 SMC 35 P K U C SMC S O H L P K U C S O H L 40 34 8 x 6.5 15.4 x 5.4 Approx. 106 Approx. 50.6 18 Approx. 79 Atmosphere Atmosphere 45.5 13 SET VAC SET G SET G 30 SET VAC 43 Pad side Vacuum pump side Pad side Vacuum pump side Approx. 43 35 2-Rc 1/8 Connection port 2-Rc 1/8 Vacuum gauge port 2-Rc 1/4 Connection port Approx. 60
BUSY ON : OFF /BUSY 512BUSY 2048BUSY AREA AREA ON : OFF /AREA 512AREA 2048AREA SETON SETON ON : OFF INP INP ON : OFF SVRE SVRE ON : OFF 17 No.SFOD-OMT0011CN-A *ALARM ALARM OFF () : ON *ESTOP ESTOP OFF (EMGx ) : ON EMGx ) *ALARM*ESTOP (2-3-3) IN0-IN10 IN0-IN10 ON : OFF IN0-IN10 SETUP SETUP ON : OFF HOLD HOLD ON : OFF DRIVE DRIVE ON : OFF RESET RESET ON : OFF SVON SVON ON : OFF 18
14.3 6 4 MHM-32D 19 19 39.8 3.8 14.5 35.3 6.3 22.5 23 MHM-32D1 *2 *2 *2 51.8 MHM-32D2 19 19 14.5 MHM-50D 27.2 27.2 54.2 1.2 22.7 49.7 3.7 31.5 38 MHM-50D1 *2 *2 *2 66.2 MHM-50D2 27.2 27.2 22.7 -11- *1 1mm *2 A *3 MHM-16DD-M9(W,A)V D-P3WA 56mm Nm D-M9(V) D-M9W(V) D-M9A(V) D-P3DWA 0.050.15 -12- (mm) L1 L2 L3 L4 L5 L6 16 5 MHM-16D 1 1 1 1 MHM-25D 36 34 MHM-32D 50 24 MHM-50D 23 25 80 41
10%(4) AC100V 50/60Hz 2.4/2.5 2.4/2.5 2.4/2.5 2.4/2.5 2.4/2.5 3.0/3.1 5.7/5.7 4.3/4.6 (2) A AC200V 50/60Hz 1.2/1.3 1.2/1.3 1.2/1.3 1.5/1.5 3.4/3.0 3.4/3.1 (2) W AC100V,AC200V 50/60Hz 180/202 180/202 180/202 180/202 180/202 208/236 385/440 420/480 (3) AC100V 10A AC200V 5A 10A R134a(HFC) AC100V/200V g 705 1155 1505 1805 2005 2505 2605 35010 Rc3/8 Rc1/2 Rc3/4 Rc1 10mm 1 2 kg 16 17 18
(2) 17. 18. 19. 20. () IDH Series 22 2.2 IDX-OM-W038 2. 2.2.2 6.2 IDF-AB500 1 2 600mm 600mm 600mm 600mm 600mm 600mm 600mm 600mm 1 2 IDH Series 23 2.2 IDX-OM-W038 2. 2.2.3 4040 3 2 121 2.2.4 10mm ( IDH Series 24 2.2 IDX-OM-W038 2. 2.2.5 ,(6-1 ) 1 2 3(0.61Nm) 4 5 (17) (17) 3 7 6 5 1 2 4 PE M3 6.5mm (N.O) 2 1.25mm (N.C) IDH Series 25 2.2 IDX-OM-W038 2. 2.3
Note 3)o0.085450/20BeltLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)41?2?725Non-magnetizing lock547.924 VDC 0 10%
Note 3)o0.085450/20BeltLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)41?2?725Non-magnetizing lock547.924 VDC 0 10%
Note 3)o0.085450/20BeltLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)41?2?725Non-magnetizing lock547.924 VDC 0 10%
Note 3)o0.085450/20BeltLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)41?2?725Non-magnetizing lock547.924 VDC 0 10%
Note 3)o0.085450/20BeltLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)41?2?725Non-magnetizing lock547.924 VDC 0 10%
Note 3)o0.085450/20BeltLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)41?2?725Non-magnetizing lock547.924 VDC 0 10%
Note 3)o0.085450/20BeltLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)41?2?725Non-magnetizing lock547.924 VDC 0 10%
Note 3)o0.085450/20BeltLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)41?2?725Non-magnetizing lock547.924 VDC 0 10%
Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 41 (5 Port/Base Mounted Common SUP Common EXH), Stations: 18 Stations, A B Port Size: C4 (ΓΈ4 One-touch Fitting)