MTS

x 0.8 Rc 1/8 Rc 1/8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M3 x 0.5 Except lock unit, 0.12 MPa for 12 and 16; 0.10 MPa for 20 to 40 respectively.

MXH Series Compact Slide

50 20 20 6 50 98 60 25 6 25 60 108 60 6 30 30 35 MXH Series Compact Slide Dimensions 20 LT (mm) 31 20 J-M5 x 0.8 Depth 9.5 LA LB 14 Plug for port (hexagon socket head set screw) 4-M5 x 0.8 x 4l 3-M6 x 1.0 through Bottom hole dia. 5.1 6-9.3 counter bore depth 8 4-M5 x 0.8 Depth 11 4-M5 x 0.8 depth 8 Guide rail width 12 2-M5 x 0.8 9.5 34 6 24.5 63.5 64.5 34 34 32 7 32 7 6 20 20 11 6 15 NS

Fieldbus System

mA, 4 to 20 mA 12 bit resolution Input signal range 10 to 10 V, 5 to 5 V 20 to 20 mA 16 bit resolution EX600-AXA 15 V 22 mA Note 2) Max. rated input signal 50 100 k Input impedance 0.05% F .S.

180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50

Replacement part/grease pack part no. : 20, 25, 32 : GR-S-010(10 g) 40, 50 : GR-S-020(20 g) 713 MHW2 Series Dimensions MHW2-20D Flat finger type (Standard) 20 2 x M5 x 0.8 thread depth 7 (Mounting thread) 17 60 4 x M5 x 0.8 thread depth 10 (Mounting thread) Bottom through hole dia. 4.2 (Mounting hole) 45 2 x M5 x 0.8 thread depth 10 (Mounting thread) 35 23 26 27 36 18 23 7 2 21H9 +0.052 depth

2 Phase Stepper Motor/Without Motor Brake Series LXS

E-M5 thread depth 10 6 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch U N x P 20 5 N C 1 0.2 (5.1) 10 5.8

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 12 10 8 6 4 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M50.8 6, 10, 16, 20 AS231FG-01 AS221FG-01 20, 25, 32 R 1/8 AS231FG-02 AS221FG-02 20, 25, 32, 40 R 1/4 AS331FG-02 AS321FG-02 40, 50, 63 R 1/4 AS331FG-03 AS321FG-03 40, 50, 63 R 3/8 AS431FG-04 AS421FG-04 63, 80, 100 R 1/2

Auto Switch Guide

x 0.8 x 16 M5 x 0.8 x 20 M5 x 0.8 x 25 9-15-36 37 Solid State Switch Direct Mounting Style D-M9N(V)/D-M9P(V)/D-M9B(V) For details about certified products conforming to international standards, visit us at www.smcworld.com.

VQ7-6/7-8

AXT632-45-1 AXT632-45-2 AXT632-45-4 AXT632-45-5 AXT632-45-6 AXT632-45-7 AXT632-45-8 AXT632-45-9 AXT632-45-10 AXT632-45-11 AXT632-45-12 AXT632-45-13 Mounting bolt Size M5 x 35 with SW M5 x 15 with SW M5 x 45 with SW M5 x 60 with SW M5 x 65 with SW M5 x 70 with SW M5 x 75 with SW M5 x 90 with SW M5 x 95 with SW M5 x 100 with SW M5 x 105 with SW M5 x 115 with SW VK Option mounting diagram SMC

LJ1H

1 Single Axis Electric Actuator High Rigidity Direct Acting Guide Series LJ1H Series LJ1H LJ1 LG1 LC1 LX LC6D/LC6C Switches Lead screw lead mm Mounting orientation Series Page Model Motor type Guide type Ground ball screw Rolled ball screw Slide screw 12 10 20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard

MXF

20 MXF8-10 0.01 0.02 0.01 MXF8-10 0 0 0 10 20 30 40 10 20 30 10 20 30 40 Load (N) Load (N) Load (N) MXF12 Lr = 30 mm 0.10 0.08 0.08 MXF12-50 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.08 MXF12-50 0.06 0.06 MXF12-30 0.06 MXF12-30 MXF12-50 MXF12-20 MXF12-30 0.04 0.04 MXF12-20 0.04 MXF12-20 0.02 0.02 0.02 20 40 60 0 0 0 20 40 60 80 20 40 60

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

A RR1 A1 L1 MM RR1 U1 NZ L L1 E1 10 12 16 20 +0.048 0 0.2 0.4 0.1 0.3 0.2 0.4 0.2 0.4 +0.048 0 5 6.5 8 10 0.4 0.2 0.2 0 0.4 0.2 0.4 0.2 10 12 16 20 12 16 20 25 12 16 20 25 5 6.4 8 10 21.5 32 34 41 6 8 8.5 10.5 16 25 25 30 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.25 6.3 8.1 10.3 12.8 7 14 11.5 14 21.5 6 11 8.5 16 21 25 30 M5 x 0.8 6.3 8.1 7 10 10 14.6 I-G012 I-Z015A I-G02 I-G03 Y-G012

Aluminum High Vacuum Angle Valve

15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

) Y Bore size (mm) 16 20 J M5 x 0.8 M6 x 1 MM M4 x 0.7 M5 x 0.8 A B 6.0 7.5 C 3.5 4.5 CH 25 26 G 13.5 12.5 GA 8.5 GB 16.2 20.0 H 52 58 K 10 12 L 110 130 LD 3.6 4.8 LH 38 39 LL 35 45 LW 84 88 M 6.0 7.5 N 20 25 NC 14 17 NE 49.5 55.5 NH 16.5 21.7 NW 56 60 090 110 Bore size (mm) 16 20 PA 40 50 PB 94 100 PG 3.5 4.5 PP Q 153 191 QQ 9 10 QW 48 45 RR 11.0 14.5 TT 15 18 UU 14 12 VV 10.0 12.5 W 102

VQ7-6/7-8

Mounting bolt M5 X 115 with SW M5 X 35 with SW M5 X 15 with SW M5 X 45 with SW M5 X 60 with SW M5 X 65 with SW M5 X 70 with SW M5 X 75 with SW M5 X 90 with SW M5 X 95 with SW M5 X 100 with SW M5 X 105 with SW Size SMC SMC SMC SMC SMC Option mounting diagram SMC SMC SMC SMC Spacer 2 SMC Spacer 2 Interface regulator Spacer 1 Throttle valve spacer SMC Release valve spacer Spacer 2 Spacer 1 Spacer

SMC Pneumatic Clean Series

(mm) 26 20 16.5 14 C 16 12 10 8 D 25 18 14 12 E 2 2 2 2 F 13<10> 20<18> 20 20 GA 50 40 40 35 H 8 6 6 5 H1 19 17 17 13 B1 47 38 31 26 I 187 175 173 163 ZZ M6 x 1 depth 12 M5 x 0.8 depth 8 M5 x 0.8 depth 7.5 M4 x 0.7 depth 7 J 27 19.5 19.5 15.5 AL Bore size A M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 MM 44 35.5 29 24 NA 1/8 1/8 1/8<M5 x 0.8> 1/8<M5 x 0.8> P 9 7 7 7 RA 87 95 93 93 S 6 5.5 5.5

Compact Guide Cylinder

30 st 100 st or less Over 100 st 12 43 22 50 37 47 33 20 40 110 15 25 60 20 3 3.5 M5 x 0.8 10 5 16 49 24 57 42 51 37 20 22 42 110 15 16 26 60 24 3 3.5 M5 x 0.8 10 5 20 60 28.5 71 49 66 44 24 44 120 30 40 78 28 3 3.5 M6 x 1 12 18 25 73 34 86 60 78 50 24 44 12 29 39 77 34 4 4.5 M6 x 1 12 17 [mm] MGPKL: A, DB, and E Dimensions Bore size [mm] A DB E 30 st or less Over 30 st 100 st or less Over

SYA3000/5000/7000

4" 6, 5/32" 2 x 2.2 (For manifold mounting) Manual override (Non-locking) SYA3220-M5 M5 x 0.8 (A, B port) 1.3 (Ventilation hole) 2 x 1.5 die-cast hole (For manifold gasket positioning) M5 x 0.8 (P , EA, EB port) 3 position closed center / exhaust center / pressure center SYA3 20(-F2) C4, N3 C6, N7 3 4 5 SYA SYJA One-touch fitting (A, B port) M5 x 0.8 (Pilot port) Applicable tubing O.D.: 4

5 Port Air Operated Valve SYA3000/5000/7000 Series

fitting (A, B port) M5 x 0.8 (Pilot port) Applicable tubing O.D.: 4, 1/4" 6, 5/32" 2 x 2.2 (For manifold mounting) Manual override (Non-locking) SYA3 20-M5 3 4 5 M5 x 0.8 (A, B port) 1.3 (Ventilation hole) 2 x 1.5 die-cast hole (For manifold gasket positioning) M5 x 0.8 (P , EA, EB port) 1463 SYA3000/5000/7000 Series Dimensions/SYA3000 Series: Base Mounted 2 position single SYA3140-01 2

3 Port Air Operated Valve

/8 1/2 02 03 04 VPA300 VPA500 VPA700 2 stations 20 20 stations Manifold Option Description Part no.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

7 4 5 19 18 11 10 6 MVGQ 15 17.5 26 5 5 M3 x 0.5 14 26 6 2.8 M6 x 1 M5 x 0.8 10 7 25 15 12 8 CC 20 20.5 7 32 5 M3 x 0.5 11 32 10 3 M5 x 0.8 M8 x 1.25 14 10 28 20 14 12 RB 25 25 8 40 6 M4 x 0.7 20.4 39 Rc1/8 M10 x 1.5 14.5 2.5 12 12 15 34 25 11 J RG MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 PE RA RB RC RE RD RF SA SB SC PD DModel