Clean Exhaust Filter SFE Series

Clean Exhaust Filter SFE Series RoHS How to Order SFE 11 Size/Port size Male thread type Plug-in type Symbol Port size Max. ow capacity L/min (ANR) 11 M5 x 0.8 3 42 R1/8 65 52 R1/8 130 53 R1/4 130 73 R1/4 200 Symbol Port size Max. ow capacity L/min (ANR) 3A 4 30 4B 6 65 5C 8 130 7D 10 200 Male thread type One-touch tting type Symbol Applicable tubing O.D.

ISO Standard Hydraulic Cylinder

23 25 14 35 7 1/4 60 45 33.2 M6 x 1 7.5 M14 x 1.5 56 5.5 153.5 30 12 43 103 128 40 25 to 800 22 19 51 22 12 32 25 19 37 3/8 62 63 41.7 10 73 6.5 185 9 34 18 47 128 153 M8 x 1 M16 x 1.5 D50 25 to 800 28 25 57 28 9 33 25 24 42 1/2 67 75 52.3 12 74 7 199 11 42 18 53 134 159 M12 x 1.25 M20 x 1.5 63 36 25 to 800 32 55 36 13 33 32 30 39 1/2 71 90 64.3 12 80 12 216 13 50 17 68 136 168 M12 x 1.25

2 Phase Stepper Motor/Without Motor Brake Series LXP

Positioning driver Model Operating Conditions Plate non-rotating accuracy () Allowable plate rotation torque (T) Allowable lateral load (F) Non-rotating accuracy () Stroke 50 75 100 125 150 175 200 Load (N) Stroke 50 75 100 125 150 175 200 Torque (Nm) 42 2.87 0.09 42 2.47 40 2.17 + 42 2.38 32 2.16 24 1.98 17 1.82 F T F Refer to page 304 for deflection data. 218 2 Phase Stepper Motor/Without

Fluoropolymer Piping Equipment

LQ1E41-R2 12 8 6 9 9 24 20 21 17 43 38.5 28 23 5.5 LQ1E41-R3 12 6 15 14 35.5 31.5 16.5 3.6 25 LQ1E41-R4 12 4 2.6 M1 LQ1E51-R2 19 10 39.5 20 36 17 56.5 52.5 49 23 7.4 46 LQ1E51-R3 19 8 54 47.5 5.5 12 H1 10 LQ1E51-R4 19 6 39.5 15 36 14 51 42 39 16.5 3.6 32 LQ1E51-R5 19 4 2.6 LQ1E61-R2 25 12 24 21 56.5 52.5 28 9.4 46 LQ1E61-R3 25 10 20 17 54 47.5 23 7.4 A side 39.5 36 49 LQ1E61-R4

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

= 4, 8, 12, 16) Note 2) 80 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 90 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 2 (Different surfaces, same surface), 1 20 95 100 105 110 D-Y7BA n (n = 2, 4, 6, 8) Note 1) 20 + 45 (n 2) 2 (n = 4, 8, 12, 16) Note 2) 95 + 45 (n 4) 2 100 + 45 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 105 + 45 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 110 + 45 (n 4) 2 (n = 4, 8, 12, 16)

Tie-rod Type Hydraulic Cylinder

32 125 34 80 100 R2.5 M14 x 2 M27 x 2 38 6.5 140 112 35.5 35 27 19 27 15 34 35 1/2 77 140 12 32 160 43 100 108 R2.5 M16 x 2 M33 x 2 42 9 174 140 45 38 36 22 28 17 38 40 3/4 94 159 12 36 (mm) Bore size (mm) Z ZZ TT TX TY TZ V W 40 123 246 24 70 65 95 7.5 8 50 131 262 26 83 78 108 10 9 63 140 280 26 90 86 115 12 10 80 156 312 36 112 106 162 16 13 100 170 340 42 140 130 204 20 16 125 170 340

CNA

60 80 42 100 85 15 52 16 12 12 10 8 Up to 500 35 32 70 27 81 108 1/4 1/8 52 20 40 10 9 12 70 90 50 110 95 17 56.5 20 13 15 12 11 Up to 600 35 32 86 27 101 115 1/4 1/4 64 20 40 10 11.5 15 86 105 59 130 102 17 67 20 18 12 15 11 Up to 600 40 37 102 32 119 139 1/4 1/4 78 25 52 14 13.5 18 102 130 76 160 123 21 83 20 23 18 17 13 Up to 750 40 37 116 41 133 160 1/4 1/4 92 30 52 14 13.5 18 116 150

CNA

60 80 42 100 85 15 52 16 12 12 10 8 Up to 500 35 32 70 27 81 108 1/4 1/8 52 20 40 10 9 12 70 90 50 110 95 17 56.5 20 13 15 12 11 Up to 600 35 32 86 27 101 115 1/4 1/4 64 20 40 10 11.5 15 86 105 59 130 102 17 67 20 18 12 15 11 Up to 600 40 37 102 32 119 139 1/4 1/4 78 25 52 14 13.5 18 102 130 76 160 123 21 83 20 23 18 17 13 Up to 750 40 37 116 41 133 160 1/4 1/4 92 30 52 14 13.5 18 116 150

25

[ANR] per cartridge) 0 2 4 6 8 10 12 14 16 18 20 0 2 4 6 8 10 12 14 16 18 20 30 Hz Discharge time (s) Discharge time (s) 1 Hz 30 Hz 1 Hz 0 500 1,000 1,500 2,000 0 500 1,000 1,500 2,000 Installation distance (mm) Installation distance (mm) Supply pressure: 0.3 MPa (17.6 L/min [ANR] per cartridge) Supply pressure: 0.3 MPa (8.6 L/min [ANR] per cartridge) 12 12 10 10 Discharge time (s) Discharge

7

VDC Grommet (With surge voltage suppressor) Nil A B C D E F G H K L Z Rc, With One-touch fitting2 VXB G NPT Rc, With One-touch fitting2 Grommet VXE Grommet (With surge voltage suppressor) 1E 12 VDC G NPT G NPT Rc, With One-touch fitting2 1F 1G 1H 1V 1J 1K 1L 1M 1W 1N 1P 1Q 1R 1Y 1S 1T VXP 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC 48 VAC 220 VAC 240

7ND9071en

125 5 12 12 6.5 8 150 6 10 8 11.5 16 9 13.5 8 13.5 13 200 8 9 7 8.5 12 6.5 9.5 7 11.5 250 10 9 7 7.5 13.5 9.5 7 10.5 300 12 8 6 6.5 9.5 7.5 6 9.5 350 14 6 6 5 9.5 5.5.11 HART version Select if device is used as HART 6 or HART 7 device by using the + and keys.

CLA

. . n~.a 12...

Rubber seal 5 Port Solenoid Valve Series SYJ7000

12 12 12 55 25.5 25.5 25.5 25.5 36.1 [38.3] Refer to the page 91 for dimentions with connector cable. 57 Series SYJ7000 Manifold Specifications Manifold Standard Manifold Specifications Type 20 Type 21 Type 40 Type 20 Type 42 Model Manifold type Single base/B mount Common SUP, Common EXH P (SUP), R (EXH) 2 to 20 stations 2 to 15 stations Valve stations Location Base Side Base Bottom Valve

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

(same side) 15 + 55 120 + 55 120 + 55 140 + 55 n = 4, 8, 12, 16 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 15 120 90 Different sides 2 pcs. "n" pcs. 2 pcs. "n" pcs. 2 pcs.

LEY-OM007

5125 24500 12250 6125 [mm/s 2] 3,000 [mm/s] 6) 50 35 30 [mm] 0.02 [mm] 10 5 2.5 12 6 3 16 8 4 [m/s 2] 7) 50/20 + LEY* _ / R / L (LEY*D) [] 540 [%] 90 RH ) 28 42 56.4 (DC24V) A/B 800 / [V] DC2410% [W] 8) 23 40 50 [W] 9) 16 15 48 [W] 10) 43 48 104 11) [N] 20 39 78 78 157 294 108 216 421 [W] 12) 3.6 5 5 [V] DC2410% LEY 16 [ _ / R / L ] LEY 25 [ _ / R / L ] LEY 32 [ _ / R / L

LEH_C

ON/OFF / / 2 2 3 3 1 2 / 11 - 5.3 [] (LEC ) (LEC ) / P.42 7.3 <> (NPNPNP) LEHZ10K2-4 NPN <> INP(IN ) INP ON ON INP ON OFF ) P.50,P.52 8.3 12 - <> No.0 a b c d e f g h i j k a ABSINC ABS() / / INC()// b c ) / P.50 8.3 d e f 0(0 ) g h i )150%/ P.52 8.3 j 12 AREA ON 121 INC ABS() )No.0 120 222 AREA 13 - k INP(IN )ON INP INP ON )0.50 )No.0 22 10 12 INP 14 -

Cylinder with Lock

8, 12, 16)2 65 + 30 (n 4) 2 (n = 4, 8, 12, 16)2 70 + 30 (n 4) 2 (n = 4, 8, 12, 16)2 75 + 30 (n 4) 2 (n = 4, 8, 12, 16)2 2 (Different surfaces, same surface) 1 70 75 80 85 95 D-A9 n 70 + 40 (n 4) 2 (n = 4, 8, 12, 16)2 75 + 40 (n 4) 2 (n = 4, 8, 12, 16)2 80 + 40 (n 4) 2 (n = 4, 8, 12, 16)2 85 + 40 (n 4) 2 (n = 4, 8, 12, 16)2 95 + 40 (n 4) 2 (n = 4, 8, 12, 16)2 2 (Different surfaces

Vacuum Unit

How to Order Valve Manifold Assembly t Option3 (For details on the Function/Application, refer to page 42.) Selectable option for manifold (Refer to i on pages 11 and 12, and y on page 13.)

•

B ZZ -t2 xstrokes.1 12 + 2X!

Cylinder with Lock

, 16)*2 95 + 55 (n 4) 2 (n = 4, 8, 12, 16)*2 100 + 55 (n 4) 2 (n = 4, 8, 12, 16)*2 110 + 55 (n 4) 2 (n = 4, 8, 12, 16)*2 115 + 55 (n 4) 2 (n = 4, 8, 12, 16)*2 2 (Different surfaces, same surface) 1 75 80 95 105 110 D-A5m D-A6m n 75 + 55 (n 4) 2 (n = 4, 8, 12, 16)*2 80 + 55 (n 4) 2 (n = 4, 8, 12, 16)*2 95 + 55 (n 4) 2 (n = 4, 8, 12, 16)*2 105 + 55 (n 4) 2 (n = 4, 8, 12, 16)*2 110 +