Electromagnetic Digital Flow Switch

(For details, refer to p. 15.)

PSxx-OMU0005CN

No.PS-OMU0005CN-C // ZSE20B(F) ISE20B 2 8 10 11 15 15 17 20 [] 23 24 3 25 27 29 29 29 F0 31 F1 OUT1 32 F1 OUT2 35 F3 37 F4 38 F5 FUNC 40 F6 42 F10 43 F11 49 F80 50 F81 51 F82 53 F90 54 F96 56 F97 57 F98 59 F99 61 62 66 66 67 76 76 79 -1No.PS-OMU0005CN-C (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

NVFR2l00 NVFR22C)0 NVFR2300. 2400. 2sO0 Gasket NBR AXr624-20-2 AXr624-20-2 N{r624-20-2 Valve mounting bolt Steel AXr624-26 (M3X31) AXT624-26 (M3X31) AXI624-26 (M3X31) @ Pilot Ass'y Refer to "Pilot Operalor Ass'y/How to Order" on page 8. Series NVFRzOOO:Base Mounted Tlpe Pilot Operatar Ass'g/How to Order NVFR2000 Series enty and lndicat!

-fl Seies

NVFR2l00 NVFR22C)0 NVFR2300. 2400. 2sO0 Gasket NBR AXr624-20-2 AXr624-20-2 N{r624-20-2 Valve mounting bolt Steel AXr624-26 (M3X31) AXT624-26 (M3X31) AXI624-26 (M3X31) @ Pilot Ass'y Refer to "Pilot Operalor Ass'y/How to Order" on page 8. Series NVFRzOOO:Base Mounted Tlpe Pilot Operatar Ass'g/How to Order NVFR2000 Series enty and lndicat!

Aluminum High Vacuum Angle Valve

15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

Digital Flow Switches Series PF2A

, 521 50 20 40 Pressure loss (kPa) Pressure loss (kPa) 15 30 10 20 5 10 0 200 0 50 100 150200250 300 400 350 450 500 20 50 100 150 Flow rate (l/min) Flow rate (l/min) Sensor Unit Construction PF2A710/750 PF2A510/550 q w e r w t w e Parts list No. 1 2 3 4 5 Description Attachment Seal Mesh Body Sensor Material ADC NBR Stainless steel PBT PBT Flow direction PF2A711/721/751 PF2A511/521/551 Parts

CL

14 0.070 0 20 25 32 40 44 52.5 57.5 66 29 33 40 49 14 16 20 22 11 13 15 18 10 10 10 10 5.5 5.5 6.6 6.6 25 30 35 40 3.2 3.2 4.5 4.5 35.8 39.8 49.4 58.4 42 42 48 56 16 20 22 30 28 28 28 30 43.4 48 59.4 71.4 Clevis pin and snap ring are attached.

REC

Relieving port Eh8 D MM AL CX -0.1 -0.2 K A U CZ N N F S+Stroke H L lNA Z+Stroke RR ZZ+Stroke (mm) A AL B1 CD CX CZ D E F G H H1 I K L MM N Bore size Stroke range 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 M8 X 1.25 18 15.5 13 9 10 8 20 13 10 41 5 33.5 5 30 20 19 150 to 700 M10 X 1.25 25 22 19.5 17 9 10 10 26 13 10 45 6 37.5 5.5 30 20 19 150 to 700 M10 X 1.25 32 22 19.5 17 9 10 12 26 13 11 45

RZQ

N] F=-q x PA+w x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

Title not found

l b --" ,m'i$;:f, 4ra 20 Standard Stroke lmm) 30 40 50 60 75 100 125 175 200 225 250 275 300 350 400 150 Y f r N t * w -l Yw Y Ns a a a a a a a a a a a a a o a a a a a a a a a a a a a a a a a '*?

VK300

F Thread type Rc G NPT NPTF Nil F N T Option Part No. Description Part no.

125

Lead wire length 2000 mm VEX3122-015LO1 SY100-30-4A-20 VEX3122-011LO1 SY100-30-1A-20 Crimping area Core wire crimping area Core wire Lead wire Socket 0.2 to 0.33 mm2 Max. O.D. of covering: 1.7 mm Hook Covering 3.

VCB

OR-1860-120F F: FKM E: EPDM For VCB30 OR-2380-130F F: FKM E: EPDM For VCB40 OR-2600-180F F: FKM E: EPDM e When external leakage occurs after disassembling a valve, replace the above seals.

MGQ

Bore size Standard stroke (mm) MM YY L X K W J V H GA GB TA TB U G T F S DA R C Z NN Q B ML P PW YL (mm) 12 16 20 25 18 50 13 5 16 40 58 5 7.5 5 36 29 56 8 22 6 48 29 12 14 39 7 10, 20, 30, 40, 50, 75, 100 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 M4 x 0.7 11 22 54 15 7 18 42 64 2.5 8 5.5 38 33 62 8 25 8 52 33 13 16 43 8 10, 20, 30, 40, 50, 75, 100 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 11 20, 30

MLGC

75 14 73 150 M8 x 1.25 162 W Y WH X Z Bore size (mm) 20 25 32 40 30 23 30 146 182 30 25 37 167 199 25 28.5 37 167 202 20 33 44 210 227 Without Rear Plate Stroke range (mm) Long Stroke Bore size (mm) 20 25 32 40 Bore size (mm) 20 25 32 40 Z R Y 250 to 400 190 14 129 350 to 500 207 14 146 350 to 600 210 14 146 350 to 800 236 15 191 Note) Dimensions marked with are not required for the one

MLGC

25 73 70 150 M8 x 1.25 162 W WH X Y Z Bore size (mm) 20 25 32 40 30 23 30 146 182 30 25 37 167 199 25 28.5 37 167 202 20 33 44 210 227 Without Rear Plate Stroke range (mm) Long Stroke Bore size (mm) 20 25 32 40 Bore size (mm) 20 25 32 40 R Z Y 250 to 400 14 190 129 350 to 500 207 14 146 350 to 600 14 210 146 350 to 800 15 236 191 Note) Dimensions marked with are not required for the one

VK300

type Option Valve stations S070 R port: Rc 1/8 01 Nil None 1 station Port size Nil Rc G NPT NPTF F With bracket (Not mounted) VQ F N T 01 Rc 1 8 20 20 stations A port: Rc 1/8 VKF Type 42: Base mounted (A port side ported) How to Order Applicable solenoid valve VK334Applicable blanking plate assembly VK300-42-1A VQZ VV3K3 05 01 42 VZ Thread type VS Solenoid direction Port size Opposite

3M/SMseries

++t&F Eft!

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

L dimension 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 VZ 285.5 21 273 No.

Digital Flow Switch Series PFA For Air Series PFW For Water

Note 6) The flow rate unit is based on 0C and 101.3kPa. 2 For Air Digital Flow Switch Series PFA How to Order PFA5 Remote Type Sensor Unit 10 01 Wiring specification Flow rate range 3m lead wire with connector Without lead wire Nil N 1 to 10l/min 5 to 50l/min 10 to 100l/min 20 to 200l/min 50 to 500l/min Nil N F 10 50 11 21 51 Port size Thread type Size Applicable model Flow rate (l/min)