Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

The smoothness of the surface and closeness of the oxidize layer can effect (increase/decrease) this. 7 Ultimate pressure Ultimate pressure is P=Q/S, where the sum of mass flow rates for outgassing (Qg) and leakage (Ql) is Q(Pam3/s), and the exhaust speed is S(m3/s). The ultimate pressure is measured with Qg, QlS shown as above, and the ultimate pressure of the pump itself.

IDX-OM-M051

M3 tightening torque: 0.63 to 1Nm. Do not touch equipment other than the terminal block during wiring. 3. Put back the front panel. [Remote operation] Voltage is applied to the terminal block. Be sure to turn off the switch with lamp before wiring. 1) Disconnect the wires from no. 5 and 6 of the terminal block and mount the external switch.

IDX-OM-W017

IDFA4E15E1 L N PE M3 6.5mm 1.25mm 2 1-1 IDFA Series 1 4 IDX-OM-W017 2 2 , 2 1 IDFA4E15E 20kg 2 2 2 2 2 1 2000m 240 050 600mm 600mm 600mm ( 600mm ) 600mm 2-1 IDFA Series 2 1 IDX-OM-W017 2 2 2 2 6 6-2 IDFA4E15E 2 2 3 50 50 2 2 4 10mm 2-2-2 IDFA Series 2 2 IDX-OM-W017 2 ( 2 2 5 6-1 IEC AC230V 30mA 5A 216AWG,3 ,812 1.25 0.1m 30m M3 1.25-3 6.5mm ()M3 0.61Nm

IDX-OM-W053

L N PE M3 6.5mm 1.25mm 2 :17 1 2 2 2 , 2 1 IDFA6E 20kg 2 2 2 2 2 1 240 050 ( ) 2000m 600mm 600mm 600mm 600mm 600mm 2 1 2 2 2 2 6 6-2 2 2 3 50 50 2 2 4 10mm ( 2 2 2 2 2 5 6-1 IEC AC200V 30mA 5A 1.25 216AWG,3 ,812 0.1m 30m M3 1.25-3 6.5mm () M3 0.61Nm 2 3 2 2 3 () 2 2 () 2 4 3 / 3 3 1 INOUT 3 2 ON () INOUT 5 ONOFF 0.15MPa NO IN 3 1 3 / 3 3 OFF OFF

IDX-OM-U022

M3 6.5mm 1.25mm 2 M3 6.5mm 1.25mm 2 IDFA100F150F 1 6 1.3 IDX-OM-U022 2. 2.1 45 45 45 IDFA100F150F 2 1 2.1 IDX-OM-U022 2. 2.2 2.2.1 (1) (85%) () B C 245050 () 2000m ) (2) IDFA100F150F 2 2 2.2 IDX-OM-U022 2. 2.2.2 P.6-3 6.3 IDF-AB501 14 1 1 1 4 5 2 3 1 600mm 600mm 600mm 600mm 600mm 1 IDFA100F150F 2 3 2.2 IDX-OM-U022 2. 2.2.3 60 60 .

PSxx-OMR0001CN

m5 m GH641 m3 m5 m 200 kPa ISA3-F ISA3-G 1 m3 m5 m 1 m3 m5 m [mm] [mm] 9 0 10010 ISA3-H 1 m3 m5 m [mm] 29 0 30030 -19No.PS-OMR0001CN-J 2 ISA3-() ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 C(4 ) C(6 ) F(G ) H 13 13.6 19 ISA-14() -20No.PS-OMR0001CN-J 2 ISA3-(DIN ) ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 L2 62.5 125 162.5 200 237.5 275 L3 73 135.5 173 210.5 248 285.5

PSxx-OMT0001CN

m5 m GH641 m3 m5 m 200 kPa ISA3-F ISA3-G 1 m3 m5 m 1 m3 m5 m [mm] [mm] 9 0 10010 ISA3-H 1 m3 m5 m [mm] 29 0 30030 -20No.PS-OMT0001CN-E 2 ISA3-() ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 C(4 ) C(6 ) F(G ) H 13 13.6 19 ISA-14() -21No.PS-OMT0001CN-E 2 ISA3-(DIN ) ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 L2 62.5 125 162.5 200 237.5 275 L3 73 135.5 173 210.5 248 285.5

F/ISE

Mounting with brackets Mount a bracket to the using two M3 x 5L mounting screws and install on piping with a hexagon socket cap screws. The switch can be installed horizontally depending on the installation location. Mounting screw M3 x 5L Atmospheric release port To a safe place with no water or dust The tightening torque for bracket mounting screw should be 0.98Nm or less.

Model Selection 1

Av = Q (8) P Av : Flow coefficient [m2] Q : Flow rate [m3/s] P : Pressure difference [Pa] : Density of fluid [kg/m3] (3) Formula of flow rate It is described by the known unit. Also, the flow characteristics line shown in the Graph (2).

VDW Series

x 0.5 When not equipped with bracket, the M3 threads at both ends (4 positions) can be used for other purposes. (16.3) 11.5 7.7 7.7 11.5 5 22.5 40 7.5 L dimensions n (stations) Dimensions 3 4 6 8 2 9 5 7 10 52.5 L1 70 105 140 35 157.5 87.5 122.5 175 62.5 L2 80 115 150 45 167.5 97.5 132.5 185 69.5 L3 87 122 157 52 174.5 104.5 139.5 192 3 stns. x 1 2 stns. x 2 3 stns. x 2 2 stns. + 3 stns

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

How to Order Valve T 5M N7 VQZ2120 SY Example/Valve C6 5M VQZ2120R SYJ External pilot specification Thread (Cylinder ports and P, R ports) SX VK Rc(PT) External pilot port N NPT VZ M3 x 0.5 (VQZ2000) M5 x 0.8 (VQZ3000) T NPTF F G(PF) VF Note) R port of VQZ2000 is only G(PF) 1/16 VFR Cylinder ports VP7 Symbol M5 02 N1 N3 N7 N9 N11 Applicable tube O.D.

B COIL 24 VDC

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

Body Style: B (Base Mounted w/Screws), Coil Voltage: 5 (24VDC), Flow Rate: D (Power Consumption: 0.5W, Operating Press: 0.5MPa, Cv: 0.011), Electrical Entry: G (Grommet), Port Size: w/o Sub-plate, Made to Order: X50 (Universal Type)

Body Style: B (Base Mounted w/Screws), Coil Voltage: S (5 VDC), Flow Rate: A (Power Consumption: 0.35W, Operating Press: 0.1MPa, Cv: 0.016), Electrical Entry: C (Plug Lead w/Light/Surge Suppressor), Port Size: M5 (Base Mounted, w/Sub-plate)

Body Style: B (Base Mounted w/Screws), Coil Voltage: 5 (24VDC), Flow Rate: A (Power Consumption: 0.35W, Operating Press: 0.1MPa, Cv: 0.016), Electrical Entry: C (Plug Lead w/Light/Surge Suppressor), Port Size: M5 (Base Mounted, w/Sub-plate)

Body Style: B (Base Mounted w/Screws), Coil Voltage: 5 (24VDC), Flow Rate: C (Power Consumption: 0.5W, Operating Press: 0.3MPa, Cv: 0.016), Electrical Entry: G (Grommet), Port Size: M5 (Base Mounted, w/Sub-plate)

Body Style: B (Base Mounted w/Screws), Coil Voltage: 6 (12 VDC), Flow Rate: B (Power Consumption: 0.35W, Operating Press: 0.3MPa, Cv: 0.011), Electrical Entry: C (Plug Lead w/Light/Surge Suppressor), Port Size: M5 (Base Mounted, w/Sub-plate)

Body Style: B (Base Mounted w/Screws), Coil Voltage: 6 (12 VDC), Flow Rate: A (Power Consumption: 0.35W, Operating Press: 0.1MPa, Cv: 0.016), Electrical Entry: C (Plug Lead w/Light/Surge Suppressor), Port Size: M5 (Base Mounted, w/Sub-plate)