Precision Clean Regulator Series SRP

80 100 120 140 0 10 20 30 40 50 60 70 80 90 100 Flow rate l/min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate l/min (ANR) Flow rate l

PF2D

Note 8) For details about wiring, refer to the Operation Manual that can be downloaded from SMC website (http://www.smcworld.com). 1.0 Operating pressure [MPa] PF2D 504/520 0.5 PF2D 540 Made to Order 20 40 60 80 100 0 90 LQ1 series fluoropolymer fittings mounting type is also available. Refer to page 392.

Precision Clean Regulator

80 100 120 140 0 10 20 30 40 50 60 70 80 90 100 Flow rate L/min (ANR) Flow rate L/min (ANR) SRP1101-01 Conditions/Inlet pressure: 0.5 MPa SRP1-01 Conditions/Inlet pressure: 0.7 MPa 0.25 0.50 0.20 0.40 Outlet pressure MPa Outlet pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate L/min (ANR) Flow rate L/min (ANR) Pressure

VCA

) VC Enclosure Dusttight, low jetproof (equivalent to IP65) VDW Environment Location without corrosive or explosive gases Valve leakage cm3/min (ANR) 0.2 or less VQ Mounting orientation Unrestricted (2) Vibration/Impact resistance (m/s2) 30/150 or less VX2 Rated voltage 24 VDC, 12 VDC, 100 VAC, 110 VAC, 200 VAC, 220 VAC, 230 VAC (50/60 Hz) 10% of rated voltage Allowable voltage fluctuation

Series VQ Metal Seal/Rubber Seal Body Ported

Stations 1 station 01 16 VVQ1000FPG066 stations of manifold VQ1000FPGC4M5D, 3 sets VQ1000FPGC6M5D, 3 sets Double check block 16 stations } 1.10-60 Precautions Be sure to read before handling. Refer to p.0-33 to 0-36 for Safety Instructions and common precautions.

Series VQ Base Mounted Metal Seal/Rubber Seal

Lead wire color 24VDC 100, 110 200, 220 V AC V AC Black (Yellow) [Yellow] Lead wire color 24VDC 100, 110 200, 220 VAC VAC SOL.A SOL.A () () Black (Blue) [Red] Red (Blue) [Red] COM(+) COM(+) Red (Blue) [Red] SOL.B White (Gray) [Gray] () Single solenoid VQ0 double VQ1000 double solenoid Note: ( ) is for 100, 110VAC. [ ] is for 200, 220VAC Plug connector lead wire length Note) The length of

Tube One Touch Fitting PPMW-701-100-FM-B80 N.C., 100 PSI, Flush Mount, Nylon 1/16" ID Barbed Fitting PPMW-701-100-FM-B85 N.C., 100 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting PPMW-701-100-FM-OT1 N.C., 100 PSI, Flush Mount, 1/8" O.D. Tube One Touch Fitting PPMW-701-100-FM-OT2 N.C., 100 PSI, Flush Mount, 5/32" O.D.

Tube One Touch Fitting PPMW-701-100-FM-B80 N.C., 100 PSI, Flush Mount, Nylon 1/16" ID Barbed Fitting PPMW-701-100-FM-B85 N.C., 100 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting PPMW-701-100-FM-OT1 N.C., 100 PSI, Flush Mount, 1/8" O.D. Tube One Touch Fitting PPMW-701-100-FM-OT2 N.C., 100 PSI, Flush Mount, 5/32" O.D.

Tube One Touch Fitting PPMW-701-100-FM-B80 N.C., 100 PSI, Flush Mount, Nylon 1/16" ID Barbed Fitting PPMW-701-100-FM-B85 N.C., 100 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting PPMW-701-100-FM-OT1 N.C., 100 PSI, Flush Mount, 1/8" O.D. Tube One Touch Fitting PPMW-701-100-FM-OT2 N.C., 100 PSI, Flush Mount, 5/32" O.D.

Tube One Touch Fitting PPMW-701-100-FM-B80 N.C., 100 PSI, Flush Mount, Nylon 1/16" ID Barbed Fitting PPMW-701-100-FM-B85 N.C., 100 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting PPMW-701-100-FM-OT1 N.C., 100 PSI, Flush Mount, 1/8" O.D. Tube One Touch Fitting PPMW-701-100-FM-OT2 N.C., 100 PSI, Flush Mount, 5/32" O.D.

Tube One Touch Fitting PPMW-701-100-FM-B80 N.C., 100 PSI, Flush Mount, Nylon 1/16" ID Barbed Fitting PPMW-701-100-FM-B85 N.C., 100 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting PPMW-701-100-FM-OT1 N.C., 100 PSI, Flush Mount, 1/8" O.D. Tube One Touch Fitting PPMW-701-100-FM-OT2 N.C., 100 PSI, Flush Mount, 5/32" O.D.

Tube One Touch Fitting PPMW-701-100-FM-B80 N.C., 100 PSI, Flush Mount, Nylon 1/16" ID Barbed Fitting PPMW-701-100-FM-B85 N.C., 100 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting PPMW-701-100-FM-OT1 N.C., 100 PSI, Flush Mount, 1/8" O.D. Tube One Touch Fitting PPMW-701-100-FM-OT2 N.C., 100 PSI, Flush Mount, 5/32" O.D.

Tube One Touch Fitting PPMW-701-100-FM-B80 N.C., 100 PSI, Flush Mount, Nylon 1/16" ID Barbed Fitting PPMW-701-100-FM-B85 N.C., 100 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting PPMW-701-100-FM-OT1 N.C., 100 PSI, Flush Mount, 1/8" O.D. Tube One Touch Fitting PPMW-701-100-FM-OT2 N.C., 100 PSI, Flush Mount, 5/32" O.D.

Tube One Touch Fitting PPMW-701-100-FM-B80 N.C., 100 PSI, Flush Mount, Nylon 1/16" ID Barbed Fitting PPMW-701-100-FM-B85 N.C., 100 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting PPMW-701-100-FM-OT1 N.C., 100 PSI, Flush Mount, 1/8" O.D. Tube One Touch Fitting PPMW-701-100-FM-OT2 N.C., 100 PSI, Flush Mount, 5/32" O.D.

Electric Slide Table / High Precision Type 《 AC servo motor 》

-V5 LECYU2-V5 V6 AC servo motor 100 16 L Left side parallel V7 200 25 LECYM2-V7 LECYU2-V7 (Absolute encoder) (6)Motor option (5)Storke [mm] (4)Lead [mm] Size Size Nil Without option 16 25 16 25 * B With lock 50 12 16 (20) 100 6 8 (10) 150 *The values shown in ( ) are the lead for size 25 parallel mounting types.

FQ1

Symbol x 50 001 005 010 020 050 075 100 002 004 006 013 q q w w 0.01 0.01 e r e 0.005 0.005 r 0.002 5 10 50 100 0.002 10 50 100 Flow rate l/min (ANR) Flow rate l/min (ANR) Note) The recommended flow rate is the rate for an initial pressure drop of 0.01 to 0.02 MPa. 2 Series FQ1 How to Order Filters Element and Seal Part Numbers 1.

Filter for Cleaning Solvent Quick Change Filter Series FQ1

Symbol x 50 001 005 010 020 050 075 100 002 004 006 013 q q w w 0.01 0.01 e r e 0.005 0.005 r 0.002 5 10 50 100 0.002 10 50 100 Flow rate l/min (ANR) Flow rate l/min (ANR) Note) The recommended flow rate is the rate for an initial pressure drop of 0.01 to 0.02 MPa. 2 Series FQ1 How to Order Filters Element and Seal Part Numbers 1.

TL/TIL

San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 100% Methylne chloride VX3 38% Hydrochloric acid VXA 50% Hydrofluoric acid 60% Hydrogen peroxide VN 100% Methanol LVC Methyl ethyl Ketone LVA 70% Nitric acid LVH 86% Phosphoric acid LVD 85% Caustic potash LVQ 100% Sulfuric acid LQ Note 1) Toluene Xylene LVN 100% Sodium

MU

Calculation: (Example) MUL32-100 Basic weight0.42 (Foot style 32 equiv.)

MU

Calculation: (Example) MUL32-100 Basic weight0.42 (Foot style 32 equiv.) Additional weight0.16/50 stroke Stroke 100 stroke 0.42 + 100 / 50 x 0.16 = 0.74 kg CQ2 RQ MU Construction D-X 20Data A A section MU25 Replacement Parts: Seal Kit Component Parts Bore size (mm) Kit no. Contents Description Note No.