PF2D Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).
G FZ FT E 2 x 7 Mounting hole F FX FY AL A Bore size B2 24 22 22 18 D B B1 Stroke range 0 40 32 25 20 20-0.033 150 to 1000 150 to 700 150 to 700 41 32 32 26 14 12 10 8 16 13 13 13 5 4 4 4 12.5 11 10 10 50 45 45 41 75 19.5 19.5 15.5 . 40 40 34 60 60 60 17 17 13 FX 26-0.033 0 82 36 75 75 26-0.033 0 20, 25 and 32 200 to 1000 32-0.039 0 66 21 52 22 247 217 204 200 37 P S H2 H1 Bore size MM K
) 114 VN LVC 53 63 43 LVA LVH LVD LVQ LQ LQ-GM LQ-GL LVN 50 TI/ TIL 50 207 85 PA 342 85 PAX LQ-GL 40 28 SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 PB 6 6 4-R3 4-R3 191 (MAX.91) (MAX.91) 325 87 60 87 60 112 112 17-5-129 34 Series LQ 1 2 Fitting Assembly Procedure Assemble fittings following the procedure shown below.
Function number Function name Default setting Page F 0 (Unit) Unit selection [ PA] kPa Page 49 ISA3-F: [ 20] ISA3-G: [ 50] ISA3-H: [ 50] Switch point ISA3-F: [ 3] ISA3-G: [ 20] ISA3-H: [ 20] F 1 (oUt1) OUT1 setting Page 50 Hysteresis Display colour [ SoG] Green when ON, Orange when OFF out2: [ Ewin] Output mode OUT port side pressure detection Window comparator mode Reversed output 2ot:
Port size port 3(R) port 1(P), 2(A) Body size Rated voltage (Only with solenoid) 04 06 10 10 12 14 20 1 2 3 4 1 2 100 VAC 50/60 Hz 1 2 3 (Ex.)
Connection thread size (R, NPT, G) Proper tightening torque [Nm] 1/16, 1/8 3 to 5 1/4 8 to 12 3/8 15 to 20 1/2 20 to 25 Body size Maximum allowable torque [Nm] M5 0.05 1/8 0.07 1/4 0.16 3/8 0.2 1/2 0.4 2. Insufficient tightening may cause seal failure, or loosen the threads. 3.
40 11 21 0.5~4 L/min 2~16 L/min 5~40 L/min 10~100 L/min 50~250 L/min 2 04 20 40 11 21 R 04 20 40 11 21 S 250L/min G L/min(gal/min) / : SI : G : 1[L/min]=0.2642[gal/min] 1[gal/min]=3.785[L/min] 1=9/5+32 L/min 100L/min250L/min Rc N NPT F G IS0228 1 N M8(3m) 04 20 40 11 21 03 3/8 04 1/2 06 3/4 10 1/1 12 11/4 14 11/2 / OUT1 OUT2 1 1~5 V 2 4~20 mA 1T 1~5 V 1~5 V (PF3W3)1~5V (-1-1T) 4
Axis mode (mm/s) (mm) Selection (mm) (mm) 2) 2) (mm/s (mm/s (mm) 0 ABS 100 20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 ABS 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 ABS 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 -41- () () (TB) No. Step No. 063 No. TB PLC 0 No.
Recommended Parameter Values [LEF] LEFS25 LEFS32 LEFS40 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.
JB Series (For compact cylinders) Pneumatic cylinder 1 MPa or less 12, 16, 20, 25, 32, 40 50, 63, 80, 100 Basic (Female thread) JS Series (Stainless steel type) Pneumatic cylinder 1 MPa or less 10, 16, 20, 25, 32, 40 50, 63, (80, 100) Basic Hydraulic cylinder 3.5 MPa or less 20, 25, 32, 40, 50, 63 ( ) Available as special product 1 Standard/Lightweight and Compact Type Floating Joint JT Series
AS121FG-M5 AS231FG-01 R(PT) 1/8 20, 25, 32 AS221FG-01 AS231FG-02 R(PT) 1/4 20, 25, 32, 40 AS221FG-02 AS331FG-02 R(PT) 1/4 40, 50, 63 AS321FG-02 AS331FG-03 R(PT) 3/8 40, 50, 63 AS321FG-03 AS431FG-04 R(PT) 1/2 63, 80, 100 AS421FG-04 AS131FG-U10/32 10-32UNF 6, 10, 16, 20 AS121FG-U10/32 AS231FG-N01 NPT1/8 20, 25, 32 AS221FG-N01 Elbow type AS231FG-N02 NPT1/4 20, 25, 32, 40 AS221FG-N02 AS331FG-N02
Note Description AW10, 20 AW30 AW40, 40-06 1 2 Body Bonnet Platinum silver Black Zinc die-cast Aluminum die-cast Polyacetal Replacement parts Part no. Description No.
Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 12 10 8 6 4 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M50.8 6, 10, 16, 20 AS231FG-01 AS221FG-01 20, 25, 32 R 1/8 AS231FG-02 AS221FG-02 20, 25, 32, 40 R 1/4 AS331FG-02 AS321FG-02 40, 50, 63 R 1/4 AS331FG-03 AS321FG-03 40, 50, 63 R 3/8 AS431FG-04 AS421FG-04 63, 80, 100 R 1/2
For sonic range Where P1 = 0.10132 (P2 + 0.1013) Formula based on Cv factor Q = 98.9Cv (P1 + 0.1013) kg/h Formula based on effective area Q = 5.5S (P1 + 0.1013) kg/h 1 5 20 3 4 20 1 0 30 40 30 20 40 20 30 30 40 20 50 60 60 50 40 30 20 3 4 30 40 50 Figures inside [ ] indicate the saturated steam holding heat (kcal/kg). Figures inside ( ) indicate the saturation temperature (C).
Hole diameter 5 9 Features 1 3 Port Direct Operated Poppet 3 Port Direct Operated Poppet Solenoid Valve Series VKF300 How to Order Valves Electrical entry Rated voltage 100VAC 50/60 Hz 200VAC 50/60 Hz 110VAC 50/60 Hz 220VAC 50/60 Hz 24VDC 12VDC 240VAC 50/60 Hz Other DO-DIN terminal (without connector) 1 2 3 G-grommet (lead wire length: 300mm) H-grommet (lead wire length: 600mm) D-DIN type
Acid consumption [pH4.8](mgCaCO3/L) 100 or less 50 or less 50 or less Total hardness (mgCaCO3/L) 200 or less 70 or less 70 or less Calcium hardness (mgCaCO3/L) 150 or less 50 or less 50 or less Ionic state silica (mgSiO2/L) 50 or less 30 or less 30 or less Iron (mg/L) 1.0 or less 0.3 or less 1.0 or less Copper (mg/L) 0.3 or less 0.1 or less 1.0 or less Reference items Sulfide ions (mg/L)
E s .9 6 5 o 25 50 75 Inpul siqnal (%F.s.) l 25 50 75 Inpul signal (%F.S.)
For example, changing from F Kit (D-sub connector) to S Kit (serial transmission) is achieved by simply changing the kit piece. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4 Single wiring (Refer to the connector wiring diagram) Printed circuit board patterns between connectors are shifted at every station
Recommended Parameter Values [LEF] LEFS25 LEFS32 LEFS40 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.
Output deviation (%F.S.) 30 Set pressure (kPa) 40 0 50 60 0.5 70 80 90 1.0 100 80 60 40 20 50 100 150 Flow rate (l/min(ANR)) VAC side pressure (supply pressure) (kPa) 1.12-13 Series ITV209l Dimensions ITV2090 Note) Do not attempt to rotate the cable connector, as it does not turn.