NCA1

in/s CJ1 2 to 20 in/s (50 to 500 mm/s) 2 to 20 in/s (50 to 500 mm/s) Piston speed (50 to 500 mm/s) CJP Cushion Air cushion standard Basic style, Foot style, Rod side flange style, Head side flange style, Clevis style, Side tapped style, Center trunnion style, Head side trunnion style, Side lug style, Rod side trunnion style Basic style, Foot style, Clevis style, Rod side flange style, Head

Heavy Duty Stopper Cylinder

(Example) Mass of transferred object: 300 kg, Transfer speed: 20 m/min Friction coefficient: = 0.1 Mass of transferred object m [kg] Friction coefficient RS2H50-30 The graphs indicate the values at normal temperature. (20 to 25C) = 0.1 = 0.2 500 500 Mass of transferred object m [kg] Mass of transferred object m [kg] 50 Operating range Upper limit 400 400 Upper limit 50 Operating range

LEF-OM006xx

30 40 50 [mm] 50mm CCW CW 10 20 30 40 50 60 [mm] b) CW )50mm =0() =10 =-10 50mm CCW CW -50 -40 -30 -20 -10 0 [mm] 50mm CCW CW -40 -30 -20 -10 0 10 [mm] 50mm CCW CW -60 -50 -40 -30 -20 -10 [mm] -29- 4/ A 50mm () 5m 5m 10% 15m 20% -30- 5./ 5.1 (LEC ) ,, () EMG() 1000 1 / (Best Pneumatics No UL ,UL1310 Class2 -31- 5.2 5.3. 90100 DC24VSVON a) b) c) d) e) -32- D () 5. 1.

Series PF2W Digital Flow Switch For Water

Sensor 1 L/min 5 L/min 10 L/min 20 L/min 50 L/min 100 L/min 200 L/min 500 L/min Flow rate range 1 L/min 10 L/min PF2A510 0.5 L/min 10.5 L/min 5 L/min 50 L/min PF2A550 52.5 L/min 2.5 L/min 10 L/min 100 L/min PF2A511 105 L/min 5 L/min 20 L/min 200 L/min 210 L/min 10 L/min PF2A521 50 L/min 500 L/min 525 L/min 25 L/min PF2A551 Sensor Flow rate range Static Electricity

CKZ2N

x 1.5 M12 x 1.75 Bore (mm) PA PB PC PD R RA RB RC RD RR W XA XC XB 50 63 80 78.4 78 113.7 45 55 70 45 45 75 5 10 15 20 25 32 92.8 105.3 148.3 141.8 154.4 197.3 137.3 150.4 192.8 40 55 65 45 52 70 88 104 140 20 25 32 45 50 68 48 54 76 7 Series CKZ2N Dimensions Straight-Plain Arm / 50 20 mm Offset-Plain 20 0.03 20 0.03 A M6 x 1.0 M6 x 1.0 R45 33 53 0.05 6.5 16 32 6.5 19 R25 10 10 19 R25 18

Modular Type Air Filters Series AF

40 20 30 27 22 5.4 8.4 40 2.3 28 115 1/4, 3/8 53 129 14 26.5 30 50 26.5 41 40 23 6.5 8 53 2.3 30 170 AF 70 165 18 35 38 75 35 50 54 26 8.5 10.5 70 2.3 35 204 1/4, 3/8, 1/2 75 169 20 35 38 75 35 50 54 25 8.5 10.5 70 2.3 34 208 3/4 AR 90 245 24 45 20 45 70 66 35 11 13 90 3.2 47 284 3/4, 1 95 258 24 47.5 20 47.5 70 66 35 11 13 90 3.2 47 297 1 AL Semi-standard specifications AW With barb

13

Selection Graph (2)-1 Pad Diameter Selection Graph by Lifting Force Vertical Lifting (2 to 50) Selection Graph (1)-1 Pad Diameter Selection Graph by Lifting Force Horizontal Lifting (2 to 50) 50 40 32 25 20 16 13 10 8 50 40 32 25 20 16 13 10 8 -80 kPa -70 kPa -60 kPa -50 kPa -40 kPa -80 kPa -70 kPa -60 kPa -50 kPa -40 kPa Pad diameter (mm) Pad diameter (mm) Pad diameter (mm) 6 6 4 4 2 2 Lifting

SFOD-OMT0009CN

10.00 1000 1000 0 0 0 0.5 2 INC 50 10.00 1000 1000 0 0 0 0.5 2 3 INC 50 10.00 1000 1000 0 0 0 0.5 4 INC 50 10.00 1000 1000 0 0 0 0.5 57 No.SFOD-OMT0009CN-B () ... ...

MHY2/MHW2

0.1 0.1 5 L L 0 20 30 50 60 Holding point L (mm) 40 70 0 30 40 60 70 Holding point L (mm) 50 80 90 2.8-4 180 Angular Gripper Series MHY2/MHW2 MHW2-32D MHW2-50D MHW2-20D 300 25 100 Pressure 0.7MPa Pressure 0.7MPa Pressure 0.7MPa 250 20 0.6 80 0.6 0.6 Holding force (N) Holding force (N) Holding force (N) 200 0.5 0.5 0.5 60 15 0.4 0.3 150 0.4 0.4 40 10 0.3 0.3 100 0.2 0.2 0.2 5 20 50 0 0 40

New

< VXF27B< VXF28B< 20 20 20 20 23 23 23 23 102 105 105 105 20 20 20 20 68.5 68.5 68.5 68.5 108 111 111 111 47.5 47.5 47.5 47.5 20 20 20 20 18 Series VXF2 Dimensions on the Mounting Side: Flange type VXF25B<<< VXF26B<<< 8 x M10 x 1.5 x 20 /C1 8 x M8 x 1.25 x 20 /C1 7 x 45o 7 x 45o 22.5o 22.5o A A A A 166p0.2 178p0.2 A-A A-A The surface roughness of the orifice machining should be Rz6.3 or less

LA-OMP0023

10 20 30 40 50 0 10 20 30 40 50 Pushing Position [mm] Pushing Position [mm] Operating conditions: Operating conditions: Mounting orientation: Mounting orientation: Horizontal table mounting.

Vacuum Unit

exhaust Suction flow (High-noise reduction silencer exhaust) Vacuum pressure [kPa] 0 0 20 40 60 80 60 60 Suction flow [L/min (ANR)] 50 50 Suction flow (Silencer exhaust/ Complex exhaust) Suction flow (Silencer exhaust/ Complex exhaust) Flow Rate Characteristics 40 40 100 Air consumption Vacuum pressure [kPa] 30 30 80 60 20 20 40 High-noise reduction silencer exhaust 10 10 20 0 0 0.1 0.2

HRX-OM-Y098

-A-20 CH1) 8.5.2 HRL200-A-20 CH1 0.6 60 Circulating fluid outlet 0.5 50 Lifting head [m] 0.4 40 Pressure [MPa] 0.3 30 Usable flow rate range 0.2 20 Circulating fluid return 0.1 10 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Circulating fluid flow[L/min] Fig. 8-10 Pump capacity(HRL200-A-20 CH1) HRL Series Documents 8-9 HRX-OM-Y098 Chapter 8 Documents 8.5.3 HRL300A20 CH1 0.7 70 Circulating

HRX-OM-W060

fluid outlet Lifting head [m] Pressure [MPa] 0.4 40 0.3 30 Usable flow rate range 0.2 20 Circulating fluid return 0.1 10 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 Circulating fluid flow [L/min] Fig. 8-9 Pump capacity(HRL100-A-20 CH1) 8.5.2 HRL200A20 CH1 0.6 60 0.5 50 Circulating fluid outlet Lifting head [m] Pressure [MPa] 0.4 40 0.3 30 Usable flow rate range 0.2 20 Circulating fluid

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

30 40 Load N 0 10 20 30 50 Load N 0 10 20 30 40 Load N 40 10 10 10 L = 100mm L = 100mm L = 100mm MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 Table displacement mm Table displacement mm Table displacement mm 0.03 0.06 0.02 0.02 0.04 0.01 0.01 0.02 0 0 0 80 20 40 60 80 Load N 20 40 60 80 Load N 20 40 60 100 Load

Digital Flow Switch ( compatible)

A to B C to D 500 L 5 to 500 -25 to 525 L/min 1000 L 10 to 1000 -50 to 1050 2000 L 20 to 2000 -100 to 2100 PF2MC7 40 to 4000 -200 to 4200 500 L 0.17 to 17.66 -0.90 to 18.50 cfm 1000 L 0.35 to 35.31 -1.80 to 37.10 2000 L 0.70 to 70.63 -3.50 to 74.20 The flow ranges and relationship between the fluid and PD are shown in the figures below.

Electromagnetic Digital Flow Switch

IN Uninstallable area 20 mm 20 mm When the product is mounted vertically, place the display vertical to the floor to prevent bubbles from occurring. 50 mm 50 mm Uninstallable area Mounting orientation: Mounting orientation: OUT OUT Integrated display type In cases where multiple switches are to be installed in parallel inside the uninstallable area, fluctuation of the display can be reduced

Electric Actuator / Slider Type 《 AC Servo Motor 》

Positioning repeatability [mm] Basic type:0.02/High precision type: 0.01 Lost motion [mm] Basic type:0.1 or less/High precision type: 0.05 or less Lead [mm] 20 12 6 24 16 8 30 20 10 Impact resistance/vibration Resistance [m/s2] Note 4) 50/20 Drive method Ball screw(LEFS)Ball screw + Belt(LEFSL R) Guide type Liner guide Operating temperature range [] 5 to 40 Operating humidity range [%RH]

JXCx-OMU0026

12.0 0.5 Axis 3 Absolute 50 100.00 1000 1000 0 0 30 100 6.0 12.0 0.5 Axis 1 Relative 500 800.00 1000 1000 50 50 35 100 0 0 10.0 1 Axis 2 Relative 500 900.00 1000 1000 50 50 35 100 0 0 10.0 Axis 3 Relative 500 900.00 1000 1000 50 50 35 100 0 0 10.0 Step Data details Description Input range Explanation Step No. 0 to 2047 Number of step data. 3 lines (4 lines partially) of data per step.

Series AP500

(22.4) 0 20 40 60 80 Flow rate (slpm, N2) 2 x 10-32 UNF depth 0.3 (7.6) (Mounting hole) AP1000HF 100 psig (0.69 MPa) 30 psig (0.21 MPa) Inlet pressure: 50 psig (0.34 MPa) 70 0.48 60 0.41 Delivery pressure (MPa) Delivery pressure (psig) 50 0.34 Connections A 40 0.28 (mm) inch FV4 MV4 TW4 FV6 MV6 TW6 (94.0) 3.70 30 0.21 2.96 (75.2) 20 0.14 4.70 (119.4) 10 0.07 2.96 (75.2) 0 0.00 0 20 40 60