1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

11 30 5 21 28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82 62 20 93 48 14.5 6 22 50 7 39 6 36 21 M5 x 0.8 45 45 105.5 76 25 114 65 17.5 8 32 64 7 52 6 38.5 25 M5 x 0.8 17-5-48 7 Series LVD Integral Fitting Type (Hyper Fittings) With flow rate adjustment (Max.

VCW

36.5 13.5 15 32 25 23 M5 24 59 46 57 60 54.5 48.5 101 57 68 1/2 22 45 89 41 11 17 36 22.5 23 M5 26 64.5 48 62.5 62 60 50.5 103 62.5 70 1/4, 3/8 VCW41 30 50 93.5 41 13.5 17 36 25 23 M5 26 66.5 48 64.5 62 62 50.5 103 64.5 70 1/2 35 60 101 41 17.5 17 36 30 28.2 M5 26 70 48 68 62 65.5 50.5 103 68 70 3/4 4 Direct Operated 2Port for Water Series VCW Dimensions (N.O.)

Speed Controller with One-touch Fitting

Connection thread size (R, NPT, G) Proper tightening torque [Nm] 1/16, 1/8 3 to 5 1/4 8 to 12 3/8 15 to 20 1/2 20 to 25 Body size Maximum allowable torque [Nm] M5 0.05 1/8 0.07 1/4 0.16 3/8 0.2 1/2 0.4 2. Insufficient tightening may cause seal failure, or loosen the threads. 3.

PF2D

0 5 10 15 20 25 30 40 35 Flow rate (l/min) Flow rate (l/min) Flow rate (l/min) Construction PF2D504/520 Component Parts Material No.

SFOD-OMT0005CN

IP . 22 5 . 23 5.1 PWR . 23 5.2 MOT:ENC: . 23 5.3 SII/O . 23 (1) . 23 (2) . 24 5.4 P1P2: EtherNet/IP . 24 6 . 25 6.1 . 25 6.2 . 25 6.3 . 26 (1)(C24V,M24V,0V) . 26 (2)(EMG) . 26 (3)(LK RLS) . 26 6.4 . 27 (1)() . 27 (2)() . 28 -1- (3)((2)) . 29 7LED . 30 7.1 LED . 30 7.2 LED . 30 8 . 31 8.1 . 31 8.2 No. . 31 8.3 / . 31 8.4 . 31 9 . 32 9.1 . 32 (1) . 32 (2) . 33 (3) . 37 (4)

AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel 304 M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel plated

MGZ Series

(same side) Reed switch D-Z73, Z76, Z80 20 1 pc., 2 pcs. (different sides) 60 2 pcs. (same side) D-Y59A (B), Y69A (B) Y7P (V) 20 1 pc., 2 pcs. (different sides) 70 2 pcs. (same side) D-Y7NW (V), Y7PW (V) Solid state switch Y7BW (V) 1 pc., 2 pcs. (different sides) 25 2 pcs. (same side) 70 D-Y7BAL 1pc., 2 pcs.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

4 12 M6 x 1 (Width across flats 3) M8 x 1 (Width across flats 4) MXY8 M4 x 0.7 29 40 30 10 70 3.5 20.9 4 25 2.5 25 5 14 MXY12 M5 x 0.8 31 52 40 15 86 8.5 30.9 5 3 36 32 6 18 PH TB Z T WR RL QW R RH WE WD Q W PR P PL TH Model MXY6 5.1 2.9 88 4 12 60 5 7 30 11 13 3(depth 3) 3(depth 3) 2.5 9 20 25.5 MXY8 6.1 98 3.4 4 15 70 6.5 7 38 19 13 3(depth 3) 3(depth 3) 3 10 25 32 MXY12 7.8 114 4.5 21

AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

VCL

M5 8 81.5 1/4, 3/8 VCL31 24 25 59 46 57 60 54.5 48.5 101 57 68 104 30 50 36.5 13.5 15 32 25 23 M5 8 86 1/2 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 107 22 45 41 11 17 36 22.5 23 M5 8 90 1/4, 3/8 VCL41 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 111.5 30 50 41 13.5 17 36 25 23 M5 8 94 1/2 26 26.5 70 48 68 62 65.5 50.5 103 68 70 119 35 60 41 17.5 17 36 30 28.2 M5 8 102 3/4 Note) For class

SYJA3000

) 2-M5 X 0.8 35 (Mounting holes for manifold) 17 (Pilot port) B A 1 34 B 27 A A B 13 1 1 1 3 R1 P R2 32.5 45.5 2-M5 X 0.8 31.5 38 (pilot port) 64 3.2 269.5 14 (Non-locking) Manual override (Mounting holes) 35 89 (Non-locking) Manual override 3-Rc(PT)1/8, 1/4 (P, A, Bport) 29 28 25 21 1.6 14 89 18 21.8 (Bleed hole) With filter (80 Mesh) 55 2-1.8 (Bleed hole) With filter (80 Mesh) 40 25.5 20

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

9.5 2H9 2 4.8 20 22.5 2H9 2 11 2H9 2 1 3.5 18 56 13.4 26.2 11.3 28 10 2H9 2 5.3 21 24.5 2H9 2 11.5 2H9 2 2 3.5 20.5 60 15.2 31 11.8 30.5 12 2H9 2 5.3 25 27 2H9 2 13.5 2H9 2 3 4.5 23 73.5 15.4 37.4 14.9 34.5 14 3H9 3 6.5 29 32.5 3H9 3 15.5 3H9 3 7 912 Rotary Table MSQ 1122Dimensions: Size 10, 20, 30, 50 Basic type: MSQBA 1122XB effective depth XC WB effective depth WC 2 XA 8 x WD depth WE

Process Pump Series PA3000/5000/PAX1000 Series PB1000

20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min 1m = 3.28ft 1l/min = 0.035SCFM Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Note Conductor resistance /km, 20C (68F) 65 or less 1.5m 3m 5m AXT100-DS25-015 Approx. 10 Cable: 25 cores x 24AWG AXT100-DS25-030 Withstand voltage 1min, VAC 1000 AXT100-DS25-050 L If a commercially available connector is purchased use a MIL-C-24308 standard 25 pin type female connector. Note) The minimum bending radius of the D sub connector cable is 20 mm.

11-cq2-e

6 Single acting, spring return Piston seal CQ2B12-S-PS Rod seal NBR 12 16 20 25 32 40 50 CQ2B12-S-PS CQ2B16-S-PS CQ2B20-S-PS CQ2B25-S-PS CQ2B32-S-PS CQ2B40-S-PS CQ2B50-S-PS CQ2B16-S-PS Gasket CQ2B20-S-PS CQ2B25-S-PS CQ2B32-S-PS CQ2B40-S-PS CQ2B50-S-PS Left no. !4. Seal kit includes !4. Order the seal kit, based on each bore size.

11-cqs-e

3 20, 25 20, 25 The numbers are the same as the "Construction" of the Best Pneumatics No.2 Series CQS. *BLUE links will lead to purchase pages. Seal Kit List Description Material Note No. Replacement Parts: Seal Kit Kit no. Contents Bore size (mm) !2 !3 !4 Left no. !

11-cuk-e

Contents Bore size (mm) CU10S-PS CU16S-PS CU20S-PS CU25S-PS CU32S-PS 10 16 20 25 32 CU10S-PS CU16S-PS CU20S-PS CU25S-PS CU32S-PS Gasket @3 @4 NBR Piston seal Set of left nos. @3, @4. 6 cannot be repaired. Seal kit includes @3, @4. Order the seal kit, based on each bore size. Seal kit includes a grease pack (10 g).

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8"1/2" 2.5, 4, 6 AS121F-M3 AS131F-M3 M3 x 0.5 6, 10, 16, 20 AS121F-M5 AS131F-M5 M5 x 0.8 6, 10, 16, 20 AS121F-U10/32 AS131F-U10/32 10-32 UNF Tube swivels 360 Universal type permits 360 piping swivel. (1) 20, 25, 32 AS221F-01 AS231F-01 R 1/8 20, 25, 32,