3 Port Solenoid Valve Rubber Seal Series SY100 1

DXT170-71-1 For DC (+COM) SY114-5LO SY100-30-4A-20 For AC SY114-1LO SY100-30-1A-20 Connector Hook Lead wire 4-3-2 3 Series SY100 Surge Voltage Suppressor Connector Assembly with Protective Cover Connector assembly with a protective cover whichs taken countermeasures against dusttight.

3 Port Solenoid Valve Rubber Seal Series SY100

DXT170-71-1 For DC (+COM) SY114-5LO SY100-30-4A-20 For AC SY114-1LO SY100-30-1A-20 Connector Hook Lead wire 4-3-2 Series SY100 Surge Voltage Suppressor Connector Assembly with Protective Cover Connector assembly with a protective cover whichs taken countermeasures against dusttight.

Low Friction Cylinders Series MQ

Bore size [mm] (Pressure receiving diameter) 4 6 10 16 20 Operating pressure range [MPa] Mass of moving parts [g] 4 8 24 62 103 Thrust control standard [N] 0.01 to 8 0.03 to 19 0.08 to 50 0.20 to 140 0.30 to 200 Stroke [mm] 0.001 to 0.7 10 (Excluding the mass of moving parts) 1170 (Metal Seal Type/Single Acting) /4, 6, 10, 16, 20 control range of 0.01 N to 200 N Application Examples: For

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

20 stations 20 R Port Rc (PT)1/4 Note) If there are more than 6 stations in type 20 or more than 9 stations in 21 type, supply air to both sides of "P" port and exhaust air from both sides of "R" port.

4/5 Port Air Operated Valve Series SYJA3000

Type 20 (5 Port/Body ported) How to Order Applicable solenoid valve SYJ320--M3 SYJ323--M3 SS5YJ320 05 A, B port M3 x 0.5 Applicable blanking plate assembly SYJ3000-21-1A Number of stations + + + + 02 2 stations R P R R P R : : P port M5 x 0.8 R port M5 x 0.8 20 20 stations Type 31 (4 Port/Base mounted) How to Order SS5YJ3 31 05 M3 Type 31 Type S31 ( ) Type 31 Type S31 Single solenoid

VXD21/22/23

Model Power source Frequency (Hz) 50 25 12 60 20 8 50 45 20 60 40 15 50 60 25 60 50 20 AC VXD21 DC AC VXD22 DC AC VXD23 DC Operating Fluid and Ambient Temperature Operating fluid temperature (C ) High temperature oil (3) Ambient temperature (C ) Temperature conditions Power source Water (Standard) Air (Standard) Oil (Standard) (D, E, N, P) High temperature water (3) (D, N) 99(4) 100(4) AC

Step Motor Controller (Servo / 24 VDC)

CN4 20 - (2) Connection with a PC Controller setting kit Controller 120.3 120.3 mm mm 200 200 mm/s mm/s USB cable (A-miniB type connector) 100 500 100 500 1 1 200 1000 200 1000 2 2 Communication 50 200 50 200 3 3 CN4 cable PC (The PC should be obtained separately.) Caution (1) Do not connect to equipment other than specified (LEC-W1, LEC-W2, LEC-T1, LEC-G).

Peltier-type Chiller Thermo-con/ Compact Type

) 148 40 185 163 Air Air Dustproof filter Model no. label NRTL label 90 20 20 110 Rubber legs (4 pcs.)

RHC

Refer to page 10-20-60 for details.

Clean Gas Filter

Series Clean Gas Filter/Clean Gas Strainer: Cartridge Type/Straight Type Dimensions SFB100/200: Rc 1/4 SFB101/201: NPT 1/4 SFB104: M5 HAA HAW Bracket 2 x M5, Rc 1/4, NPT 1/4 AT IDF IDU 24 40 50 IN IDF FS 2 x 4.5 66 IDFA IDFB Model Connection Rc 1/4 NPT 1/4 M5 SFB100-02, 200-02 SFB101-02, 201-02 SFB104-M5 IDH ID IDG SFB102-02, SFB202-02: TSJ 1/4 (Tube Swage Joint) IDK 2 x 4.5 Bracket AMG

ASR

rotations Number of needle rotations Flow Valve: Series ASQ Meter-out Type (Inlet pressure: 0.3 MPa) ASQ430F ASQ530F ASQ630F 20 10 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) Effective area mm2 Effective area mm2 Effective area mm2 400 6 200 15 300 4 500 10 5 200 100 2 5 100 10 5 0 10 5 0 10 5 0 Number of needle rotations Number of needle rotations Number of needle

Thermo-chiller

Thermo-chiller Dual Channel Refrigerated Thermo-chiller for Lasers HRL Series How to Order HRL A 20 100 Power supply Cooling capacity CH1 CH2 100 9 kW 1 kW 200 19 kW 1 kW 300 26 kW 1 kW 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) Pipe thread type Nil Rc F G (with Rc-G conversion tting) N NPT (with Rc-NPT conversion tting) Cooling method A Air-cooled refrigeration Specications

Compact Hydraulic Cylinder

Standard Strokes Bore size (mm) Standard strokes (mm) 20 32 40 50 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic Fluid Compatibility 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 80 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic fluid Compatibility

HRX-OM-W038

Table 3-3 Power supply cable and Earth Leakage BreakerRecommended Recommended earth leakage breaker Model Power supply Sensitivity voltage Cable qty. x size Rated Rated of leak voltage current current [V] [A] [mA] 1-phase 200-230V AC (50/60Hz) 3 cores x12AWG HRS040-A-20 200, Recomm 230 20 30 Terminal (3 cores x3.5mm2) HRS040-W-20 block ended (including ground) screw crimp diameter terminal

ZP

-75kPa -80kPa -85kPa 100 Pad diameter (mm) 80 63 50 40 10 30 50 70 100 200 5 7 Lifting force (N) How to read Example: Work load 20 kg (Lifting force: 196 N) Conditions:Desired number of pads 5 pcs.

HRX-OM-O021

Table 3-3 Power supply cable and Earth Leakage BreakerRecommended Terminal block Recommended earth leakage breaker screw Recom Tightening Model Power supply Cable qty. x torque Rated Sensitivity Rated diameter mended voltage size voltag of leak current crimp e current [A] terminal [V] [mA] 3coresx12AWG 1-phase (3 cores 200-230V AC HRS050-A-20 200, x3.5mm2) (including 230 20 30 M4 5.5-4 1.5Nm

IR1000/2000/3000

Conditions: Supply pressure 0.7MPa Set pressure 0.2MPa Flow rate 0 l/min (ANR) IR1000-01 IR1000-01 IR1000-01 Conditions: Back pressure 0.5MPa Conditions: Supply pressure 0.5MPa 0.5 0.204 0.2 Set pressure P2 MPa Set pressure MPa Set pressure MPa 0.4 0.202 0.15 Setting point 0.3 0.200 0.1 0.2 0.198 0.05 0.1 0.196 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8 0.7 0.9 1.0 0 40 20 80 60 100 140 120 0 50 100 200

Precision Regulator

Supply pressure: 0.3 to 1.0 MPa Set pressure: 0.2 MPa Flow rate: 0 L/min (ANR) Supply pressure: 0.5 MPa IR1000-01 IR1000-01 IR1000-01 Back pressure: 0.5 MPa 0.5 0.204 0.2 Set pressure P2 (MPa) Set pressure (MPa) Set pressure (MPa) Set pressure (MPa) 0.4 0.202 0.15 Set point 0.3 0.200 0.1 0.2 0.198 0.05 0.1 0.196 0 40 20 80 60 100 140 120 0 50 100 200 250 150 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8

Vacuum Unit

Low noise 60 ZK2A07 (Silencer exhaust) ZK2G07 (High-noise reduction silencer exhaust) 46 dB (A) 1 50 1 Nozzle size: 0.7 (Under SMCs measurement conditions) 40 Noise level [dB (A)] 30 Reduces high-frequency range from 2000 to 20 Hz. 20 10 0 200 2000 20 Frequency [Hz] Suction flow Improved by up to approx. 20% Max. suction flow [L/min (ANR)] Nozzle size Exhaust type 40 80 Approx. 20% High-noise

Fieldbus system EtherCAT compatible SI Unit

(AXB cannot select the following ranges. -10..10 V/ -5..5 V/ -20..20 mA) -5..5 V -10..10 V -20..20 mA (AXA) Sets the analogue input device range. 0..10 V 2 Analogue input range Channel 0..5 V 1..5 V (AXB) 1..5 V 0..20 mA 4..20 mA Offset binary Offset binary. Sign & Magnitude Signed binary.