SMC Pneumatic Clean Series

M 2 B 20 100 H N H7B 21 C D B M 2 B 20 100 H N H7B Nil Built-in magnet No Number of auto switches D With auto switch (Built-in magnet) Nil S n 2 pcs. 1 pc.

2-Color Display Digital Flow Switch Series PFM

A B A B 4 (5/32") 10.1 8.1 4 (5/32") 10.1 36.1 6 10.3 8.3 6 10.3 36.3 8 (5/16") 12 10 8 (5/16") 12 37 1/4 10.3 8.3 1/4 10.3 36.3 PFM S-01/02--X693 PFM S-01/02--X694 7 5 7 5 10.2 10.2 (34.2) 43 1 43 1 A PFM A 51.5 (Max. 58.5) 51.5 (Max. 58.5) PFMV IN OUT 3 (34.2) PF2A 13 3 13 PF2W PF2D C 18 C 18 OUT IN B 48 20 20 48 B IF 2 x 3.4 2 x 3.4 C (Width across flats) C (Width across flats) A B A B

Compact Hydraulic Cylinder Series CH
KGB

MA B D-F9BAL A 32 to 100 Proper auto switch mounting positions (mm) D-Z7, D-Z8, D-Y5 D-Y6, D-Y7 D-Y7V, D-Y7WV D-Y7BAL B Bore size (mm) D-Z7 D-Z8 D-Y5 D-Y7 D-Y7W B 18 21.5 26.5 31 39 46.5 A 13.5 19 19 21.5 24.5 34.5 32 40 50 63 80 100 B A D-Y6 D-Y7V D-Y7WV Auto switch mounting heights (mm) Bore size (mm) D-Y7BAL SMC MA SMC 32 40 50 63 80 100 33 37.5 43.5 52 62.5 75 Approx.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Hv Auto Switch Proper Mounting Position Solid state auto switch Bore size (mm) 2-color indication solid state auto switch Reed auto switch B C A B Hv A B C A B Hv A B Hv A B C D-A9 D-A9V D-M9 D-M9V D-F8 D-M9W A B Hv D-M9WV A 36 25 16 36 25 15 32 21 20 32 21 17.5 18 7 25 32 21 20 32 21 17.5 8 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

MTS

A B Hs A B Hs Hv Hv Hv Hv 12/16/20 12/16/20 Hs Hs 25/32/40 25/32/40 Proper Auto Switch Mounting Position Solid state switch Bore size (mm) 2-color indication solid state switch Reed switch D-A9 D-A9V D-M9 D-M9V D-F9W D-F9WV A B C A B Hs Hv A B A B Hs Hv A B C A B Hs Hv C 15.5 15 20 20 15 19.5 19.5 19.5 19.5 46 46 46 46 18 13 15.5 35.5 42 31.5 42 31.5 12 17 17 22 22 17 21 21 21 21 47.5 47.5

240

or less 100 70 30 3 100 15 1 LEC 11.

Compact Cylinder

23 12.5 6 5 to 100 90.5 49.5 21.5 47.5 7 37.5 76.5 3.2 12 68.5 27 13.5 6 5 to 100 99 49.5 26.5 52.5 9 46.5 79.5 3.2 15 86.5 30 15 8 Vertical foot bracket material: Carbon steel Surface treatment: Nickel plated Lateral foot: CQUM Rod end nut B + Stroke L 4 x MD MY MH MT L1 Rod end male thread A + Stroke MS + Stroke X Y X Y MX MZ CQUM20 Lateral Foot (mm) A 42.5 B 21.5 L 39.5 L1 6 MD 15 MH

IZx-OMP0064

mA Residual voltage 1 V or less (Load current at 100 mA) Max. load current: 100 mA Residual voltage 1 V or less (Load current at 100 mA) Max. applied voltage: 26.4 VDC Max. load current: 100 mA Residual voltage 1 V or less (Load current at 100 mA) Max. load current: 100 mA Residual voltage 1 V or less (Load current at 100 mA) Max. applied voltage: 26.4 VDC Maintenance detection signal Output

Compact Vacuum Unit

Note 2) M-type plug connector is not available with the model with pressure sensor. 13A Table 3 Supply valve/release valve accessories Manual override Note 3) Supply valve/release valve model Accessories ZB1-VQ110UZB1-VQ110U-B ZB1-VQ110LZB1-VQ120UZB1-VQ120U-B ZB1-VQ110ZB1-VQ110-B Nil B Mounting screw (M1.7 x 0.59 inch (15 mm)) 2 pcs.

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

: 3.5MPa Series CHQB B 32 to 100 D-A9 D-F9 D-F9W A Approx.

Bag Filter

B to Nominal filtration accuracy of 5, 10, 25, 50, 100 m can be selected.

SYJ300/500/700

It can be used in the vacuum (up to 100 kPa) or low pressure line with 0.15 MPa or less.

5 Port Solenoid Valve SY Series

4/25/3 (A/BEA/EB) Grommet Cv b C (kdm3/ 14/2 (PA/B) 4/25/3 (A/BEA/EB) Grommet Cv b C (dm3/ L, M plug W M8 L, M plug W M8 1, 5, 3 4, 2 (A, B) 1, 5, 3 4, 2 (A, B) DIN terminal (sbar)) Cv b C (kdm3/ (sbar) ) Cv b C (dm3/ (P, EA, EB) (P, EA, EB) connector 51 53 68 74 connector 57 82 connector 101 104 120 125 connector 129 175 (sbar) ) (sbar) ) Single Single 2 position 125 167 2 position 0.23

Compact Type

9 @2 Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Parts List: Standard Piping No. Description Material No.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Foot Refer to page 5 for accessories Without auto switch With auto switch Without/with auto switch Long stroke Standard stroke (mm) Standard stroke (mm) Long stroke (mm) Bore (mm) LS B 20 20 29 29 A 32 32 41 44 LS 50.3 50.3 62.7 66.2 B 10 10 17.5 17.5 A 22 22 29.5 32.5 LS 40.3 40.3 51.2 54.7 B 5 5 7.5 7.5 A 17 17 19.5 22.5 12 16 20 25 35 to 100 35 to 100 75 to 200 75 to 300 5 to 30 5 to

Ionizer

Power supply 24 VDC B B B Ground with a ground resistance of 100 or less without connecting the DC1 () lead (Blue) of the power supply cable to the power supply 0 V. Red A A +24 V Black Blue Charged object Charged object 0 V Reduced-wiring Fieldbus System F.G. (mm) Ground with a ground resistance of 100 or less. A B When using the autobalance sensor (body-mounting type) 10 20 20 40 3.

Electric Actuator / Guide rod Slider

The INPoutput signal is turned on from 100[mm] 1[mm]=99 [mm] Area 2[mm] j Area 1[mm] j 100 b Speed[mm/s] 0 ON AREA Output signal OFF (INPOutput condition) INP Output signal ON In pos[mm] k OFF 101 99 0 10 20 30 40 50 60 70 80 90 100 Stroke [mm] -19- Example of step data input (2) < Positioning operation Ralative > a b c d e f g h i j k No.

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

3.5MPa Series CHQWB B 32 to 100 D-A9 D-F9 D-F9W A B Approx.

Electric Actuators

282 LXPB5SB LXPB2SB LXPB5SA LXPB2BC LXPB5BC LXPB2BD LXPB5BD LXPB2SA LXPB5SB-B LXPB2SB-B LXPB5SA-B LXPB2BC-B LXPB5BC-B LXPB2BD-B LXPB5BD-B LXPB2SA-B 5 phase 240 to 200 2 phase 224 284 to 200 5 phase 238 to 100 2 phase to 30 218 5 phase 234 to 30 294 2 phase 220 to 80 5 phase 236 to 80 2 phase 222 to 100 304 5 phase 248 to 200 284 2 phase to 200 232 5 phase 246 to 100 2 phase 226