CL

11 41 52 22 100.5 Up to 300 24 21 76 14 H GR H1 K PG P N NA PH PL PW S TD TT TY TX TZ Z ZZ MM NN Bore size (mm) 1/8 1/8 1/8 1/4 20 127 38 10 20 32 22 32 52 8 183 173 5 4 41 19.5 M20 x 1.5 24 15 M8 x 1.25 5 25 137 10 40 40 60 9 197 187 41 24 27 6 7 45 24 M26 x 1.5 30 15 M10 x 1.25 5.5 32 139 10 40 40 60 9 199 189 41 24 27 6 7 45 24 M26 x 1.5 34.5 15 M10 x 1.25 5.5 40 167 11 53 53 77 10 233

Air Cylinder Series CS1

l Z ZZ d e f h Z ZZ Z ZZ 125 140 160 180 200 250 300 0.050 0.089 159 318 82 75 40 133 182 341 182 364 50 170 164 234 110 0.2 stroke 32 Lube Non-lube Air-hydro 0.050 0.089 159 318 82 75 40 133 182 341 182 364 55 190 184 262 110 0.2 stroke 36 0.050 0.089 173 346 82 75 40 141 194 367 194 388 60 212 204 292 120 0.2 stroke 40 0.050 0.089 381 92 85 45 153 399 417 59 236 228 326 135 0.2 stroke 45

MXS Series Air Slide Table

(NN-1) X H G Cross section AA Cross section BB (mm) Model F 35 35 35 40 30 55 65 70 GA 16 16 16 16 51 61 109 159 KA NA 2 2 2 2 2 4 4 4 N 4 4 4 4 6 6 6 8 HA 40 40 40 50 30 70 70 70 G 16 16 16 16 21 26 39 19 H 40 40 40 50 30 35 35 35 NN 2 2 2 2 3 4 5 7 I 10 10 10 10 15 40 55 68 J 40 40 40 50 60 85 118 155 K 29 39 49 59 69 94 119 144 Z 75 75 75 85 100 150 198 248 M 76 76 76 86 101 151 199 249

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Model L2 K J M N t W H E Panel thickness (Max. t) J L1 W 12 19 10 12 6 8 10 4 6 19 LQ2P22 LQ2P21 14.5 N (M) 6 18 19.9 7 16 31 73 LQ2P52 LQ2P51 LQ2P42 LQ2P41 LQ2P33 LQ2P32 LQ2P31 (E) (E) 36 83 H 20.5 6 22 24 26.2 7 24 L1 Class 2, 3 42 34.5 95 82 L2 24.5 Panel aperture K 9 28 30 33.1 7 30 21 49 40 110 93 (M) 30.5 9 32 36 40 10 36 26 47 108 H Inch sizes Courtesy of Steven Engineering, Inc.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

(mm) 15 27 57 86 160 224 1 1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCUK N S NBR 40 50 40 50 Silicon rubber Urethane rubber Fluororubber Pad type U F E EPR 63 63 AMJ H Heavy duty 80 80 100 100 AMV Add NBR mass to the table on the right for other materials. 125 125 AEP Dimensions HEP ZP H 40 50 63 80 ZP H 100 125 ZP H Related Equipment 3 x 6.5 3 x 4 4 x 8 4 x 5 4 x 9.5 4

Pilot Operated

40 40 DIN terminal Conduit terminal J 58.5 58.5 54.5 56.5 J 1/4, 3/8 1/2 I 19.5 19.5 I H 54 56 46.5 46.5 I H I Normally closed 26 28 20 24 30 26 80.5 86 11 14.5 21 28 61 61 92 92 VXD2130 Model Grommet Electrical entry (AC/Class B coil) Conduit H 53 55 48.5 48.5 DIN terminal Conduit terminal J 65.5 65.5 53 55 Normally closed H 58 60 I 30 30 I H 54 56 53.5 53.5 I H I J 69.5 69.5 100.5 100.5

Current proportional valve, PROPORTIONAL VALVE

Auto Switch Guide

S Surge absorber (mm) Applicable bore size (mm) 40 50 63 80 100 C H' T T' HW H Z Auto switch model CV D-A3C-4, D-A44C-4 D-A3C-5, D-A44C-5 D-A3C-6, D-A44C-6 D-A3C-8, D-A44C-8 D-A3C-10, D-A44C-10 58 (67.5) 59 (68.5) 61.5 (71) 65 (74.5) 68 (77.5) 50.5 (60) 51.5 (61) 53 (62.5) 54.5 (64) 57.5 (67) 7.5 8.5 10.5 12.5 15.5 44 52 64 78 92 6.5 6.5 7.5 9.5 9.5 69 77 91 107 121 M5 x 0.8 x 16 MVGQ M5

AS

(1) H (1) D2 D3 L1 L2 L3 L4 M1 Min.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

l Z h f e Z ZZ ZZ Z ZZ 0.050 0.089 40 133 159 318 75 0.2 stroke 182 341 182 364 50 170 164 234 110 32 Lube Non-lube Air-hydro 0.050 0.089 133 40 75 159 318 0.2 stroke 182 341 182 364 55 190 184 262 110 36 0.050 0.089 141 75 40 173 346 0.2 stroke 194 367 194 388 60 212 204 292 120 40 0.050 0.089 153 45 85 190.5 381 0.2 stroke 208.5 399 208.5 417 59 236 228 326 135 45 0.050 0.089 45 153 190.5

LJ1H

TSUBAKI CABLEVEYOR cross-sectional dimensions (mm) A Series A B H S LJ1 10 LJ1 20 LJ1 30 10 20 B H S H S 10 20 14 40 H S Example) For LJ1 10 2 3 6 4 8 8 4 Correct: 60% or less Incorrect: More than 60% 103 104 Made to Order Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

CM2

X 1.5 NA 24 30 34.5 42.5 F 13 13 13 16 A 18 22 22 24 NN M20 X 1.5 M26 X 1.5 M26 X 1.5 M32 X 2 G 8 8 8 11 AL 15.5 19.5 19.5 21 H 41 45 45 50 B1 13 17 17 22 H1 5 6 6 8 0 0.033 0 0.033 0 0.033 0 0.039 With rod boot h Symbol Bore 20 25 32 40 S 62 62 64 88 TD 8 9 9 10 TT 10 10 10 11 TX 32 40 40 53 TY 32 40 40 53 TZ 52 60 60 77 Z 36 40 40 44.5 ZZ 116 120 122 154 f e Stroke 1 to 50 68 72 72 77

C76

-24A h 43 50 d6 20 30 b3 b1 14 16 l 20 22 d7 19 22 Thread d3 M10 x 1.5 M12 x 1.75 Bore 32 40 Model KJ10DA KJ12DA Bore 32 40 dH71 10 12 10.5 12 13 13 Floating joint/Series JA JA25/40 (mm) M Max. operating tension and compression power kgf (kwN) Maximum screwed depth P Allowable eccentricity U A B D E F G H Bore Model Pitch Nominal thread dia. 32 40 JA25-10-150 JA40-12-175 10 12 1.5 1.75 49.5

C76

d3 M10 x 1.5 M12 x 1.75 h 43 50 d6 20 30 b3 b1 14 16 l 20 22 d7 19 22 Bore 32 40 Model KJ10DA KJ12DA Bore 32 40 dH71 10 12 10.5 12 13 13 CA2 CS1 C76 C85 Floating joint/Series JA JA25/40 C95 CP95 NCM NCA D-X (mm) 20M Max. operating tension and compression power (kN) Maximum screwed depth P Allowable eccentricity U A B D E F G H Bore Model Pitch Data Nominal thread dia. 32 40 JA25-10-150 JA40

Hygienic Design Cylinder Series HY

Note 2) Contact SMC for HYQ 20, 25. 887 Options Rod End Nut Plug Bolt Series HYQ, HYC Series HYC Series HYB, HYG d M BM BM M C B2 BZ BZ B2 B H Material: Stainless steel (mm) Material: Stainless steel (mm) Material: Stainless steel (mm) HYB d C B H 20 25 32 40 50, 63 B2 BM 32, 40 50, 63 10 12 M BZ 22 24 6 8 B2 M BZ BM 20 25 32 40 50 63 80 100 Applicable bore size Part no.

1.1

HRG-BP005 A Connection thread Note) D Connection thread E H B C (mm) H (Width across flats) Connection thread R, Rc Mass (kg) Part no.

17

(Refer to the Tightening Torque for Stroke Adjustment Unit Lock Plate Holding Bolts.) 32 5.8 100 1 2 3 4 5 10 20 30 40 m2m3 max. m1 max. 40 13.8 Load mass kg MY1B MY1B Tightening Torque for Stroke Adjustment Unit Lock Plate Holding Bolts MY1B32 Horizontal collision: P = 0.5 MPa MY1H Unit: Nm 2000 1500 Tightening torque 1.2 3.3 3.3 10 3.3 10 Bore size (mm) Unit L H L H L H MY1B Collision speed

AC

Model Port size M B B A B C D P E F G H J K L 8, 1 4 1 40 53 70 75 97.5 129 165 169 11 14 18 20 40 53 70 70 40 56 73 73 17 16 17 14 30 41 50 50 27 40 54 54 22 23 26 25 5.4 6.5 8.5 8.5 8.4 8 10.5 10.5 40 53 70 70 2.3 2.3 2.3 2.3 120.5 AFD2000 AFD3000 AFD4000 AFD4000-06 4, 1 8 3 170 206 210 4 3 2 1 4, 1 8, 3 AFD2000 AFD3000 SAC2000, #1 SAC2503, #1 AFD4000 AFD4000-06 SAC4000, #1 SAC4006,

Rotary Clamp Cylinders

149 185 245 300 400 525 625 825 980 1400 1560 0.7 56 77 105 140 139 208 258 341 418 557 731 870 1149 1365 1950 2172 1.0 80 110 150 200 200 298 370 490 600 800 1050 1250 1648 1961 2801 3121 R H R H R H R H R H R H R H R H 12 6 16 8 Clamp part 20 12 Non-rotating accuracy 0.7 to 1.4 During clamping (Retraction end) 25 12 32 16 Made to Order (For details, refer to page 40.) 40 16 50 20 XB6 Head

Aluminum High Vacuum Angle Valve

Heater: 422 A XLC/XLCV Series Aluminum High Vacuum Angle Valve Dimensions XLC16, 25, 40/ Air operated (b) E C D E C E Fn (KF flange) (a) Heater (Option) (c) Auto switch (Option) H J B G A A (mm) J A B C D E Note 1) Fn G H Model XLC-16 XLC-25 XLC-40 40 110 38 1 30 17 40 26 50 121 48 1 12 40 26 39 28 65 171 66 2 11 55 41 63 36 Note 1) Dimension E applies when heater option is included.