Compact Vacuum Ejector Series ZQ

Left Right 15 -60 -60 10 -40 -40 Air consumption -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE

Digital Flow Switch ( compatible)

(page 79) 8010 0x1F4A 0 R Flow rate PD intercept b F32 N The conversion method from the communication value to the actual measurement value is the same as the method for process data. 8030 0x1F5E 0 R Flow bottom value S16 0 N 8020 0x1F54 0 R Flow peak value S16 0 N -200 to 4200 1 R Accumulated mantissa F32 N 0 to 9 Accumulated PD Accumulated value conversion factor = Current accumulated

PFxx-OMX0002

to table Toggle 7010 0x1B62 0 W Toggle output command U8 N output command.

VK300

1/8 (R port) S070 VQ L Dimension n: Stations VKF n L 20 399 388 19 380 369 18 361 350 17 342 331 16 323 312 15 304 293 14 285 274 13 266 255 12 247 236 11 228 217 10 209 198 9 190 179 8 171 160 7 152 141 6 133 122 5 114 103 4 95 84 3 76 65 2 57 46 1 38 27 L1 L2 VQZ VZ VS VFN 4-5-7 8 Series VK300 Type 40 Manifold Base Mounted (Bottom ported) VV3K3-40Stations -01 Grommet: G DIN terminal: D

Refrigerated Thermo-chiller

Option symbol N NPT Fittings N HRZ An adapter is included to change the connection parts of circulating fluid piping and facility water piping to NPT thread type. The adapter must be installed by customer.

ZP

Elliptic ZF ZP 2004 U N ZP Material Pad diameter ZCU N NBR 2 x 4 (Breadth x Length) 2004 S AMJ Silicon rubber 3507 U 3.5 x 7 Urethane rubber 4010 F 4 x 10 Misc.

Cylinder with Lock Series MNB

S Mounting bracket n pcs. n B Basic type Type of auto switch L Axial foot type F Front flange type Nil Without auto switch G Rear flange type Select the applicable auto switch type from the table below.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Refer to the basic type for the female rod end. 732 1011Series CG1R-Z 20, 25, 32, 40, 50, 63 Direct Mount Cylinder How to Order 10 C D G 1 R N 25 100 Z M9BW N Type Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

Multi-channel Digital Sensor Monitor ( compatible)

(page 80) 0x1F4A Process data 0x1F4B 0x1F4C 0x1F4D Conversion formula Intercept b 0 R N F32 (8010) (8011) (8012) (8013) 0 R H_Hi (Peak value) N U16 0x1F54 0x1F55 0x1F56 0x1F57 (8020) (8021) (8022) (8023) Refer to process data on page 76 to 80. 0x1F5E 0 R H_Lo (Bottom value) N U16 0x1F5F 0x1F60 0x1F61 (8030) (8031) (8032) (8033) 1: "R" means Read and "W" means Write. 1: When using IODD, only

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

1/8, M5 x 0.8 2(A) port 19 35 n-Rc 1/8 3(R) port 47.5 11 R R P = 19 19 L Dimension n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152 141 8 171 160 9 190 179 10 209 198 11 228 217 12 247 236 13 266 255 14 285 274 15 304 293 16 323 312 17 342 331 18 361 350 19 380 369 20 399 388 L1 L2 4-13-8 9 3 Port Direct Operated Poppet Solenoid Valve Series VKF300 Base mounted Common

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

Mount of single unit 24 or more 0 0.4 31 31 x n pcs. + 3.5 x (n pcs. 1) ZSE ISE 31 0 0.4 0 0.4 31 ZSP PS ISA PSE IS ISG ZSM Vertical stacking mount of multiple units (n pcs.) 0 0.4 31 24 or more 31 x n pcs. + 3.5 x (n pcs. 1) 851 Series PSE300 Dimensions PSE3T 38 8 x M3 3 x 7.2 (= 21.6) Front protective cover (Option) 2 x 3.4 mounting hole (Rotate 90 to mount) 6.4 2 x 6.4 1 2 3 4 35.5 28

Ionizer

(High pressure warning label position at 300 mm length) 19.6 25 80 x (n-1) 70 10 25 Emitter cartridge n (Number of emitter cartridges), L Dimension L(mm) 300 380 620 780 1100 1260 1500 1900 2300 n Part no. 3 4 7 9 13 15 18 23 28 (Name plate position at 300 mm length) IZS31-300 IZS31-380 IZS31-620 IZS31-780 IZS31-1100 IZS31-1260 IZS31-1500 IZS31-1900 IZS31-2300 660 A Ionizer Series IZS31 Dimensions

PFxx-OMX0007

peak value S16 N 0x0 to 0x1068 (0 to 4200) 8030 0x1F5E 0 R Flow bottom value S16 N 1 R Accumulated mantissa S16 N 0x0 to 0x270F (0 to 9) Accumulated mantissa x accumulated index = current accumulated flow 8040 0x1F68 2 R Accumulated index S16 N 0x0 to 0x0008 (0 to 8) -46No.PF-OMX0007-A 1: "R" means Read and "W" means Write. 2: Refer to the table below for the symbol.

AD402/600

Port 3/4 3/4, 1 D I M E N S I O N S AD S E R I E S A U I T O D R A I N S S Y M B O L S H O W T O O R D E R A U T O D R A I N S E R I E S AD AD402-02 (1/4) PT AD402-03 (3/8) PT AD402-04 (1/2) PT AD600-06 (3/4) PT AD600-10 (1) PT H O W T O O R D E R A U T O D R A I N S E R I E S NAD NAD402-N02 (1/4) NPT NAD402-N03 (3/8) NPT NAD402-N04 (1/2) NPT NAD600-N06 (3/4) NPT NAD600-N10 (1) NPT FOR FURTHER

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

Air Cylinder/End Lock Series MBB 32, 40, 50, 63, 80, 100 How to Order MBB L 32 50 H N Standard H N L 32 50 A53 MDBB With auto switch Number of auto switches Built-in magnet S 3 n 2 1 3 n Mounting Manual release Basic/Without bracket Axial foot Front flange Rear flange Single clevis Double clevis Center trunnion B L F G C D T Bore size N L Non-locking Locking 32 40 50 63 80 100 Without auto

VQ7-6/7-8

10 9 8 7 6 5 4 3 1 2 P , R1, R2 port n: Stations L1 = 56n + 64 L2 = 56n + 80 n: Stations L1 = 56n + 90 L2 = 56n + 106 L1 624 568 512 456 400 344 288 232 120 176 1/2 L2 640 584 528 472 416 360 304 248 136 192 L1 650 594 538 482 426 370 314 258 146 202 3/4 L2 666 610 554 498 442 386 330 274 162 218 ( ): 3/4 Dimensions inside are for rubber seals. 3-10-28 29 ISO Standard Solenoid Valve: Size

A

M E N S I O N S AD S E R I E S A U I T O D R A I N S S Y M B O L S H O W T O O R D E R A U T O D R A I N S E R I E S AD AD402-02 (1/4) PT AD402-03 (3/8) PT AD402-04 (1/2) PT AD600-06 (3/4) PT AD600-10 (1) PT H O W T O O R D E R A U T O D R A I N S E R I E S NAD NAD402-N02 (1/4) NPT NAD402-N03 (3/8) NPT NAD402-N04 (1/2) NPT NAD600-N06 (3/4) NPT NAD600-N10 (1) NPT FOR FURTHER TECHNICAL DETAILS

VQ7-6/7-8

10 9 8 7 6 5 4 3 1 2 P , R1, R2 port n: Stations L1 = 56n + 64 L2 = 56n + 80 n: Stations L1 = 56n + 90 L2 = 56n + 106 L1 624 568 512 456 400 344 288 232 120 176 1/2 L2 640 584 528 472 416 360 304 248 136 192 L1 650 594 538 482 426 370 314 258 146 202 3/4 L2 666 610 554 498 442 386 330 274 162 218 ( ): 3/4 Dimensions inside are for rubber seals. 3-10-28 ISO Standard Solenoid Valve: Size 2

VT317

Stations L Dimension VP Stations Formula L1 = 46 x n + 29 L2 = 46 x n + 14 10 489 474 9 443 428 8 397 382 7 351 336 6 305 290 5 259 244 4 213 198 3 167 152 2 121 106 L L1 L2 S070 With mounting adaptor: VV317-02-1-02-A VQ 4-7 mounting hole P = 46 VKF VQZ VZ Manual override (Non-locking) VS DIN terminal facing upward 141.6 VFN Applicable cable O.D. 6 to 12 L Dimension n: Stations Stations

VKF300

(PT) 1/8, M5 x 0.8 (port A) 19 35 n-Rc(PT) 1/8 (port R) 47.5 11 R R P = 19 19 L: Dimension table n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152 141 8 171 160 9 190 179 10 209 198 11 228 217 12 247 236 13 266 255 14 285 274 15 304 293 16 323 312 17 342 331 18 361 350 19 380 369 20 399 388 L1 L2 5 Series VKF300 Dimensions/Manifolds Base Mounted Type Common SUP, Common