PSxx-OMU0005CN

() NPN 2 Max.28 V80 mA 1 V R15 V 1 k S420 mA 12 V 300 24 V 600 50 -S/-R () NPN 2 Max.28 V80 mA 1 V -X () -S/-R () NPN 2 Max.28 V80 mA 1 V -21No.PS-OMU0005CN-C -V/-T () PNP 2 Max.80 mA 1 V T15 V 1 k V420 mA 12 V 300 24 V 600 50 -V/-T () PNP 2 Max.80 mA 1 V -Y () -V/-T () PNP 2 Max.28 V80 mA 1 V -22No.PS-OMU0005CN-C [] 3 0.2 [] / OUT2 OUT2 OUT1 OUT1 [F10]30 () 13

PSxx-OMU0008CN

DC(+) 5 OUT1 4 OUT2 3 FUNC 2 DC(-) 1 -21No.PS-OMU0008CN-D ZSE20C(F)/ISE20C(H)-S/-R () NPN 2 DC(+) Max.28 V80 mA 1 V R15 V OUT1 1 k S420 mA OUT2 12 V 300 24 V 600 DC(-) 50 DC(+) -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) DC(+) -X () -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) -22No.PS-OMU0008CN-D -V/-T () PNP 2 DC(+) Max.80 mA 1 V T15 V OUT1 1 k V420 mA OUT2

PSxx-OMM0002CN

-7No.PS-OMM0002CN-F 0~50(5) SUS630() SUS304() ( ) * 10~15 15 /1% 1941 LCD * -8No.PS-OMM0002CN-F ISE80 02 N 3 ISE80 -0.11MPa ZSE80 0-101KPa ZSE80F -100100KPa ISE80H -0.12MPa Y K + T + 2 02 R1/4 N02 NPT1/4 F02* G1/4 G01 Rc1/8 A2 URJ1/4 B2 TSJ1/4 A (ZS-24-A/ZS-35-A) B *(ZS-24-D) C D + F02 ISO228-1 1 *1 L M SI*2 P (psi)*1 1 2 ISE80H: MPa MPa kpa N NPN1 P PNP1 A NPN2 B PNP2 R

VXD21/22/23

system pressure (MPa) 1 4 1.9 2.4 4.5 2.4 5.5 9.5 VXD2130-02 VXD2130-03 VXD2140-03 VXD2130-04 VXD2140-04 VXD2150-06 10 10 15 10 15 20 0.02 0.02 0.02 0.02 0.02 0.02 2.0 2.4 5.0 2.4 5.5 9.5 0.35 0.35 0.35 0.35 0.35 0.30 8.5 9.2 18 9.2 20 38 46 58 110 58 130 230 0.4 0.4 0.7 0.4 0.7 0.7 0.5 0.5 0.7 0.5 0.7 0.7 0.7 0.7 1.0 0.7 1.0 1.0 0.9 0.9 1.0 0.9 1.0 1.0 0.5 0.5 1.0 0.5 1.0 1.0 420 420 670 500

NCX2 seies

415-500 ltcx2Ors-700 Wi[| Auto switch, rhlsing mou type: NCDBX2ei 5-ffim With Aub $vitch, Erd plate mo||rt type: t{CDpxZ6f s-6ffiI& Nole: This diagram is ior D-A7 or D-AB type. ( ): with D-F7 or D-J7 type.

Process Valve

When the pilot solenoid valve i is not energized (or when air is exhausted from the port 12(P1) of the air operated type), the valve element r linked to the piston t is closed by the return spring u.

CUJ

1 r y o e t !2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4 Built-in magnet Without magnet Single acting u i r y o e w i e u !0 Built-in magnet Without magnet Rod end male thread Component Parts Replacement Parts: Seal Kit (For double acting) Note No.

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

Differential pressure indication switch r O-ring Applicable Applicable q O-ring w O-ring e O-ring Port size order no. hydraulic hydraulic order no. order no. order no.

Series 11-MXJ Air Slide Table

R.

180

For details, refer to the IDK series in the Best Pneumatics No.6. 705 MHY2 Series Construction Closed condition 10 16 20, 25 r o !8 e w !7 t !5 r o !8 e !6 w @0 !7 t !5 r o !8 e !6 w @0 !7 t !5 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !3 !2 i q !1 !4 y !9 Open condition Component Parts Note No.

AMPSeries

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

Pneumatics, Inc.

How To Order 25 R 100 Y7BAL MGPM Splash proof 2 color Solid state auto switch Cylinder stroke (mm) Refer to catalog N346 for standard stroke. Bore Size 12 12mm 16 16mm 20 20mm 25 25mm 32 32mm 40 40mm 50 50mm 63 63mm 80 80mm 100 100mm Water resistant R Seals NBR (Nitric Rubber) V Seals FKM (Fluoro Rubber) *This option is available for many other SMC cylinder series.

AMP

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G Features 1 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With

Exhaust Cleaner for Clean Rooms AMP Series

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

Compact End Lock Cylinder Series CBQ2

Note 1) Lock position F9BWV F9BW F7BWV J79W F9BA F7BA H R Rear lock Front lock Bore size (mm) Foot Note 2) Flange Double clevis F7NT F79F 32 40 50 63 CQ-D032 CQ-D040 CQ-D050 CQ-D063 CQ-F032 CQ-F040 CQ-F050 CQ-F063 CQ-L032 CQ-L040 CQ-L050 CQ-L063 Manual release type F7LF Lead wire length symbols 0.5m . Nil (Example) A80C 3m . L (Example) A80CL 5m . Z (Example) A80CZ None .

OMU0023

How to order L E C C G R ii. Dimensions 71 - 8. Reference Information 8.1 LRC Checksum Calculation Procedure (1) How to calculate the LRC checksum The checksum calculation method in Modbus ASCII mode is based on a Longitudinal Redundancy Checking (LRC) method. (i) All data in the transmitted message is added together, excluding the Start Code : and End Code pair CR, LF.

Electric Actuator/Slider Type Motor Parallel Type Series LEFS LEFS16, 25, 32, 40 Step Motor (Servo/24 VDC) Servo Motor (24 VDC) ®

Electric Actuator/Slider Type Motor Parallel Type Series LEFS LEFS16, 25, 32, 40 Step Motor (Servo/24 VDC) Servo Motor (24 VDC) RoHS How to Order LEFS 25 R B 200 S 1 6N 1 Motor mounting position Size Motor type 16 25 32 40 R Right side parallel L Left side parallel Symbol Type Applicable size Compatible controllers/ driver LEFS16 LEFS25 LEFS32 LEFS40 LECP6 LECP1 LECPA Nil Step motor (Servo

ZSM1-115/121

Indicator light Indicator light R 1/8 16-10-2 3 Vacuum Switch Diaphragm Style Series ZSM1 Precautions Be sure to read before handling.

VXP21/22/23

Model/Valve Specifications Av x 10-6m2 Cv converted C [dm 3/(sbar)] b Cv Water, Oil, Steam Air Flow characteristics Maximum operating pressure differential (MPa) Min. operating pressure differential (MPa) 10 10 15 10 15 20 Connection Orifice Max. system pressure (MPa) Weight (g) Model Water AC DC AC DC AC DC AC Air Oil Steam size (mm) Thread VXP2130-02 0.7 0.7 1.0 0.7 1.0 1.0 1 4 740 500

(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type40 g (Including 0.6 m-Long lead wire)Oil-resistant vinyl cabtire code 3 cores, ?