Series VS

BB 96.5 159 182.5 20 20 SIZE 1 1 4 56 71 53 45 110.5 133.5 SIZE 2 SIZE 3 n= NUMBER OF STATIONS (MIN.2,MAX.10) LENGTH FORMULA L1= 43n + 72 L2= 43n + 84 LENGTH FORMULA L1= 71n + 66 L2= 71n + 90 L1= 56n + 90 LENGTH FORMULA L2= 56n + 106 LENGTH DIMENSIONS LENGTH DIMENSIONS LENGTH DIMENSIONS SIZE 3 SIZE 2 SIZE 1 n L n 10 n L 3 2 4 5 6 8 7 9 10 5 6 7 8 9 10 2 3 4 6 5 7 8 9 2 3 4 L 279 421 492 634

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

6 !3 !1 u t q w e y !2 i r !4 !0 MX MTS MY CY !9 !8 !5 !7 MG CX MY1WK with side seal D@5 @0 @3 @4 @2 @1 -X 20Data Component Parts No. q w e r t y u i o !0 !

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

6 !7 !8 !

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

Use the manifold specification sheet to specify. 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6 7 SI unit output no. SI unit output no.

Cylinder with Lock

Refer to page 41 for how to return to the locked state. 10 MWB Series Construction io w er uy q !3 !4 !2 !8!5!6 !0!1 !7 @1@0 @2 @6 @3 @5@8 @4@9 #5 #7 #9 #8#6#4 #0#1 $1 $0 t !9 #3 #2 @7 Component Parts Component Parts No. Description Material Qty.

FQ1

Filtration material: HEPO II (PP) w q e r w q er 0.1 0.1 0.05 0.05 Pressure drop MPa Pressure drop MPa Filtration accuracy (m) 2 4 6 13 Filtration accuracy (m) 0.5 1 5 10 20 50 75 100 No.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

When ordering TUV approved products, add " Q" at the end of the standard part number.

CLQ

5 @1 q @9 @7 @4 e #2 #0 i @2!9wy!6@3 !2!1 u @5r @6 @6 !5 A B CL A CL1 MLGC B Extension locking Without magnet !0o#1 @8 t CNG MNB Section A-A' Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CNA !

15

-X Technical Data 1501 A CY1S Series Construction CY1S/Bilateral piping type For 6 #8 For 6 For 10 23a 29a o !5 !1 @4 !2 !3 @1 !8 !7 !6 $4 !9 @0 @7 @2 #1 r q w e y t i u !5 !1 !4 #2 #0 !

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

6 !5 y e o r q !0 !6 !5 y e o i r !9 r u e y o i q t !2 q !1 @0 !7 t !2 u !1 !7 !0 i !2 !7 !1 !5 !6 !0 t Component Parts Description Note Note Description No. Material Material No. U seal Body A NBR PBT q !2 Elbow body Cassette POM, Stainless steel PBT w !3 Seal Handle NBR PBT e !4 O-ring Body B NBR Stainless steel 303 r !5 O-ring Body B NBR Stainless steel 303 t !

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

7 q w e r t q w e r t o o !0 !0 !1 !1 i i !4 !4 !2 !2 !3 !3 !6 !6 Component Parts Description Material Description Material No.

VXF

Pressure 0.7 MPa PM: Raised up to 0.43 MPa 6 x 6 pcs. 6 x 10 pcs. 6 x 8 pcs. 6 x 10 pcs. 6 x 8 pcs. 6 x 10 pcs. 6 x 10 pcs. Flow rate Q (Nl) Flow rate Q (Nl) Tube 2,000 Tube 2,000 mm 500 mm 6 x 8 pcs. 6 x 8 pcs. 500 mm 500 mm mm 6 x 6 pcs. 6 x 6 pcs. 6 x 6 pcs. 6 x 6 pcs.

V

A P P L I C A B L E T U B E MORE DIMENSIONS S E E N E X T P A G E Applicable Tube OD P Q R S H O W T O O R D E R S E E N E X T P A G E 4 4 20.6 15.6 10.4 6 6 21.6 16.6 12.8 Courtesy of Steven Engineering, Inc. !

ZQ

Please refer to the catalogue to confirm the sizes of the fittings to be used. n: Number of stations (mm) 5 6 1 26 52 2 36 52 3 46 62 4 56 72 5 66 82 6 76 92 7 86 102 8 96 112 n L1 L2 EXH EXH P PE P PE V V V V Circuit ZQ13M-K1-D ZQ13M-K2-DK ZQ13M-J1-F ZQ13M-Q1-FK 13-9-9 10 Series ZQ Manifold Exploded View 6 3 6 4 6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

D-X Technical Data 1211 MY1H Series Construction Standard type @6 e @5 #2 q !1 t @4 #1 #0 !9 i u !8 y r w !2 !4 @7 $3 #8 #9 $0 $2 #7 @8 @9 o !6!0 @1 $1 !7 SMC !5 #6 @3 !

Magnetically Coupled

6 t !0 i q o u y !7 r !9 w !4 NCY3B6 NCY3B10, 15 !4 !8 !7 !6 !5 !0 i o q u y t r !2 w !1 The above drawing is 15. (3 magnets are used in 10.) NCY3B20 to 40 !3 !4 !1 !8 !6 !5 !7 !0 i q o u t y r e w !2 NCY3B50, 63 !4 !8 !6 !5 !0 !7 i o q u y t !3 r !2 w !1 Component Parts No.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Note 3) Weight without sub-plate 1.12-7 VQZ1000/2000/3000 Body Ported Construction: VQZ1000/2000/3000 Metal seal Rubber seal e w q r e w q r 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q e w q 4 r 3 position pressure

Auto Drain Valve Longer life & Higher resistance to foreign matter

0 in place; thus, the inside of the bowl q is shut off from the outside air. Therefore, even if there is an accumulation of condensate in the bowl q, it will not drain out. When pressure inside the bowl is released: When pressure is released from the bowl q, the diaphragm u is lowered by the spring y. The seal at the main valve !

CQM

6 q e r t !5 w !4 CUJ CU CQS CQM CQ2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !0 u y RQ MU 32 to 50 With auto switch (Built-in magnet) !6 q e r t !5 i o !1 !3 !2 !7 w !4 D-X 20Data !0 u y Description No.

XL

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust