7.4

VQ1000-FPG-C4M5-D: 6 sets Double check block 757 S0700 Series Construction Body Ported Construction 2(B) (A)4 S0716 2-Position Single r u e w q 3(R2) (R1)5 1 (P) t y i 2-Position Double S0726 2(B) (A)4 r u e w q 3(R2) (R1)5 1 (P) t y i 3-Position Closed Center S0736 r u e w q 2(B) (A)4 (R1)5 1 (P) 3(R2) t y i 4-Position Dual 3-Port Valve S07A6 r u e w q 2(B) 4(A) 5(R1) 3(R2) 1(P) N.C. + N.C

Non-contact Gripper

9 10 Distance from the workpiece (mm) 0 1 2 3 4 5 6 7 8 9 10 Distance from the workpiece (mm) 0 1 2 3 4 5 6 7 8 9 10 Distance from the workpiece (mm) Size: 80 Size: 100 30 50 0.4 (MPa) 0.4 (MPa) 25 40 0.3 (MPa) 0.3 (MPa) Lifting force (N) Lifting force (N) 20 30 0.2 (MPa) 15 0.2 (MPa) 20 10 0.1 (MPa) 0.1 (MPa) 10 5 0 0 0 1 2 3 4 5 6 7 8 9 10 Distance from the workpiece (mm) 0 1 2 3 4 5 6

XLAQ/XLDQ

(FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 DNil A B C Seal material XSA Symbol Nil N1 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound no. 1349-80 2101-80 1.3 x 10-10 (FKM) XVD Note 1) Values at ambient temperatures, excluding gas permeation.

-fl Seies

: Sta. l) NVFR2l 10-3G Sta. 2-6) NVFR221O-3G NW5FR2-10-06M-027 Mix: sta. 1) 1/4 side sta. 2-6) 1/8 bottom See Note 2) Four Station Manilold Ass'y as follows: sta. 1) NVF?

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

: Sta. l) NVFR2l 10-3G Sta. 2-6) NVFR221O-3G NW5FR2-10-06M-027 Mix: sta. 1) 1/4 side sta. 2-6) 1/8 bottom See Note 2) Four Station Manilold Ass'y as follows: sta. 1) NVF?

KT10

) 2) 1) 14 to 194F (10 to 90C) for Vespel and PEEK seat.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

1 !0 q t r i S u y o !4 !8 !

XL

0.3 1.0 0.3 0.8 0.3 Actuation pressure difference MPaNote 1) 0.5 0.25 0.4 0.2 0.2 0.15 Reverse pressure potential MPa Note 2) 1 x 10 -6 Port A pressure Pa 1.3 x 10 -9 {1 x 10 -8} at ordinary temperatures, excluding gas permeation Internal External 1.3 x 10 -11 {1 x 10 -10} at ordinary temperatures, excluding gas permeation Leakage Pa m 3/s {Torr l/s} VCR 1.3 x 10 -11 {1 x 10 -10} Fitting

Air Slide Table Series MXS

7 q !1 !0 !6 !2 !3 !

High Vacuum Angle Valve, XL Series

0.3 1.0 0.3 0.8 0.3 Actuation pressure difference MPaNote 1) 0.5 0.25 0.4 0.2 0.2 0.15 Reverse pressure potential MPa Note 2) 1 x 10 -6 Port A pressure Pa 1.3 x 10 -9 {1 x 10 -8} at ordinary temperatures, excluding gas permeation Internal External 1.3 x 10 -11 {1 x 10 -10} at ordinary temperatures, excluding gas permeation Leakage Pa m 3/s {Torr l/s} VCR 1.3 x 10 -11 {1 x 10 -10} Fitting

Process Valve

-40A VNA7-50A 1 8 1 4 1 4 1 4 1 105 120 140 77 96 113 53 60 74 26.5 30 37 120.5 137 160 20 24 24 129.5 147 170 170.1 187.6 210.6 211.5 229 252 55 63 74 1 2 1 2 564 A VNA Series Process Valve: 2 Port Valve For Compressed Air and Air-hydro Circuit Control How to Order Pilot Solenoid Valves Valve size 1/2/3/4 Valve size 5/6/7 SF4 5 D 23 Q VO307 5 D 1 Q CE-compliant CE-compliant Coil rated voltage

Diaphragm Style Flow Switch Series IFW5 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Light load Motor load Voltage IFW510 1 to 10 20 1 or less N.C.

Cylinder with Lock

Refer to page 41 for how to return to the locked state. 10 MWB Series Construction io w er uy q !3 !4 !2 !8!5!6 !0!1 !7 @1@0 @2 @6 @3 @5@8 @4@9 #5 #7 #9 #8#6#4 #0#1 $1 $0 t !9 #3 #2 @7 Component Parts Component Parts No. Description Material Qty.

VHK

(mm) 2(A) Port size R(PT) 2(A) Port size R(PT) 1(P) 1(P) 1(P) 4 6 8 10 12 M5 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 4 6 8 10 12 1(P) M5 M5 4 M5 4 Tube O.D. (mm) Tube O.D.

Series IDG

N Model P 255 276 Q 241 262 275 270 80 185 365 288 286 90 188 368 241 262 16 19 129 147 7 9 22 25 95 108 50 55 IDG60V, 60HV IDG75V, 75HV, 100V, 100HV 3/8, 1/2 1/2 31 Membrane Air Dryer Series IDG Dimensions (mm) 1in = 25.4mm IDG60LV, 75LV, 100LV IDG60SV, 75SV, 100SV 91 Port size 3/8, 1/2 334 77 180 50 Purge air for dew point indicator 18 13 22 IN OUT 40 10 165 (B) Drain Drain 9 Purge air

air-filter-e

NBR JIS B 2401.P12 q Seal 10 x t1 Fluororesin NBR Fluororesin Nylon Fluororesin Fluororesin (Antistatic specifications) Nylon Fluororesin Nylon Fluororesin 101 x t2 98 x t5 w Gasket e Seal Note 3) 23 x t1 r Seal 10 x t1 t Seal 20 x t1 Note 1) The quantity used for 1 filter is 1 each for the following seals, gaskets and O-rings.

Air Preparation Equipment

NBR JIS B 2401.P12 q Seal 10 x t1 Fluororesin NBR Fluororesin Nylon Fluororesin Fluororesin (Antistatic specifications) Nylon Fluororesin Nylon Fluororesin 101 x t2 98 x t5 w Gasket e Seal Note 3) 23 x t1 r Seal 10 x t1 t Seal 20 x t1 Note 1) The quantity used for 1 filter is 1 each for the following seals, gaskets and O-rings.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

Metric size Inch size 100 200 205 300 400 M5 standard 3.2 1/8 standard 23 04 06 08 10 12 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 1/4 standard 4 6 8 10 12 3/8 standard 1/2 standard With One-touch fittings Use 1/8" tube.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Metric size Inch size 100 200 205 300 400 M5 standard 3.2 1/8 standard 23 04 06 08 10 12 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 1/4 standard 4 6 8 10 12 3/8 standard 1/2 standard With One-touch fittings Use 1/8" tube.

VCB

TI/ TIL 0.54 4 0.8 13 1/4 (8A) 3/8(10A) 1/2(15A) 1/4 : 0.42 3/8 : 0.40 1/2 : 0.49 VCB3 3 PA 0.80 5 0.5 19 3.0 1.4 7 0.2 33 PAX 2.1 10 0.1 50 0.35 3 3.0 8.4 PB 1/4 (8A) 3/8(10A) 1/2(15A) 3/4(20A) 1/4 : 0.58 3/8 : 0.55 1/2 : 0.62 3/4 : 0.78 0.60 4 1.3 14 0.85 5 0.7 20 VCB4 3.0 4 1.4 7 0.3 33 2.1 10 0.12 50 Note 1) Refer to model selection on page 17-2-24 regarding port size and orifice size