SMC Corporation of America
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LMV10 81023-2A-1 to 4 Note 1) LMV20 Flexible nozzle assembly Copper piping nozzle assembly O-ring 1 1 2 2 81023-31A-1 to 4 Note 1) 123116-2 3 FKM Note 1) Numbers indicate nozzle lengths. 1: 200 mm, 2: 250 mm, 3: 300 mm, 4: 350 mm 1066 LMU100/200 Series Mist Spray Unit Magnet Holder: LMH Series AL800 AL900 How to Order Dimensions ALF ALT LMH 0 1 ALD Magnet holder ALB 2 x M4 x 0.7 Air blow

m 400 1 m 350 Displayed value 300 5 m 250 200 150 100 50 0 0.5 0.4 0.3 0.2 0.1 0 Actual distance [mm] Nozzle Shape Internal Circuit and Wiring Example ISA3-N NPN (1 output) The nozzle shape must be similar to Fig. 1.

800 1250 3100 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 20 25/32 40 50/63 5 Semi-standard/Thread nominal size JC20-8-100 JC25-10-150 JC32-10-100 JC40-12-125 JC40-12-150 JC40-12-175 JC50-16-150 JC63-16-200 0.5 0.5 0.5 0.75 0.75 0.75 1 1 300 800 800 1250 1250 1250 3100 3100 M8 x 1 M10 x 1.5 M10 x 1 M12 x 1.25 M12 x 1.5 M12 x 1.75 M16 x 1.5 M16 x 2 20 25 32 32/40 40 32/40 50 50/63 5 How to

air supply Pressure in the tank New New 20 9.2 4 AV2000-A Current model 30 13.1 7.4 Up to 50% shorter 40 19.2 12.2 50 (Port size 3/4) 34.8 22.6 AV2000-A New New Fill time 50 (Port size 1") 41.3 24.4 Current model For 1(P) R 2(A) Improved adjustability at low speed air supply Needle Valve Flow Rate Characteristics Inlet pressure: 0.5 MPa 400 Air flow rate [L/min (ANR)] 350 Current model 300

400 500 100 200 300 400 500 100 200 300 400 500 Elimination ratio (%) Elimination ratio (%) Elimination ratio (%) 75 70 60 50 40 30 20 10 0 1 5 10 50 30 100 1 5 10 50 100 Flow-back count Flow-back count Flow-back count Explanation of graph Explanation of graph Example: Elimination ratio and concentration after using the FHM-100 for one hour under the following conditions.

Model/Standard Specifications AT Model HAW2 HAW7 HAW22 HAW37 HAW55 HAW75 HAW110 Screw type compressor IDF IDU 110 55 2.2 75 7.5 22 37 Applicable compressor (kW) Reciprocating type compressor Screw type compressor 75 37 2.2 55 7.5 15 22 IDFA 18000 8600 300 12000 1000 3300 5700 (1) Air flow rate l/min (ANR) IDFB Reciprocating type compressor 11000 5600 300 8000 1000 2100 4300 ID Rated performance

Heat exchanger Radiating method W Water-cooled Temperature controller 007 B HED C 2 Cooling capacity Communication 003 005 007 A B RS-485 RS-232C 300 W 500 W 750 W Temperature controller Power supply 2 Single-phase 180 to 242 VAC 50/60 Hz 176 ChemicalThermo-con Series HED Main Specifications (For details, please consult our Product Specifications information.)

Operating time 20 s 30 s HRZ 10 s Voltage HRZD 5 s Min. 2 s HRW 1 s 0.5 s dV dt HECR = Voltage increase ratio 0.2 s 0.1 s dV HEC 0.05 s 0.02 s Time HEB 0.01 s 100 125 200 300 500 400 600 700 1000 2000 3000 4000 1500 dt HED Current (% for chiller main breaker volume) < For option B [With earth leakage breaker]> 3.

Applicable for the hightemperature environments Increased air flow capacity IDFB60 IDFB70 IDFB90 IDFB80 50 10 New Current model IDFB Series 49 IDFB Series 9 48 IDFB75E IDFB55E 47 IDFB22E IDFB37E 8 46 Max. 113F (45C) Max. 104F (40C) Ambient temperature Dew point [C] Dew point [F] 45 7 44 43 6 42 41 5 Max. 149F (65C) Max. 122F (50C) 40 Inlet air temperature 39 4 38 3 37 0 200 100 400 500 300

Series 12-REA Sine rodless cylinder 25, 32, 40, 50, 63 How to Order Clean series 12 Special treatment on sliding part Bore size (mm) 12 REA 25 300 Cylinder stroke (mm) Type Port type Symbol Nil TN TF Rc NPT G Model Bore size (mm) Maximum manufacturable stroke (mm) Model Port size Standard stroke (mm) Lubrication Rc1/8 NPT1/8 G1/8 Rc1/4 NPT1/4 G1/4 12-REA25 12-REA32 25 32 40 200, 250, 300

Sensors (R) (P) 7.4 3 (13) M plug connector (M) L plug connector: 10-VQD1151-L-M5 M plug connector: 10-VQD1151-M-M5 5 5 5.5 2(B) 4(A) Direct manual override Lead wire length 300 mm 27 Indicator light 17.6 11.2 3 3(R) 9 0.3 3.8 10.9 3.5 5.5 9.1 2 x mounting hole 33.5 28.5 37 38 1(P) 1(P) 5.5 12 4-M5 x 0.8 13 L plug connector (L) (P, A, B, R port) 49 50.5 M plug connector (M) 598 4 Port Direct

Bracket model no. 300 1,000 3,000 6,000 10,000 Exhaust of oil mist 3 8 3 4 1 2 1.7 1 2 1 A Drain cock (Standard) 0.2 AMC-EL3 BE30 0.5 AMC-EL5 BE50 0.7 AMC-EL6 BE60 1.2 AMC-EL8 D Drain piping AMC-EL9 Thread type Applicable to drain piping ANR: 20C atmospheric pressure, relative humidity 65% Nil N F Rc NPT G Model/Female Thread Type Model Specifications Effective area (mm2) AMC220 AMC320

400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) ARP Pressure Characteristics (Representative Values) IR-A IR Conditions: Inlet pressure 0.7 MPa Outlet pressure 0.2 MPa Flow rate Q = 20 L/min (ANR) 0.30 IRV Outlet pressure (MPa) 0.25 Set point VEX 0.20 SRH SRP 0.15 SRF 0.10 0.2 0.3 0.4 0.5 0.6 0.7 0.8

20 40 60 80 100 0 50 100 150 Flow rate L/min (ANR) Flow rate L/min (ANR) Condition: Inlet pressure 0.7 MPa ARM11AA1-310-1 (One-touch fittings: IN 8, OUT 6) Condition: Inlet pressure 0.5 MPa ARM11AA1-310 (One-touch fittings: IN 8, OUT 6) 0.35 0.7 0.6 0.30 Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0.00 0 0 50 100 150 200 0 50 100 150 200 250 300

0 0 50 100 200 250 150 300 VBA VBAT Flow rate L/min (ANR) Flow rate L/min (ANR) AP100 Pressure Characteristics (Representative Value) Outlet pressure 0.2 MPa Flow rate 20 L/min (ANR) Condition: Inlet pressure 0.7 MPa Condition: Inlet pressure 0.5 MPa Outlet pressure 0.2 MPa Flow rate 20 L/min (ANR) ARM5BA-306 ARM5BA-306-1 0.30 0.30 Outlet pressure (MPa) Outlet pressure (MPa) 0.25 0.25 0.20

400 500 600 700 800 900 1000 0 0 100 200 300 400 500 600 700 800 900 1000 AU Flow rate (/min (ANR)) Flow rate (/min (ANR)) AF AR ARX21-01 ARX21-02 0.35 0.35 IR 0.30 0.30 Outlet pressure (MPa) Outlet pressure (MPa) VEX 0.25 0.25 0.20 0.20 AMR 0.15 0.15 ITV 0.10 0.10 IC 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 VBA Flow rate (/min (ANR)

Symbol Specifications -X12 Lubricant: Vaseline -X21 Grease-free (Seal: Fluorine-coated) + Restrictor (Without check valve) -X214 Restrictor (Without check valve) 10Clean Series 555 A AS Series Needle Valve/Flow Rate Characteristics AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS2201F-01, AS2211F-01 AS2301F-01, AS2311F-01 AS2201F-02, AS2211F-02 AS2301F-02, AS2311F-02 600 300 Inlet pressure

25, 32, 40, 50, 63 Sine Rodless Cylinder Series 12-REA How to Order Clean series 12 Special treatment on sliding part Bore size (mm) 12 R E A 25 300 Cylinder stroke (mm) Type Port type Symbol Nil TN TF Rc NPT G Model Bore size (mm) Maximum manufacturable stroke (mm) Model Port size Lubrication Standard stroke (mm) 12-REA25 12-REA32 25 32 40 Rc1/8 NPT1/8 G1/8 Rc1/4 NPT1/4 G1/4 200, 250, 300

mm H: Lead wire length 600 mm M: With lead wire (length 300 mm) L: With lead wire (length 300 mm) Note) S type is not available with AC mode, since a rectifier prevents surge voltage generation.

400 Displacement (m) Displacement (m) 250 350 200 300 40 30 20 10 0 30 25 20 15 10 5 0 Load (N) Load (N) MSQXB30A MSQXB50A 350 300 300 250 Displacement (m) Displacement (m) 250 200 200 150 150 100 100 50 40 30 20 10 0 100 80 60 40 20 0 Load (N) Load (N) 336 MSQX Series Low-Speed Rotary Table Rack & Pinion Type Construction CRB2 CRB1 MSU CRJ CRA1 o i @5 @6 t y !