Slider Type/Ball Bushing Bearing

25 1200 10 15 23 78 31 39 54 46 100, 200, 300, 400, 500, 600, 800, 1000 25 2 axis 15 35 52 176 70 88 123 105 1500 32 20 62 94 314 125 157 219 188 Note) Strokes are manufacturable in 1 mm increments up to the maximum strokes.

AME

Inlet pressure (MPa) 14-20-38 3 Super Mist Separator Series AME Construction Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Component Parts Note: Refer to page 14-20-59 for How to Order Bowl Assembly. No.

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Drain cock: Gray One-touch fitting N.C. auto-drain not available for AMG650.

Safety Instructions

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2. Discharge the drainage on a regular basis.

CJ1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Single acting 6-2-4 5, 10, 15, 20 MB MB1 How to Order/Double Acting CA2 CJ1B 4 5 U4 CS1 C76 Applicable tubing Mounting style C85 Tubing material Size O.D. 4 mm 4 mm Basic style B Symbol Bore size 2.5 mm 2.5 mm Polyurethane Soft nylon Bore size 4 C95

The rod type electric actuator LEY series has various body sizes with thrust equivalent to 16, 25, and 32 bore size. Direct or bracket mountings are available in three directions or types. Thrust, speed and positioning * can be managed with the use of an optional controller. Possible applications include transfer, opening and shutting, pressing, pushing, and press-fitting.Enclosure: IP65

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Type: S3 (200W Output, Incremental Encoder), Lead: A (LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 750mm, Motor Option: w/o Lock, Vacuum Port: Left, Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 5 (5m), Driver Type: A2 (LECSA2-S, 200~230V Incremental, Pulse Input), I/O Connector:

Accuracy: Basic Type, Size: 32, Motor Mounting: Top Mounting Position, Motor Type: S3 [AC Servo Motor, (Incremental Encoder), Output 200W], Lead: A [LEY25, 12mm; LEY32, 16(20)mm], Stroke: 150mm, Motor Option: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Cable Type: S (Standard Cable), Cable Length: 5m, Driver: A2 (LECSA2-S, 200~230V Incremental, Pulse

Accuracy: Basic Type, Size: 32, Motor Mounting: Top Mounting Position, Motor Type: S3 [AC Servo Motor, (Incremental Encoder), Output 200W], Lead: C [LEY25, 3mm; LEY32, 4(5)mm], Stroke: 150mm, Motor Option: B (w/Lock), Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: L (Foot), Cable Type: S (Standard Cable), Cable Length: 5m, Driver: A2 (LECSA2-S, 200~230V Incremental

Accuracy: Basic Type, Size: 32, Motor Mounting: D (In-line Type), Motor Type: S3 [AC Servo Motor, (Incremental Encoder), Output 200W], Lead: A [LEY25, 12mm; LEY32, 16(20)mm], Stroke: 200mm, Motor Option: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Cable Type: S (Standard Cable), Cable Length: 5m, Driver: A2 (LECSA2-S, 200~230V Incremental, Pulse Input

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 32, Motor Type: 200W Output, Incremental Encoder, Lead: LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 750mm, Motor Option: w/o Lock, Vacuum Port: Left, Actuator Cable Type: Standard Cable, Actuator Cable Length: 5m, Driver Type: LECSA2-S, 200~230V Incremental, Pulse Input, I/O Connector: w/Connector

Accuracy: Basic Type, Size: 32, Motor Mounting: Top Mounting Position, Motor Type: S3 [AC Servo Motor, (Incremental Encoder), Output 200W], Lead: A [LEY25, 12mm; LEY32, 16(20)mm], Stroke: 150mm, Motor Option: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Cable Type: Standard Cable, Cable Length: 5m, Driver: LECSA2-S, 200~230V Incremental, Pulse Input,

Accuracy: Basic Type, Size: 32, Motor Mounting: Top Mounting Position, Motor Type: S3 [AC Servo Motor, (Incremental Encoder), Output 200W], Lead: C [LEY25, 3mm; LEY32, 4(5)mm], Stroke: 150mm, Motor Option: w/Lock, Rod End Thread: Rod End Male Thread, 1 Rod End Nut Included, Mounting: Foot, Cable Type: Standard Cable, Cable Length: 5m, Driver: LECSA2-S, 200~230V Incremental, Pulse Input, I

Accuracy: Basic Type, Size: 32, Motor Mounting: In-line Type, Motor Type: S3 [AC Servo Motor, (Incremental Encoder), Output 200W], Lead: A [LEY25, 12mm; LEY32, 16(20)mm], Stroke: 200mm, Motor Option: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Cable Type: Standard Cable, Cable Length: 5m, Driver: LECSA2-S, 200~230V Incremental, Pulse Input, I/O Connector

IZx-OMX0087

800 2m/s 2m/s 1000 1000 3) Flow rate : 250L/min 6) Flow rate : 180L/min 75 50 25 0 25 50 75 Installation distance from ionizer to workpiece [mm] 75 50 25 0 25 50 75 -75 -50 -25 0 25 50 75 -75 -50 -25 0 25 50 75 0 0 mm ionizer to workpiece [mm] Installation distance from mm 200 200 20m/s 400 400 2m/s 20m/s 2m/s 600 600 10m/s 800 800 10m/s 5m/s 1000 1000 1200 5m/s 1400 5-4.

High Vacuum L Type Valve

H5 Initial power / Power consumption (W) 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

XL-OMY0001

/40 800/50 XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 1 1 1 H5 AC100V 200/40 400/70 400/80 / AC200V 800/40 1600/80 1600/80 XLA-63-2 XLA-80-2 AC90240V XL1A25-60S-2 XL1A25-60S-3 1 1 H4 AC100V 400/100 600/150 / AC200V 1600/100 2400/150 XL1A25-60S-3 XL1A25-60S-2 1 2 H5 AC100V 600/130 800/180 / AC200V 2400/130 3200/180 1[W] 216 PTC 200V PTC 200 150 100V PTC 0 5 10

High Vacuum L Type Valve

H5 Initial power / 100 VAC 200/40 400/70 400/80 600/130 800/180 Power 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

High Vacuum L Type Valve

H5 Initial power / Power 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

Electric Actuator ／ Slider Type High performance Battery-less absolute encoder

(mm) 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 Weight(kg) 3.15 3.35 3.55 3.75 3.95 4.15 4.35 4.55 4.75 4.95 5.15 5.35 5.55 5.75 5.95 6.15 6.35 6.55 6.75 6.95 0.53 Additional weight for lock(kg) 4 Model LEFS40 Stroke(mm) 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1100 1200 Weight(kg) 5.37 5.65 5.93 6.21 6.49 6.77 7.15 7.33