HRX-OM-M005

3/4 Rc 3/4 Facility water C / MPa 10 to 35 / 0.3 to 0.7 Required flow of facility water*9 L/min 15 (Facility water at 25C) 15 (Facility water at 25C) Facility water port (inlet/outlet) Rc 1/2 (single system for channels 1,2) Power supply 3-phase 50/60Hz AC200/200 to 208V10% Rated flow*10 L/min 20 20 Max. operating current A 52 Main breaker size A 60 Temperature fuse operating temperature

MU

S 55 58 60 74 75 P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 NY 26 28 36 42 46 NX 6 6.5 8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17 depth 10.5 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 NS 43 45 44 54 53 N 14 15.5 16 21.5 21.5 KA 10 12 14 18 18 ND M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 NE 4.3 5.1 6.9 8.7 10.5 ZZ 69 72 75 92 96 Model MUB25 MUB32 MUB40

MK

37 45 5.5 12 16 3 7.5 60 18 6.5 34 4.5 54 14 0.15 20 0.15 7 30 MKB40 65 29.5 35 9 Depth 7 M10 X 1.5 94.5 Rc(PT)1/8 52 5.5 12 16 3 8 69 18 6.5 40 5 61 14 24 7 30 0 0.062 0 0.062 0.15 0.15 MKB50 11 Depth 8 M12 X 1.75 112 76.5 34 10.5 41 Rc(PT)1/4 64 6.6 15 20 3.5 86 22 7.5 50 7 73 0.15 30 0.15 8 37 17 MKB63 80 M12 X 1.75 115 35 10.5 47.5 Rc(PT)1/4 77 9 15 20 3.5 103 22 7.5 60 7 86 35 9 48 17

FQ1

Model symbol (In-line filters) Element size 125mm 65 x 250mm Bore size 04 06 Rc 1/2 Rc 3/4 2.

I

Fitting SUS304 Pressure detection portion Diaphragm: SUS630 Lead Wire Special flexible polyvinyl chloride 6 three-core (red, black, white) 3000m Port Size 1/8 1/4 M5x0.8 M5x0.8 Mass Approx 220g PSE520 P O R T S I Z E 01 Rc(PT) 1/ 8 and M5x0.8 02 Rc(PT) 1/ 4 and M5x0.8 T01 NPTF 1/8 and M5x0.8 T02 NPTF 1/4 and M5x0.8 Based on 250C (80F) T E C H N I C A L SPECIFICATIONS CONNECTION ACCESSORIES

VER2000/4000

AL Dimensions DXT334-X72-04R-04U L side U side D side Exhaust port R side Rc 1/2 supply port (L side) 2-Rc 1/2, Output port 14-9-23

1 Blow Gun Series VMG K
M
H
D
MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T
VMG Pressure loss is less than 1%. (nozz

Piping connection type Connection size Piping connection system Size and part no. 1/4 3/8 KK4P-02MS Nil N F Rc NPT G 02 03 11 Port size Screw-in type Plug part no. Note1) With S coupler plug Note 1) In case of a type with an S coupler plug, specify no symbol (Rc) for the piping connection type. The size is Rc 1/4.

MGP

Connecting threads Rc 1/8 Rc 1/4 Rc 3/8 Proper tightening torque Nm 7 to 9 12 to 14 22 to 24 Caution Caution 1. Do not scratch or gouge the sliding part of the piston rod or guide rod. This will cause air leakage or malfunction due to damage of the seals. 2.

Adsorption Plate

A B ZCUK AMJ Rc 1/8 Rc 1/8 AFJ AMV P1 P1 ZH -X185 P1 P2 P3 Base part no. Adsorption surface size SP1130 SP1230 SP1330 SP1430 SP1530 SP1630 50 x 50 55 40 10 Related Products 100 x 100 95 50 10 P2 P3 P2 P3 150 x 150 120 75 10 200 x 200 145 100 10 Rc 1/8 Rc 1/8 P3 P3 250 x 250 170 125 10 300 x 300 195 150 10 Square Rc 1/8 Rc 1/8 P1 P2 Base part no.

MU

(PT) Rc(PT) Rc(PT) Rc(PT) NY 26 28 36 42 46 MM M6 X 1 Depth 12 NX 6 6.5 8 10 11 H 14 14 15 18 21 ZZ 96 103 115 137 141 The position of the four flats of the piston rod is 3 in relation to the cylinder side surface.

5 Port Air Operated Valve

Thread type (Including pilot port) Body model Nil F N T Rc G NPT NPTF Symbol VFA5000 VFA1000 Note) VFA3000 2 3 Note) Manifold only M5 is available with Nil only.

GA342

Rc 1 1 2, 3 4, 1809

Compact Cylinder: Standard Type Double Acting, Single Rod Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 2

type Piping 6/4 (2) 6/4 8/6 8/6 Built-in One-touch fittings Rod end male thread CUJ With rubber bumper CU With boss in head side Through-hole (Standard) Mounting CQS Both ends tapped style Built-in magnet CQM (1) M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 3/8 Rc 3/8 M5 x 0.8 M5 x 0.8 Piping Screw-in type CQ2 Rod end male thread JIS Symbol Double acting, Single rod JIS Symbol With

VQ7-6

Number of solenoids S D Single Double How to Order Sub-plate VS7 1 A02 Specifications Thread type Port size Side ported RC 1/4 Side ported Rc 3/8 Bottom ported Rc 1/4 Bottom ported Rc 3/8 Rc Nil Porting specifications A02 A03 B02 B03 Model Weight (kg) NPTF T G F Piping location 1(P), 2(B), 4(A) port size 3(R2), 5(R1) port size VS7-1-A02 VS7-1-A03 VS7-1-B02 VS7-1-B03 1/4 3/8 Side 3/8 3/8

10

, One-touch fitting2 Nil A B C D E F G H K L Z Special voltage G NPT Rc, One-touch fitting2 G NPT G NPT Rc, One-touch fitting2 Conduit terminal (With surge voltage suppressor) G NPT Rc, One-touch fitting2 Conduit (With surge voltage suppressor) 1 Applicable to air (VX2 0) and water (VX2 2). 2 When the body is resin, One-touch fittings are equipped.

VDW

VQ Proper tightening torque NNm (kgfNcm) Tightening Torque for Piping LVM Connection threads M5 1.5 to 2 (15 to 20) VCA Rc 1/8 7 to 9 (70 to 90) Rc 1/4 12 to 14 (120 to 140) VCB Rc 3/8 22 to 24 (220 to 240) Reference Tightening of M5 fitting threads After tightening by hand, tighten approximately 1/6 turn further with a tightening tool.

Activated Carbon Filter

Semi-standard symbol: "6C" Port thread Semi-standard symbol: "6" Port thread Part No. type Part No. type Rc C2SK-6C-D G Rc C2SF-6-A-X401 G NPT C2SK-6C(Z)-D NPT C2SF-6(Z)-A-X401 Semi-standard symbol 2 Semi-standard symbol: "2" Port thread type Part No. Rc C2SF-2-A-X401 G Appearance and part No. NPT C2SF-2(Z)-A-X401 Note 1) Part No. includes Bowl seal . Refer to [11.

Filter for Cleaning Solvent Quick Change Filter Series FQ1

Model symbol (In-line filters) Element size 125mm 65 x 250mm Bore size 04 06 Rc 1/2 Rc 3/4 2.

Vacuum Regulator Series IRV

50 2-Rc 1/8 Vacuum gauge port IRV3000 IRV3000 54 70 50 66 SMC P K U C S O H L 10.5 x 8.5 2-Rc 1/8 Vacuum gauge port Approx. 130 G 43 74 SET VAC SET Pad side Vacuum pump side 22 Approx. 68 Rc 1/2 2-Rc 1/4, 3/8, 1/2 Connection port 66 2

FQ1

Model symbol (In-line filters) Element size 125mm 65 x 250mm Bore size 04 06 Rc 1/2 Rc 3/4 2.