AS

Dimensions Meter-out type Meter-in type F E D B A C J G K H L B Model A MIN. MAX. MIN. MAX.

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

2 e !1 No. q w e r t y u i o !0 !1 !2 Material Note Description Body A Handle Body B Needle Needle guide Lock nut Panel nut U seal Spacer Cassette Packing O-ring PBT PBT Brass Brass Brass Brass Brass HNBR PBT POM, Stainless steel NBR NBR Electroless nickel plated Electroless nickel plated Electroless nickel plated Electroless nickel plated Electroless nickel plated Note) !

Series 10-MGF ø40, ø63, ø100 Guide Table

Fittings & Tubing Air Cylinders Rotary Actuators V D C D C E F H A + Stroke B + Stroke GB GA T X PP (Rc, NPT, G): Relief port 2 x P (Rc, NPT, G) Port for extension Port for retraction When the cylinder is extended KA: T-slot for hexagon bolt 4 x M K KB KC 6-K (6 positions) 10 10 M12 x 1.75 M10 x 1.5 M8 x 1.25 M Bore size Standard stroke (mm) GB D A 170 140 10 10 38 38 36.5 E B F KC 11 11

Slit Valve

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Guide Table Series MGF ø40, ø63, ø100 1

4 20Clear anodized Rod cover Magnet Magnetic material Aluminum alloy e !5 Chromated Piston Plug Carbon steel Aluminum alloy r !6 Data Electroless nickel plated Piston rod Element Resin Carbon steel t !7 Anodized Plate Snap ring Spring steel Aluminum alloy y !8 Anodized End plate Rod seal NBR Aluminum alloy u !

Manifold Regulator Modular Type ARM2500/3000 Series

Note Outlet pressure (MPa) 136413 ARM2500 ARM3000 Hexagon socket head cap screw (M5 x 70) 4 With flat washer 136313 IRV Hexagon socket head cap screw (M6 x 85) 4 With flat washer VEX SRH Option/Bracket Assembly SRP Individual IN type can be used as a single unit regulator.

A dedicated exhaust port (M5) is installed to remove air from the nozzle. The IT series comes with monitor signal output and shock/ vibration resistance., Operation Manual, E/P REGULATOR, PRE-SET, INSTRUMENTATION, IT2000/ITV2000 E/P REGULATOR, EB, IT2000 3/8 INCNPT VERSION, .77161 lb, ModelITV101 ITV103 ITV105 ITV201 ITV203 ITV205 ITV201------------

A dedicated exhaust port (M5) is installed to remove air from the nozzle. The IT series comes with monitor signal output and shock/ vibration resistance., Operation Manual, E/P REGULATOR, INSTRUMENTATION, IT4000/ITV3000 E/P REGULATOR, EB, IT4000 3/8 INCNPT VERSION, 1.32277 lb

A dedicated exhaust port (M5) is installed to remove air from the nozzle. The IT series comes with monitor signal output and shock/ vibration resistance., E/P REGULATOR, INSTRUMENTATION, IT2000/ITV2000 E/P REGULATOR, DB, IT2000 1/4 INCNPT VERSION, 1.50489 lb

A dedicated exhaust port (M5) is installed to remove air from the nozzle. The IT series comes with monitor signal output and shock/ vibration resistance., Operation Manual, E/P REGULATOR, PRE-SET, INSTRUMENTATION, IT2000/ITV2000 E/P REGULATOR, EA, IT2000 3/8 INCPT VERSION, 1.94038 lb, ModelITV101 ITV103 ITV105 ITV201 ITV203 ITV205 ITV205------------

A dedicated exhaust port (M5) is installed to remove air from the nozzle. The IT series comes with monitor signal output and shock/ vibration resistance., Operation Manual, E/P REGULATOR, PRE-SET, INSTRUMENTATION, IT2000/ITV2000 E/P REGULATOR, DB, IT2000 1/4 INCNPT VERSION, .77161 lb, ModelITV101 ITV103 ITV105 ITV201 ITV203 ITV205 ITV203------------

A dedicated exhaust port (M5) is installed to remove air from the nozzle. The IT series comes with monitor signal output and shock/ vibration resistance., Operation Manual, E/P REGULATOR, PRE-SET, INSTRUMENTATION, IT2000/ITV2000 E/P REGULATOR, EB, IT2000 3/8 INCNPT VERSION, .77161 lb, ModelITV101 ITV103 ITV105 ITV201 ITV203 ITV205 ITV205------------

A dedicated exhaust port (M5) is installed to remove air from the nozzle. The IT series comes with monitor signal output and shock/ vibration resistance., Operation Manual, E/P REGULATOR, PRE-SET, INSTRUMENTATION, IT2000/ITV2000 E/P REGULATOR, DB, IT2000 1/4 INCNPT VERSION, .77161 lb, ModelITV101 ITV103 ITV105 ITV201 ITV203 ITV205 ITV201------------

A dedicated exhaust port (M5) is installed to remove air from the nozzle. The IT series comes with monitor signal output and shock/ vibration resistance., Operation Manual, E/P REGULATOR, INSTRUMENTATION, IT2000/ITV2000 E/P REGULATOR, EB, IT2000 3/8 INCNPT VERSION, 1.54000 lb, ModelITV101 ITV103 ITV105 ITV201 ITV203 ITV205 ITV205------------

A dedicated exhaust port (M5) is installed to remove air from the nozzle. The IT series comes with monitor signal output and shock/ vibration resistance., Operation Manual, E/P REGULATOR, PRE-SET, INSTRUMENTATION, IT2000/ITV2000 E/P REGULATOR, DB, IT2000 1/4 INCNPT VERSION, .77161 lb, ModelITV101 ITV103 ITV105 ITV201 ITV203 ITV205 ITV205------------

A dedicated exhaust port (M5) is installed to remove air from the nozzle. The IT series comes with monitor signal output and shock/ vibration resistance., Operation Manual, E/P REGULATOR, PRE-SET, INSTRUMENTATION, IT2000/ITV2000 E/P REGULATOR, DB, IT2000 1/4 INCNPT VERSION, .77161 lb, ModelITV101 ITV103 ITV105 ITV201 ITV203 ITV205 ITV205------------

A dedicated exhaust port (M5) is installed to remove air from the nozzle. The IT series comes with monitor signal output and shock/ vibration resistance., Operation Manual, E/P REGULATOR, PRE-SET, INSTRUMENTATION, IT2000/ITV2000 E/P REGULATOR, DA, IT2000 1/4 INCPT VERSION, 1.74674 lb, ModelITV101 ITV103 ITV105 ITV201 ITV203 ITV205 ITV205------------

A dedicated exhaust port (M5) is installed to remove air from the nozzle. The IT series comes with monitor signal output and shock/ vibration resistance., Operation Manual, E/P REGULATOR, PRE-SET, INSTRUMENTATION, IT2000/ITV2000 E/P REGULATOR, EA, IT2000 3/8 INCPT VERSION, 1.91885 lb, ModelITV101 ITV103 ITV105 ITV201 ITV203 ITV205 ITV205------------

A dedicated exhaust port (M5) is installed to remove air from the nozzle. The IT series comes with monitor signal output and shock/ vibration resistance., Operation Manual, E/P REGULATOR, PRE-SET, INSTRUMENTATION, IT2000/ITV2000 E/P REGULATOR, EA, IT2000 3/8 INCPT VERSION, 1.95477 lb, ModelITV101 ITV103 ITV105 ITV201 ITV203 ITV205 ITV205------------

Series 10-MGF Guide table ø40, ø63, ø100

M12 x 1.75 M10 x 1.5 M8 x 1.25 M Bore size Standard stroke (mm) 170 140 10 10 38 38 36.5 E B F KC GB D A 11 11 8.7 120 X T V M6 M6 M5 18.5 KA KB 46 46 38 PP 70 50 M12 x 1.75 M10 x 1.5 M8 x 1.25 N H GA C 1/4 1/4 1/8 40 P 100 63 30, 50,75, 100 40 78 73 58 66.5 61.5 48.5 4 4 3.5 8 100 90 120 160 1/8 1/8 1/8 7.5 200 160 20 20 11.5 11.5 9.5 96 Guide table10-MGF Air cylinder Rotary actuator Air