Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

across flats 12 M5 x 0.8 M8 x 1 5 3 20 D 3 5 Y Width across flats 16 15 D 3 3 F Width across flats 12 Width across flats 12 F Width across flats 10 Width across flats 2 Width across flats 3 3 C C 2 2 A A B B Dimensions A Dimensions A (mm) (mm) B C D F Y B C D F Model Model ZPT10F-B5-A8 ZPT20F-B5-A10 10 12 10 12.5 37.5 20 22 1.5 12.5 15.5 48.5 ZPT13F-B5-A8 ZPT25F-B5-A10 13 15 25 28 10.5 13 38

PSxx-OMR0001CN

No.PS-OMR0001CN-J // ISA3 1 2 7 8 14 15 2 (ISA3) 15 () 16 (2 ) 16 17 20 26 26 29 34 38 3 41 42 44 44 44 45 45 4 46 46 46 () 58 59 60 5 61 62 62 -1No.PS-OMR0001CN-J 1 (ISO/IEC)(JIS) 1) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) One-touch fitting 4 tube 6 tube 8 tubing 34 35 10 to 16 38 39 20 to 32 134 136 40, 50 Weight by Stroke (g) Pad dia.

IIIIIII

(kg) 5.73(2.6) P.T. ln(mm) 0.06 (1.s) O.T. ln(mm) 0.08 (2) T.T.ln(mm) 0.1 38 (3.5) DIUENSIONS A B t c D E F G H J K M N P R 1.38 (35) ).s812.38 '25) 160.s 2.09 t53) 1.42 (36) 0.53 13.5', 0.7',!

Speed Controller with One-touch Fittings

Model Metric size Inch size 4 stations 6 stations 8 stations 10 stations pcs. 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 Length 38 62 72 90 104 114 135 140 78 111 119 147 179 191 236 277 Hexagon nut Flat washer pcs. pcs.

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Material Note 1 2 3 4 5 6 7 8 9 10 PBT Brass Electroless nickel plated Brass Electroless nickel plated Steel wire (1) HNBR NBR NBR Tool steel Note 1) AS1001F type: Stainless steel 589 Series AS1F-D Dimensions L4 D3 Applicable tubing O.D. d L3 D1 L2 M1 M1 L1 D2 Metric Size Inch Size Weight (g) Weight (g) 8 1/8" d 8.4 D1 D2 D3 38 L1 4.5 L2 26 L3 L4 M1 Model Model d 8.4 D1 D2 D3 38 L1 4.5

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

Material Note 1 2 3 4 5 6 7 8 9 10 PBT Brass Electroless nickel plated Brass Electroless nickel plated Steel wire (1) HNBR NBR NBR Tool steel Note 1) AS1001F type: Stainless steel 741 AS1F-D Series Dimensions L4 D3 Applicable tubing O.D. d L3 D1 L2 M1 M1 L1 D2 Metric Size Inch Size Weight (g) Weight (g) 8 1/8" d 8.4 D1 D2 D3 38 L1 4.5 L2 26 L3 L4 M1 Model Model d 8.4 D1 D2 D3 38 L1 4.5

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

) AS33l1FG-03-12(S)A 12 18.5 42.5 28.3 57 17 38 (39) AS43l1FG-04-10(S)A 10 1/2 24 (23.8) 15.9 17.4 18.8 25.6 46.4 (46.3) 26.1 61.2 50.8 49.2 43.7 42.1 15.6 58 (57) AS43l1FG-04-12(S)A 12 18.5 21 26.2 48.3 (48.2) 28.3 63.4 17 62 (61) 11.2 12.9 16.6 20.2 36 21.4 50.1 3/8 19 42.3 40.7 37.1 35.5 ASR ASQ Note 1) Reference dimensions Note 2) Reference dimensions of threads after installation Note

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

(S) 10 15.9 26.9 36.2 (36.3) 15.6 25 (26) AS321FSG-02-06 (S) 6 1/4 17 (17.5) 13 10.4 21.8 32.1 36.4 63.1 61.7 57.9 56.5 13.3 24.5 28.5 9.3 19.2 47 (48) AS321FSG-02-08 (S) 8 13.2 22.7 33 14.2 AS321FSG-02-10 (S) 10 15.9 26.7 37 35.7 15.6 48 (49) AS321FSG-02-12 (S) 12 18.5 29.7 40 34.5 17 50 (51) AS321FSG-03-06 (S) 6 1/4 19 16.6 10.4 21.8 32.1 28.7 55.4 54 50.2 48.8 13.3 24.5 28.5 9.3 19.2 38

CJ2X/CUX/CQSX/CQ2X/CM2X

REC 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8", 5/32" 5/32" 3/16" Inch size 7 12 Air flow (l/min (ANR)) 38 Controlled flow CX 0.1 0.2 Effective area (mm2) 0.6 CY 100 180 230 260 390 460 Flow rate (l/min (ANR)) Free flow 1.5 2.7 3.5 4 6 7 Effective area (mm2) MQQ M Note) Supply pressure: 0.5 MPa, Temperature: 20C In-line Type RHC Air Flow/Effective Area MK(2) AS2001FM

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

effective depth 6 2 x M5 x 0.8 2 x 2 x 6.5 counterbore 5.5 M5 x 0.8 (Piping port) (Relief port) 2 x 2 x M4 x 0.7 effective depth 7 Note 2) 2 x 3.5 through 32 0.5 15.5 25 6 Flat washer 5 10 4 4 3.5 27 + Stroke 15.5 30.5 + Stroke 25 16 17.5 5 5.5 2 x M5 x 0.8 M5 x 0.8 (Relief port) 2 x 2 x 6.5 counterbore M4 x 0.7 effective depth 8 (Piping port) 2 x 2 x M4 x 0.7 effective depth 7 Note 2) 38

Low Profile Guide Type

Technical Data 1555 CY1F Series Auto Switch Mounting Proper Auto Switch Mounting Position (Detection at stroke end) D-A9, D-A9V (mm) Note 2) Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 Operating range 9 B1 B2 B3 (mm) 10 15 25 38 60 18 80 38 80 10 39 66 19 86 39 86 11 44.5 95.5 24.5 115.5 44.5 115.5 D-M9, D-M9V, D-M9W, D-M9WV D-M9A, D-M9AV Mounting pattern q B1

High Vacuum Angle Valve

Heater: Indicator: 5 Aluminum High Vacuum Angle Valve XLA/XLAV Series Dimensions XLA: Air operated (b) E C E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) [mm] Model A B C D E*1 Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95

100

Thread size Recommended tightening torque [Nm] 1/8 3 to 5 1/2 28 to 30 3/4 28 to 30 1 36 to 38 Vacuum port Vacuum pressure detection port Exhaust block surface to be held (Width across flats 40) Body surface to be held (Width across flats 40) Exhaust port Branch Port Warning 1.

Air Cooled Aftercooler Series HAA 1

Model A B C A B C A B C A B C 500 1000 1500 1000 2200 3000 2000 3300 4000 4000 5700 7000 34.5 38 40 33 36.5 38 34 36 37 34 35 36 35 40 44 35.5 40 42 37 40 41.5 38 40 42 35.5 42.5 47.5 36 42.5 44 38.5 42.5 45 39 43 45 HAA7 HAA15 HAA22 Maintenance HAA37 Caution 1. Inspect the cooler at least once a week and clean it to prevent it from becoming obstructed. 2.

Series HAW Water Cooled Aftercooler 1

Cooling water (l/min) 180C Inlet air temperature Correction factor Air flow (l/min (ANR)) Model 50C 70C 100C 41.5 43 45.5 37 43 49.5 37 43 45.5 37 42 43.5 40 44 46 39.5 43 44.5 41 43 45.5 A B C A B C A B C A B C A B C A B C A B C 35.5 36 36.5 33.5 36 38 33.5 36 36.5 33.5 35 36 34.5 36 37 34.5 35.5 36 34.5 35.5 36 38.5 40 42 36 40 45.5 36 40 42.5 36 40 41 38 40 42.5 38

CJ2X/CUX/CQSX/CQ2X/CM2X

REC 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8", 5/32" 5/32" 3/16" Inch size 12 7 Air flow (l/min (ANR)) 38 Controlled flow CX 0.2 0.1 Effective area (mm2) 0.6 CY 100 180 230 260 390 460 Flow rate (l/min (ANR)) Free flow 1.5 2.7 3.5 4 6 7 Effective area (mm2) MQQ M Note) Supply pressure: 0.5 MPa, Temperature: 20C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

Auto Switch Guide

M9BV D-F9G/F9H D-F8N/F8P/F8B D-Y59A/Y59B/Y7P* D-Y69A/Y69B/Y7PV* D-Y7G/Y7H D-M5N/M5P/M5B D-S991/S992/S99V1/S99V2 D-S9P1/S9P2/S9PV1/S9PV2 D-T991/T992/T99V1/T99V2 D-S791/S792 D-T791/T792 D-S7P1/S7P2 D-T791C/T792C 6-16-28 Grommet 6-16-29 Connector 6-16-30 Band 6-16-31 Terminal conduit 6-16-32 6-16-33 Grommet 6-16-34 Rail 6-16-35 Connector 6-16-36 Grommet Tie-rod 6-16-37 Terminal conduit 6-16-38

CQM

10.5 G1/8 Rc1/8 NPT1/8 NPT1/8 75, 100 50 33 5 to 50 46.5 29.5 40 Rc1/8 NPT1/8 NPT1/8 G1/8 8 11 G1/8 Rc1/8 NPT1/8 NPT1/8 56.5 39.5 8 11 52 50 41.4 75, 100 56.5 39.5 10 to 50 50.5 30.5 50 10.5 10.5 G1/4 Rc1/4 NPT1/4 NPT1/4 60.5 40.5 10.5 10.5 64 62 53.4 Rc1/4 NPT1/4 NPT1/4 G1/4 75, 100 60.5 40.5 HA NN NN OA Bore size (mm) 32 40 50 V W HB IA IB J KA KB L M N OB RA RB S U Z , TN, TF , TN, TF 38

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(mm) Stroke range Bore size (mm) I J K M B D C E KA GA GB H 51 57 66 78 92 110 144 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 8 8 10 10 14 14 20 11 12 22 25 25 25 25 25 30 36 45 55 68 87 11 12 16 21 26 32 36 21 24 30 36 46 53 65 16 26 28.5 34.5 40 46.5 54 20 21 35 40 45 50 50 29 33 38 46 55 66 86 39 43 49 59 71 82 106 20 25 32 40 50 63 80 12.5 18 19.5 23.5 28 34.5 36 Up