AS-FG/ASD-FG

Description Material Note Body A Knob Body B Needle Needle guide Lock nut U seal Spacer Cassette Seal O-ring 1 PBT 2 PBT 3 SUS303 4 SUS303 5 SUS303 6 SUS303 7 NBR 8 POM Note 1) 9 POM, Stainless steel 10 NBR 11 NBR Note) 3/16", 3/8" and 1/2" are SUS303. Dimensions Metric size Inch size Model d Weight g D1 D2 L1 L2 L3 Model d Weight g D1 D2 L1 L2 L3 Max. Min. M1 Max. Min.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

u im u im ax M ax M Note) The drawing shows the rotation range of the positioning pin hole.

53

0q r DI filter outlet tube HECR t Tapping screw (4 pcs.) u y Mounting screw (4 pcs.) Circulating fluid outlet To circulating fluid outlet HEC u DI control piping assembly e i DI sensor assembly HEB o Nipple (2 pcs.) o !0 DI filter cartridge (Part no.: HRS-DF001) HED r Particle Filter Set HEA Removes foreign objects in the circulating fluid.

P

(mm) ZX Pad diameter (mm) Lock ring 1 2 10 to 16 20 to 32 02 04 2 4 -X19 With lock ring Without lock ring (10 or larger) ZR 3 40, 50 06 6 08 8 ZM Material 10 10 N S NBR Silicon rubber 13 13 ZH 16 16 U Urethane rubber Pad style 20 20 ZU F Fluorine rubber 25 25 U C Flat Flat with ribs GN Conductive NBR (2 to 16) 32 32 GSConductive silicon rubber (2 to 16) 40 40 D Deep ZL 50 50 B Bellows 20

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

10-/21-AR20-B30-B: Max. 3.5 10-/21-AW40-B: Max. 5 AR50-B/60-B 10212 x P1 (Port size) A BB Pressure gauge (Option) C H K IN OUT B Q AA Applicable tubing 6/4 P2 (Pressure gauge port size) R F J M D J U Bracket (Option) T N S Optional specifications Standard specifications Model Round type pressure gauge Bracket mounting size Panel mount P1 P2 A B Note 1) C D Q R S T U V W Y Z F J K AA BB H

High Pressure Coolant Valve

0 e e u u r i !1 r t !1 !0 Port 1 Port 2 Port 1 Port 2 Valve element A t q q o o w Valve element B y w Port 3 3 Port valve 2 Port valve Working Principle When the pilot operated solenoid valve !2 is not energized, the valve element A t connected to the piston u is closed by the return spring i. Then valve element B y connected to the valve element A t is open.

Size: 4 (40), Body Material: A (Aluminum), Seal Material: N (NBR), Port Size: 404 (Orifice Diameter: ø4mm; Port Size: 1/2), Thread Type: N (NPT), Rated Voltage: 3 [120 (110) VAC], Electrical Entry: DZ (DIN Terminal w/Light, w/Surge Voltage Suppressor)

Size: 4 (40), Body Material: A (Aluminum), Seal Material: N (NBR), Port Size: 403 (Orifice Diameter: ø4mm; Port Size: 3/8), Thread Type: N (NPT), Rated Voltage: 5 (24 VDC), Electrical Entry: WN (M12 Connector/without Connector Cable; with Surge Voltage Suppressor)

Size: 4 (40), Body Material: A (Aluminum), Seal Material: N (NBR), Port Size: 404 (Orifice Diameter: ø4mm; Port Size: 1/2), Thread Type: N (NPT), Rated Voltage: 3 [120 (110) VAC], Electrical Entry: CS (Conduit, w/Surge Voltage Suppressor)

Size: 4 (40), Body Material: A (Aluminum), Seal Material: N (NBR), Port Size: 404 (Orifice Diameter: ø4mm; Port Size: 1/2), Thread Type: N (NPT), Rated Voltage: 5 (24 VDC), Electrical Entry: WN (M12 Connector/without Connector Cable; with Surge Voltage Suppressor)

Size: 4 (40), Body Material: A (Aluminum), Seal Material: F (FKM), Port Size: 402 (Orifice Diameter: ø4mm; Port Size: 1/4), Thread Type: N (NPT), Rated Voltage: B (24 VAC), Electrical Entry: DZ (DIN Terminal w/Light, w/Surge Voltage Suppressor)

Size: 4 (40), Body Material: A (Aluminum), Seal Material: N (NBR), Port Size: 403 (Orifice Diameter: ø4mm; Port Size: 3/8), Thread Type: N (NPT), Rated Voltage: 1 (100 VAC), Electrical Entry: DZ (DIN Terminal w/Light, w/Surge Voltage Suppressor)

Size: 4 (40), Body Material: A (Aluminum), Seal Material: N (NBR), Port Size: 404 (Orifice Diameter: ø4mm; Port Size: 1/2), Thread Type: N (NPT), Rated Voltage: 5 (24 VDC), Electrical Entry: DS (DIN Terminal, w/Surge Voltage Suppressor)

Size: 4 (40), Body Material: A (Aluminum), Seal Material: N (NBR), Port Size: 404 (Orifice Diameter: ø4mm; Port Size: 1/2), Thread Type: R (Rc), Rated Voltage: 5 (24 VDC), Electrical Entry: WN (M12 Connector/without Connector Cable; with Surge Voltage Suppressor)

Size: 4 (40), Body Material: A (Aluminum), Seal Material: N (NBR), Port Size: 402 (Orifice Diameter: ø4mm; Port Size: 1/4), Thread Type: N (NPT), Rated Voltage: 5 (24 VDC), Electrical Entry: G (Grommet)

Size: 4 (40), Body Material: A (Aluminum), Seal Material: F (FKM), Port Size: 404 (Orifice Diameter: ø4mm; Port Size: 1/2), Thread Type: N (NPT), Rated Voltage: 5 (24 VDC), Electrical Entry: WN (M12 Connector/without Connector Cable; with Surge Voltage Suppressor)

Size: 4 (40), Body Material: A (Aluminum), Seal Material: F (FKM), Port Size: 403 (Orifice Diameter: ø4mm; Port Size: 3/8), Thread Type: N (NPT), Rated Voltage: 5 (24 VDC), Electrical Entry: DN (without DIN Connector, w/Surge Voltage Suppressor)

Size: 4 (40), Body Material: A (Aluminum), Seal Material: N (NBR), Port Size: 403 (Orifice Diameter: ø4mm; Port Size: 3/8), Thread Type: N (NPT), Rated Voltage: 5 (24 VDC), Electrical Entry: G (Grommet)

Size: 40, Body Material: Aluminum, Seal Material: NBR, Port Size: Orifice Diameter: ø4mm; Port Size: 1/2, Thread Type: NPT, Rated Voltage: 3 [120 (110) VAC], Electrical Entry: DIN Terminal w/Light, w/Surge Voltage Suppressor, Coil Orientation: -, Blow Port Position: -, Oil-free Option: -

Size: 40, Body Material: Aluminum, Seal Material: NBR, Port Size: Orifice Diameter: ø4mm; Port Size: 3/8, Thread Type: NPT, Rated Voltage: 24 VDC, Electrical Entry: M12 Connector/without Connector Cable; with Surge Voltage Suppressor, Coil Orientation: -, Blow Port Position: -, Oil-free Option: -