Environment

LEY LES Table Displacement (Reference Value) LEPY LEPS 0.08 LER W L LEF32 (L = 30 mm) LEH 0.06 Displacement [mm] LEY -X5 LEF25 (L = 25 mm) 11LEFS 0.04 LEF16 (L = 20 mm) LEF40 (L = 37 mm) 11LEJS 0.02 25ALEC 0 0 100 200 300 400 500 LEC S Load W [N] LEC SS-T Note 1) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table.

Compressed Air Preparation Filter

1500 1000 500 2000 2500 1500 1000 500 3000 3500 Air flow rate [L/min (ANR)] Air flow rate [L/min (ANR)] Specific Product Precautions 20 AMK Series Construction Size 20 to 40 q w OUT IN t Component Parts e No.

%silltr

A S A N E X A M P L E : A C C O R D I N G T O I S O , T H E R E I S N O D I F F E R E N C E I N S Y M B O L B E T W E E N A C O N V E N T I O N A L D O U B L E A C T I N G C Y L I N D E R A N D A T W I N B O D C Y L I N D E R , A L T H O U G H S O M E M A N U F A C T U R E R S H A V E I N T R O D U C E D T H E I R O W N S Y M B O L S F O F C L A R I F I C A T I O N .

SMC Basic Pneumatics

A S A N E X A M P L E : A C C O R D I N G T O I S O , T H E R E I S N O D I F F E R E N C E I N S Y M B O L B E T W E E N A C O N V E N T I O N A L D O U B L E A C T I N G C Y L I N D E R A N D A T W I N B O D C Y L I N D E R , A L T H O U G H S O M E M A N U F A C T U R E R S H A V E I N T R O D U C E D T H E I R O W N S Y M B O L S F O F C L A R I F I C A T I O N .

2 Phase Stepper Motor/Without Motor Brake Series LXS

D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL N.O.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

D-K59W D-G5NTL D-G5BAL D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-H7C D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-C7/C8 D-H7 D-H7W D-H7NF D-H7BAL D-H7 D-H7C D-H7NF D-H7W D-H7BAL D-C7/C8 D-C73C D-C80C D-C73C D-C80C D-B5/B6 D-G59F D-B59W Applicable bore (mm) A Hs Hs Hs Hs A A A A A B B B B B 16 (24) B 21.5 (29.5) 20.5 (28.5) 15.5 (22.5) 17.5 (25.5) 19.5 (27.5) 20 27.5 27.5 27 24.5 29 25.5 27 31 24

CLS

EA E W FA AL C B A K F N N M TT S + Stroke H BY TX TZ ZZ + Stroke BW With rod boot 180, 200, 250 Z1+ l + 1/2 stroke BV BZ BG BE e 4-MA Effective thread depth MB (To attach eyebolt) f l 15 h + l ZZ1 + l + Stroke Bore size (mm) Stroke range (mm) J M AL B C E F FA GA K KA N A BA BB BC BD BG BE BZ BV BW BP D EA GB GC H MM P BY MB MA 125 140 160 180 200 250 14 14 14 17 17 20 15 15 17 20 20 25

Cylinder with Lock

2) (n = 2, 3, 4) 1 10 D-F5 D-J59 D-F5W D-J59W D-F5BA D-F59F 2 (Different surfaces, same surface) 15 25 n (Same surface) 15 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 25 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 1 10 25 2 (Different surfaces, same surface) 1 15 20 D-A5 D-A6 n (Same surface) 15 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 20 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 2 (Different surfaces, same surface) 20 25 n

KJ

Branch Y: KQ2U Model H (Width across flats) D M L A Weight (g) Applicable tubing O.D.

C95

, D-Y59, D-Y7BAL D-Z80, D-Y69 D-Y7P(V), D-Y7W(V) D-F5NTL D-A3, D-G39 D-A44, D-K39 D-A59W D-F5, D-F5W D-J5, D-J59W D-F59F, D-F5BAL D-A5 D-A6 Bore size (mm) CM2 B A B A B A B A B A B A 125 160 200 250 6.5 18.5 17 45.5 19.5 17 10 22 20.5 49 23 20.5 18 30 28.5 41.5 57 31 28.5 31.5 13 25 23.5 36.5 52 26 23.5 26.5 10.5 22.5 21 34 49.5 23.5 21 24 6.5 18.5 17 30 45.5 19.5 17 20 CG1 Courtesy of

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

Table of Contents

Negative common specifications L dimension How to order negative COM manifold 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L dimension L kit: 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. VV5Q13 L 08 N N 1 D L dimension 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

(V), D-A93(V), D-A96(V) Auto Switch Specifications D-A96 D-A90 D-A90V D-A93 D-A93V In-line D-A96V Auto switch part no.

MHF2

Hmm 0.7MPa 0.3MPa 0.3MPa 60 0.7MPa 60 0.4MPa 0.4MPa 40 40 20 20 100 80 60 40 20 0 80 60 40 20 0 100 Gripping point L mm Gripping point L mm 3 Series MHF2 Confirmation of external force on fingers: Series MHF2 Step 3 L L Mr Mp Fv My L L: Distance to the point at which the load is applied (mm) Maximum allowable moment Allowable vertical load Fv (N) Model Pitch moment Mp (Nm) Yaw moment My(

Single Axis Electric Actuator Series LJ1H

Page 319 Features 14 Single Axis Electric Actuator High Rigidity Direct Acting Guide Series LJ1H Series LJ1H Lead screw lead mm Mounting orientation Series Page Model Motor type Guide type Ground ball screw Rolled ball screw Slide screw 12 10 20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12

CJ2X/CUX/CQSX/CQ2X/CM2X

Low Speed Cylinder Double Acting, Single Rod Series CQSX 12, 16, 20, 25 How to Order CQSX D B 20 30 Without auto switch 30 F9BW B 20 CDQSX D With auto switch Number of auto switches Built-in magnet 2 pcs. 1 pc. n pcs.

CJ2X/CUX/CQSX/CQ2X/CM2X

Bore size L F G D Foot style Rod side flange style Head side flange style Double clevis style 12 16 20 25 12 mm 16 mm 20 mm 25 mm Cushion/Rod end thread Nil C M Standard (Rod end female thread) With rubber bumper Rod end male thread Combination above is possible.

LEC-OM02904

H T E ()L d W D T Max.

MRHQ

0 10 20 30 40 50 60 0 10 20 30 40 50 F F Gripping point L mm Gripping point L mm MRHQ16D MRHQ16D Pressure 0.7MPa External gripping 60 50 0.6MPa 50 Pressure 0.7MPa Gripping force N Gripping force N 0.5MPa 40 0.4MPa 0.5MPa 0.6MPa 40 0.4MPa 30 30 0.3MPa 0.3MPa 20 20 0.2MPa 0.2MPa 10 10 L L 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Gripping point L mm Gripping point L mm MRHQ20D MRHQ20D Internal

Rotary Table/

D. (mm) I. D.