V

Pressure 0.003 ~ 1MPa / 0.4 ~ 145PSI Operating Pressure -3 to -100KPa / -0.4 ~ 14.5PSI Pressure Range Vacuum Air Fluid 5 ~ 60C / 40 ~ 40F Temperature Rc(PT) 1/8, 1/4 Port Size 01: 25mm2 02: 27.5mm2 Effective Area Model Port Size NPT A B C NAK2000-N01, 02 18, 14 50 25 22 NAK4000-N02, 03, 04 14, 38, 12 67 36 36 NAK6000-N06, 10 34, 1 95 50 50 H O W T O O R D E R ( N ) A K 2 0 0 0 S E R I E S 000

Vacuum System Peripherals:

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com How to Order IRV 1 000 01 Pressure gauge position Vacuum regulator Nil: Standard Thread type Body size Nil Nu Fu Rc NPT G 1 2 3 IRV1000 IRV2000 IRV3000 VAC (Vacuum pump side) SET (Pad side) SMC P K U C S O H L Option Pressure gauge Combinations R: Rear

W2M/4M

Pressure setting of 7 Ps|{0.51kgflcmr} (lT1 000 only), 50 PSI{3.51 kg7cm,}, '|0O PSI{7.1kg cml are available in addition lo the existing pressure setting ol 15 PSIII.oftgtcmr), 72 PSI{5.1kg't cm'?), and l3O Ps|{9.2kgflqrr}. . The subdivided pressure range rmproves pfessure accuracy. . The change in zero span cor rol range improves the controlling ope.ation.

o

4E)-Ms, B3r Stationsn ) 2 6 a 9 '10 ll 13 14 16 t8 19 20 L-l 1.47 (47.5)2.24 2.70 (58) (68.5)(79) (89.5)3.94 000) 4.35 (n0.5) 4.76 \121) 5.18 03I.5) 5.59 (142) 6.00 (152.5) 6.42 0631 6.A3 (173.5) 7 .24 (184) 7.66 (194.5) 4.07 (205) 4.48 (215.5) 8.90 \2?6) 9.31 (236.s) u 1.56 (39.5)1.97 (50) 2.38 (60.5)2.& (?

o

4E)-Ms, B3r Stationsn ) 2 6 a 9 '10 ll 13 14 16 t8 19 20 L-l 1.47 (47.5)2.24 2.70 (58) (68.5)(79) (89.5)3.94 000) 4.35 (n0.5) 4.76 \121) 5.18 03I.5) 5.59 (142) 6.00 (152.5) 6.42 0631 6.A3 (173.5) 7 .24 (184) 7.66 (194.5) 4.07 (205) 4.48 (215.5) 8.90 \2?6) 9.31 (236.s) u 1.56 (39.5)1.97 (50) 2.38 (60.5)2.& (?

VZ1000

Note Solenoid assembly Epoxy/Stainless steel DXT170-APush rod Body Resin NBR O-ring NBR 13 x 11 x 1 Common with Series VZ 000 3 5 o EXH poppet Back up spring FKM V seal Stainless steel Brass, NBR Retainer assembly Stainless steel Poppet spring 3-3-11 Series VZ1000 2 Position Single Grommet (G), (H) VZ1120-M5 G H VZ1120 (Mounting hole) (Lead wire length) G: 300 mm H: 600 mm Manual override

VZ1000

Note Solenoid assembly Epoxy/Stainless steel DXT170-APush rod Body Resin NBR O-ring NBR 13 x 11 x 1 Common with Series VZ 000 3 5 o EXH poppet Back up spring FKM V seal Stainless steel Brass, NBR Retainer assembly Stainless steel Poppet spring 3-3-11 Series VZ1000 2 Position Single Grommet (G), (H) VZ1120-M5 G H VZ1120 (Mounting hole) (Lead wire length) G: 300 mm H: 600 mm Manual override

Check Valve Series AK

Proof pressure 1.5 MPa ASP Maximum operating pressure 1 MPa Minimum operating pressure 0.02 MPa ASN Ambient and fluid temperature 5 to 60C (No freezing) AQ JIS Symbol Flow Characteristics ASV AK2000-01/-02 AK4000-02 AK How to Order Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) ASS Inlet pressure: 0.1 MPa Inlet pressure: 0.1 MPa Inlet pressure: 0.1 MPa AK 2 000

Speed Controller: Standard Type In-line Type AS Series

M5 AS 1 000 Body size Lock nut option Nil J (3) 1 2 3 4 5 M3, M5 standard Hexagon lock nut Round lock nut 1 8 1 4 , standard standard standard standard 8 3 Note 3) Only for AS1000 2 1 Option H (1) 2 1 High temperature (5 to 80C) Thread type L (2) Low temperature (30 to 60C) Note 1) AS5000 is available as special. AS1000 is not applicable. Note 2) AS1000, AS2000 are not applicable.

P

Point to Group Specialized Product Flow Characteristics AS3000-N03-X800 AS4000-N04-X800 AS2000-N02-X800 300 800 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) 1500 250 600 200 1000 150 400 100 500 200 50 0 0 1 2 3 4 5 6 7 9 8 10 0 0 1 2 3 4 5 6 7 9 8 0 0 1 2 3 4 5 6 7 8 Number of needle rotations Number of needle rotations Number of needle rotations How to Order AS 2 N 000

Slit Valve XGT Series

Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE

Body ported manifolds are available with bar or separate ty, SUBPLATE NVFS6*000 3/4 NPT, VALVE, VFS6000 SOL VALVE 4/5 PORT, 22, VFS6000, 3.7686 lb

Body ported manifolds are available with bar or separate ty, SUBPLATE NVFS6*000 1 NPT, VALVE, VFS6000 SOL VALVE 4/5 PORT, 22, VFS6000, 3.52 lb

IDX-OM-W017

(Ex.) 10-2 1.6MPaADH4 000-04 IDFA4E 15E1-23-L N.O() 1.6MPa 0.051.6MPa (Rc1/2IDFA3E to 11E) 25mm (Rc3/4IDFA15E1) 32mm (R1/2IDFA3E11E) (R3/4 X R1/2IDFA15E1) (R1/2) (L) IDFA Series 10-1 10 1 IDX-OM-W017 10 L 10-3 1. Rc1/2 1) R3/4: 28 30Nm R1/2 ,R3/4 2. 3. (27mm)(22mm) () () () 10-4 1. 2. 3.

DeviceNet-E

S. a EX. ) To set pressure at 0. 3M Pa by I TV2030( f or 0. 5M Pa t ype) Pressure ( 0. 3M Pa/0. 5M Pa) 40952457D EC999( H EX) 0. 3M Pa of pressure i s set by sendi ng i nput dat a of 999 t o t he el ect rom agnet i c regul at or t hrough t he m ast er PLC. 100% 75% 50% 25% 0% 0 1023 2047 3071 4095 ( D EC) 000 3FF 7FF BFF FFF ( H EX) I nput dat a Com m uni cat i on dat a I /O dat a( Pol

Digital Gap Checker ( compatible)

(The default setting is [000].) For instructions on how to enter the security code, refer to "How to input and change the security code" on page 88. If the security code entered is incorrect, [FAL] will be displayed, and the security code must be entered again. If the wrong security code is entered 3 times, [nG] is displayed and the device returns to function selection mode.

EXxx-OMA1018_Eng

HUNGARY (36) 23 513 000 Operator Torbgy u. 15-19, 2045 Trkblint, Hungary Thailand This operation manual is intended for those who have knowledge of machinery using pneumatic equipment, and have sufficient knowledge of assembly, operation and maintenance of such equipment. Only those persons are allowed to perform assembly, operation and maintenance.

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

4E)-Ms, B3r Stationsn ) 2 6 a 9 '10 ll 13 14 16 t8 19 20 L-l 1.47 (47.5)2.24 2.70 (58) (68.5)(79) (89.5)3.94 000) 4.35 (n0.5) 4.76 \121) 5.18 03I.5) 5.59 (142) 6.00 (152.5) 6.42 0631 6.A3 (173.5) 7 .24 (184) 7.66 (194.5) 4.07 (205) 4.48 (215.5) 8.90 \2?6) 9.31 (236.s) u 1.56 (39.5)1.97 (50) 2.38 (60.5)2.& (?

Electro-Pneumatic Regulator IT1000/2000/4000

Pressure setting of 7 Ps|{0.51kgflcmr} (lT1 000 only), 50 PSI{3.51 kg7cm,}, '|0O PSI{7.1kg cml are available in addition lo the existing pressure setting ol 15 PSIII.oftgtcmr), 72 PSI{5.1kg't cm'?), and l3O Ps|{9.2kgflqrr}. . The subdivided pressure range rmproves pfessure accuracy. . The change in zero span cor rol range improves the controlling ope.ation.

Vacuum Regulator Series IRV

series sizes IRV1000: 60l/min (ANR) IRV2000: 100l/min (ANR) IRV3000: 150l/min (ANR) Setting sensitivity: 0.13kPa or less Modular filter can be used on the SET side Application Examples Suction of work pieces Solenoid valve Vacuum pump Tank IRV Filter Suction pad Work piece With single pressure Solenoid valve Vacuum pump IRV Tank How to Order Filter Suction pad With multiple pressures IRV 000