Vacuum Unit

0 20 40 60 80 60 60 Suction flow [L/min (ANR)] 50 50 Suction flow (Silencer exhaust/ Complex exhaust) Suction flow (Silencer exhaust/ Complex exhaust) Flow Rate Characteristics 40 40 100 Air consumption Vacuum pressure [kPa] 30 30 80 60 20 20 40 High-noise reduction silencer exhaust 10 10 20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 20 40 60 80 Supply pressure [MPa] Suction flow [L/min (ANR)] ZK215

C85

42' 0 42' Non-rotating 0/+1.4 0/+1 Stroke tolerance (mm) C85 Maximum ambient temperature of rod boots only.

SI unit for DeviceNet ®

Instance attribute ID Access rule Description Value 1 Get/Set 1 MAC ID 0-63 2 Get/Set 1 Baud Rate 0-2 3 Get/Set BOI 0-1 4 Get/Set Bus-off Counter 0-255 5 Get Allocation Information 6 Get MAC ID Switch Changed 0-1 7 Get Baud Rate Switch Changed 0-1 8 Get MAC ID Switch Value 0-63 9 Get Baud Rate Switch Value 0-2 10 Set Quick Connect 0-1 1: "Set is available in SW mode. 3-4.

0.01

Dimensions: Centralized Wiring Type With bracket L1 60 3 38 L2 38 5 LED level meter Terminal block box EXH port End plate R End plate L 3 0 3 0 3 0 P P P T T T U U U E E E L L L S S S L L L 81 6 9 6 9 6 9 Setting dial 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 Pressure gauge 12 12 21 Bracket 24 5.5 Rc, NPT, G 1/8 SUP port L3 6.5 36 24 OUT 3 36 OUT 2 OUT 4 n Stations

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

0 !1 !2 !3 !4 !5 !6 !7 !8 !

Process Pump

0 5 0 10 15 20 25 10 0 20 30 40 50 Discharge rate (L/min) Discharge rate (L/min) PAF3413 Air Consumption (4 Hz) PAF5413 Air Consumption (3 Hz) 200 Air consumption (L/min [ANR]) Air consumption (L/min [ANR]) SUP = 0.5 MPa 300 SUP = 0.5 MPa 150 SUP = 0.4 MPa SUP = 0.4 MPa 200 SUP = 0.3 MPa SUP = 0.3 MPa 100 SUP = 0.2 MPa SUP = 0.2 MPa 100 50 0 5 0 0 10 0 10 15 20 25 20 30 40 50 Discharge rate

10

145 (1.0) 0.52 1.90 490 0 to 116 (0 to 0.8) 2 VX254 1/4, 3/8 7 1.08 0.44 3.99 490 0 to 22 (0 to 0.15) 5 0.75 0.55 1.96 620 0 to 116 (0 to 0.8) 3 VX264 1/4, 3/8 8 1.58 0.33 5.67 620 0 to 44 (0 to 0.3) Note) Weight of grommet type.

LVQ

0 1 2 N.C.

DOC1020530

Bit 7 Bit 2 Bit 0 Enable Enable Fault Reset Quick Stop Switch On Operation Voltage Shutdown 0 1 1 0 (2)/(6)/(8) Switch On 0 0 1 1 1 (3) Disable Voltage 0 0 (7)/(9)/(10)/(1 2) Quick Stop 0 0 1 (7)/(10)/(11) Disable Operation 0 0 1 1 1 (5) Enable Operation 0 1 1 1 1 (4)/(16) Fault Reset 0 1 (Note) (15) Note.

Possible to transfer a workpiece at low-speed.

0 !3 !3 !0 !4 !7 !1 !9 !2 @1 @3 e u o t @2 !8 @0 @0 @3 !2 !9 e @0 @1 o t u !8 @0 @2 !1 !4 q w r y !5 !6 i w i !

MRHQ

-0.062 37h9 +2.2 0 15.2 opened MHS 0 -0.1 4 31 4-M2.5 x 0.45 (attachment mounting screw ) 0 -0.1 5 0 -0.7 11.2 closed M5 x 0.8 Finger closing port MHC 3 Max. 6.1 MHT 5.7 13.7 12 4-M4 x 0.7 depth 6 MHY (two on the other side) 34 M5 x 0.8 Finger opening port 22.5 2.5 MHW 3-R1.5 4.5 11.5 23 11 2 MRHQ 18 25 15.5 41.5 Misc. 5 Angle adjustment bolt 33 33 63 D3-R1.5 2011 +0.025 0 2-4.5 through 2

180° Angular Style Air Gripper Series MHY2/MHW2

6 w @0 !7 t !5 r o !8 e !6 w @0 !7 t !5 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !3 !2 i q !1 !4 y !9 Open condition Component Parts Note Note No. q Description Material No. Description Material Body Bushing B !0 o Hard anodized Aluminum alloy Sintered alloy steel End plate Stainless steel 10: Stainless steel 16 to 25: Aluminum alloy Piston w 16 to 25: Chromated Bumper !

Series PF2W Digital Flow Switch For Water

to 1 MPa 1.5 MPa Static Electricity Elimination Equipment Reduced-wiring Fieldbus System Operating fluid temperature 0 to 50C 0 to 50C Accuracy Note 1) 5% F.S. 3% F.S. 1% F.S.

MU

+0.058 0 +0.058 0 +0.070 0 +0.070 0 A clevis pin and snap ring are packed with the double clevis style.

CV/MVGQ

(0.5) 0 (0.5) 0 (3) 2.5 (6.5) 4.5 (8) 3.5 (6.5) 3.5 (6.5) 5.5 (9) 8.5 (12.5) 10.5 (14) 0 (2) 0 (2) 1 (4.5) 4 (8) 6 (9.5) 1 (4) 1 (4) 3 (6.5) 6 (10) 8 (11.5) 8.5 (11.5) 8.5 (11.5) 10.5 (14) 13.5 (17.5) 15.5 (19) 0.5 (3.5) 0.5 (3.5) 2.5 (6) 5.5 (9.5) 7.5 (11) 0 (0) 0 (0) 0 (2.5) 2 (6) 4 (7.5) 1.5 (0) 1.5 (0) 6 (2) 9 (4.5) 11 (7) 7.5 (4.5) 7.5 (4.5) 12 (8) 15 (10.5) 17 (13) 3 (0) 3 (0) 7.5 (

OMR0032

Range Resolution LAT3-10 0 to 10 Refer to the 0.03 LAT3-20 0 to 20 Area Range table on the LAT3-30 0 to 30 right. LAT3M-50 0 to 50 LAT3F-10 0 to 10 LAT3F-20 0 to 20 0.005 LAT3F-30 0 to 30 LAT3F-50 0 to 50 This determines the condition for when the INF signal is activated. The INF signal turns ON when the pushing force generated by the Card Motor exceeds the 0.5 to 5.0 set value.

LJ1H

0 o e w t !7!8 !1 !9 !5 !5 i q A A !2 @1 @0 !4 u Section AA Parts list Material Note No. Description No.

CEx-OMG0106

N Terminal No. 6 7 8 9 1 0 0 0 0 2 1 0 0 0 3 0 1 0 0 4 1 1 0 0 5 0 0 1 0 6 1 0 1 0 7 0 1 1 0 8 1 1 1 0 9 0 0 0 1 10 1 0 0 1 11 0 1 0 1 12 1 1 0 1 13 0 0 1 1 14 1 0 1 1 15 0 1 1 1 16 1 1 1 1 0Open between IN6~9 and COM 1Short circuit between IN6~9 and COM Set Home When dip switch is set ON, origins signal is inputted. When dip switch is set OFF, origin input is not required.

Prevents Micro-Bubbles

(C) 0 to 100 Ambient temperature (C) 0 to 60 Stainless steel (SUS) 0.12 0.18 0.44 1.67 1.96 0.86 Weight (kg) PPS 0.05 0.08 0.18 0.73 0.32 PFA 0.09 0.20 0.90 0.78 0.35 Note 1) 0 to 60C when the diaphragm is NBR or EPR.

Title not found

Response time Liie VOZ]000I0 rns -l VOZ2000 l2 ms 1 200 rfillion VoZsooo ls ms -l cYcres DIN rail mounting 3 Port Solenoid Valve Metal Seal/Rubber Seal 5 Port Solenoid Valve Metal Slsal/Rubber Seal Base Mounted Up to 063 0 . 1 7 0 3 3 0.39 0 4 5 o.3l 0 r 0 0 4 5 0.56 N C Vdlve Base Mounted N C .