3 Port Solenoid Valve/

M12 connector pin number Wiring specification w r q e w w q e e r q r VG342(R)-X87 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) w r w r w r q e q e q e 3(R) 3(R) 3(R) w r w r w r q e q e q e 3(R) 3(R) 3(R) 1(P) X X Safety limit switch terminal [N.C.]

3 Port Solenoid Valve/

M12 connector pin number Wiring specication w r q e w w q e e r q r VG342(R)-X87 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) w r w r w r q e q e q e 3(R) 3(R) 3(R) w r w r w r q e q e q e 3(R) 3(R) 3(R) 1(P) X X Safety limit switch terminal [N.C.]

Parallel Style Air Gripper: Wide Type Series MHL2

10, 16, 20, 25: 40 mm, Bore size 32, 40: 80 mm.

High Vacuum L Type Valve

T) Grommet (G) Conduit (C) ( G ) ( C ) ( T ) mm Model A B C D E F G J K L M XLS-16-*G 25.5 104 XLS-16-*C 41 113 38 30 35 17 23 40 XLS-16-*D 60 48 96 XLS-16-*T 129 95 62 XLS-25-*G 128.5 28 XLS-25-*C 121.5 43 138.5 48 40 40 26 25.5 50 XLS-25-*D 120.5 63 51 XLS-25-*T 121.5 154.5 97 66 XLS-16-P*G 40 96 113 38 30 35 17 23 87 66.5 XLS-25-P*G 50 121.5 138.5 48 40 40 26 25.5 89.5 69 9 XL*-OMI0013

Step Motor Controller

motor (S3) 200 W AC servo motor (S2) 200 to 230 VAC 50/60 Hz AC servo motor (S4) 400 W AC servo motor (S3) Power supply voltage AC servo motor (S6) 100 W AC servo motor (S4) 1 2 100 to 120 VAC, 50/60 Hz 200 to 230 VAC, 50/60 Hz Absolute AC servo motor (S7) 200 W AC servo motor (S6) 100 to 120 VAC 50/60 Hz AC servo motor (S8) 400 W AC servo motor (S7) Pulse input type (For absolute encoder

Compact Cylinder with Air Cushion and Lock Series RLQ

K ( across flats) H (With locking) 80 9 6.5 10 18 50 YB-03 32, 40 120 11 6.5 12 22 60 YB-05 50, 63 d2 d1 L UT C UA (mm) UA C d1 d2 H k L UT Weight (g) 25 Part No.

VQC

High pressure type (1.0 MPa) Negative COM External pilot Low wattage type (0.5 W) Nil K N R Y Seal type 3 position closed center Note) For rubber seal type only.

MGF

through K 40 3.5 100 120 114 8.7 6-K (6 places) 57 114 5 Guide Table Series MGF 63 MGF63 Scale: 40% 4-M10 x 1.5 through 140 160 120 11.5 48.5 + Stroke 10 60 + Stroke 20 9 2-Rc 1/4 port for extending cylinder Breathing hole for guide (with element) When the cylinder is extended 46 Port for retracting cylinder 4-M10 x 1.5 through M6: T-slot for hexagon bolt K 50 140 160 4 146 11 6-K (6 places

MGC

x 1.25 depth 14 32 40 75 22 16 18 107 8.6 140 50 34.5 160 14 depth 10 M10 x 1.5 depth 18 37 M8 x 1.25 depth 16 45 110 22 19 23 142 10.5 170 80 37 194 17 depth 12 M12 x 1.75 depth 21 42 M10 x 1.5 depth 20 Bore size (mm) W Z Y X WH W V U T S R Q O N M L K J I P 20 25 32 40 50 30 140 80 30 23 36 40 86 12 26 12 21 M6 x 1 25 38 80 60 44 25 M5 x 0.8 30 153 80 37 25 44 47 98 13 31 12 21 M6 x 1

Compact Cylinder with Solenoid Valve/

Proper Mounting Position (Detection at Stroke End) and Mounting Height 32, 40, 50, 63 D-M9/D-M9W/D-A9 D-M9V/D-M9WV/D-A9V Hs B W A A A B (mm) D-A9V D-A9 D-M9 D-M9W D-M9V D-M9WV A B A B Bore size (mm) W Hs A B W A B Hs 32 40 50 63 12 [17] 9 1 12 [17] 9 29 8 [13] 5 3 (0.5) 8 [13] 5 27 16 11.5 1.5 16 11.5 32.5 12 7.5 5.5 (3) 12 7.5 30.5 14 <19> 14.5 4.5 14 <19> 14.5 42 10 <15> 10.5 8.5 (6)

Power Clamp Cylinder

Power clamp cylinder European type Symbol Bore size D1 6 6 6 6 8 8 8 8 D2 7 9 9 9 10.2 10.2 10.2 10.2 H 16 20 20 25 20 20 20 25 40 50 63 80 40 50 63 80 S Bore size 40 40 50 63 80 50 63 80 B For 40 of A015, S type only Offset Arm position A015 A045 Offset 15 Offset 45 D1 Right D2 H R Center D1 D2 C H Left D1 D2 L H 192 Power Clamp Cylinder Series CKZT Cylinder Specifications 40 50 63 80

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

DC (17 mA), 0.95 W DC (40 mA) Note 3) Power consumption (Current) 12 VDC 0.4 W DC (34 mA), 0.95 W DC (80 mA) Note 3) Note 1) Use dry air to prevent condensation when operating at low temperatures.

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size Rc A B C D E F H K L M N Model Note) U Q V R Q R Q R S Q R S 83 22 23 45 44 43 58 40.5 46.5 99 43 66 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 1/8 VCL21 86 22 23 46 44 44 58 41.5 46.5 99 44 66 18 36 67 31 8.5 12.5 28 18 12.8 M4 6 1/4 99 24 25 56.5 46

Rotary Actuator CRA1 Series Rack & Pinion Type/Size: 30, 50, 63, 80, 100

Additionally, do not mount the foot bracket with the pressure applied to the port. y 0 A port B port a 1 w y y a e k w of y e e k g n of ra n e io at g ot R n R +4 0 ra ot n io 0 at at ot 8 R io 1 R +4 0 n y ot ra a w n y 0 g at e e k of 9 io 1 n ay ra w n g ey e of k 189

Compact and Lightweight

40 40 40 80 80 Suction flow rate ZB Suction flow rate 20 20 20 20 40 40 ZA 0 0 0 0 0 0 10 20 30 40 50 60 Supply pressure [MPa] 0 0 20 40 60 80 Supply pressure [MPa] 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 ZX Suction flow rate [L/min (ANR)] Suction flow rate [L/min (ANR)] ZH18SA ZH18LA ZM Exhaust Characteristics Flow Rate Characteristics Exhaust Characteristics Flow Rate

Process Valve

(without light), 2 W (with light) 4 W (without light), 4.2 W (with light) DC 12 (P1) 10 (P2) 12 (P1) Allowable voltage fluctuation SGC 50C or less (When rated voltage is applied.)

With Factory Installed

S. l AR2001 2501 3001 : Max.3.5t :-t-tt ., AR4001 : Max.5.0t ~ I II; a -tp ort cenler (fJ ~ ~c=Pr r-IN j~ OUT f= 0 .bj=J ~ A * N P Q Bracket mounting dimensions Model Port size A B C 0 E F G H J K L M AR2001 1/8 1/4 40 95 17 40 35 30 34 44 5.4 15.4 55 2.3 33.5 25 8 33 AR2501 1/4 3/8 53 102.5 25 48 32 30 34 44 5.4 15.4 55 2.3 33.5 25 843 42.5 32.5

CYV

Note 3) This data is considered typical but not guaranteed. 10Leakage test result 100 5 10 Time [min] e e a a l l k k w w 2 a a 1 O-ring seals separate vacuum and atmosphere. Employs a magnetically coupled rodless cylinder with no air leakage from moving parts. o o g g L L e e Static O-ring seals are used for all the seals between vacuum and atmosphere.

LG1H

Controller type Motor type Power supply voltage S1 S3 S5 S7 LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 AC servo motor (S2) 100 W 200 W 100 W 200 W AC servo motor (S2) 100 to 120 VAC Pulse input type Incremental B Pulse input type 50/60 Hz AC servo motor (S3) AC servo motor (S3) (For absolute encoder) (For incremental AC servo motor (S6) AC servo motor

Speed Controller: Standard Type Series AS In-line Type

32, 40, 50, 63 124 AS3000-03 3/8 810 12.3 810 12.3 221 AS4000-02 1/4 1,670 25.5 1,670 25.5 40, 50, 63 80, 100 214 AS4000-03 3/8 1,670 25.5 1,670 25.5 205 AS4000-04 1/2 1,670 25.5 1,670 25.5 242 AS5000-02 1/4 2,840 44 2,840 44 40, 50, 63 80, 100 233 AS5000-03 3/8 4,270 66 4,270 66 224 AS5000-04 1/2 4,270 66 4,270 66 AS4000 Note) Flow rate values are measured at 0.5 Mpa and 20C.