Body Size: 40, Back Flow: K (w/Backflow), Thread: N (NPT), Port Size: 04 (1/2), Mounting Option: Without Mounting, Float Type Auto Drain Option: Without Auto Drain, Pressure Gauge/Switch Option: Without Pressure Gauge, Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: 8 (Metal Bowl w/Level Gauge), Bowl Guard: None, Drain Port: J (Body Size 20: 1/8; Body Size 30 & 40: 1/4), Exhaust Mechanism:

3 Port Air Operated Valve Series SYJA300 1

Change of fluid passage Flow Characteristics Flow characteristics 1 2 (P A) C [dm 3/(sbar)] 27 38 Port size 2 3 (A R) C [dm 3/(sbar)] 27 40 2 1 (A P) C [dm 3/(sbar)] 25 40 3 2 (R A) C [dm 3/(sbar)] 26 38 b 0.38 0.30 b 0.37 0.32 b 0.36 0.22 b 0.37 0.20 Cv 7.0 9.8 Cv 7.4 9.8 Cv 7.3 9.8 Cv 6.8 9.6 1/2 3/4 N.C. N.O.

VXA21/22

Temperature conditions Water (Standard) Air (Standard) Oil (Standard) Vacuum (3) (V, M) Maximum Minimum 40 1 60 5(1) 40 5 40 40 5 5(2) Pilot port Note 1) Dew point: 5C or less Note 2) 500 cSt or less Note 3) V, M in parentheses are option symbols.

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

Precision Clean Regulator

0 q 9 Valve seat PTFE IRV 10 O-ring Fluororubber u w 11 Diaphragm Fluororubber VEX 12 Gasket Fluororubber SRH 13 Pressure regulator spring Steel wire Pressure regulator screw assembly 14 SRP SRP SRF ITV Dimensions IC ITVH 30.5 Bracket ITVX PVQ 40 A B SMC P K U C S O H L 36 VY1 51 31 30 Panel mounting hole VBA VBAT 40 AP100 8.5 28 20 72.5 (when set = 75.5) Bleed exhaust hole 6.5 28 1.6 Port

Fluoropolymer Piping Equipment

Body Needle V seal Lock nut Adjustment handle Insert bushing Nut Collar A 1 2 3 4 5 6 7 8 PFA PCTFE PTFE PVDF PVDF PFA PFA PFA Body class 2 y u y u B Dimensions A (B) (max.S) D H Port A 2 x G SMC (J) SMC C E F K Port B E A B C D E F G H J K S Model 48 60 72 LVN20 LVN30 LVN40 24 30 36 12 18 22 88 110 124 34.5 43 52 6 9 11 4 5 6 14 25 25 20 26 33 18 24 30 2.4 7.5 8.0 940 LQ1/LQ3/LVN/LQHB Series

Refrigerated Air Dryer For Use in North, Central and South America

Series CAT.ES30-21A B Refrigerated Air Dryer IDFB Series Applicable for the hightemperature environments Increased air flow capacity IDFB60 IDFB70 IDFB90 IDFB80 50 10 New Current model IDFB Series 49 IDFB Series 9 48 IDFB75E IDFB55E 47 IDFB22E IDFB37E 8 46 Max. 113F (45C) Max. 104F (40C) Ambient temperature Dew point [C] Dew point [F] 45 7 44 43 6 42 41 5 Max. 149F (65C) Max. 122F (50C) 40

Air Cooled Aftercooler Series HAA 1

Model A B C A B C A B C A B C 500 1000 1500 1000 2200 3000 2000 3300 4000 4000 5700 7000 34.5 38 40 33 36.5 38 34 36 37 34 35 36 35 40 44 35.5 40 42 37 40 41.5 38 40 42 35.5 42.5 47.5 36 42.5 44 38.5 42.5 45 39 43 45 HAA7 HAA15 HAA22 Maintenance HAA37 Caution 1. Inspect the cooler at least once a week and clean it to prevent it from becoming obstructed. 2.

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Body Size: 40, Motor Type: F (High Performance, Step Motor 24 VDC), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 200mm, Motor Option: w/o Option, Auto Switch Mounting Bracket: C (with Includes 1 Mounting Bracket), Grease Application: N (w/o, Roller Specification), Positioning Pin Hole: K (Body Bottom 2 Locations

Series: LEFS (Ball Screw Drive), Accuracy: Basic, Body Size: 40, Motor Mounting Position: L (Left Side Parallel), Motor Type: G (High Performance, Battery-less Absolute), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 1200mm, Motor Option: B (w/Lock), Auto Switch Mounting Bracket: None, Grease Application: N (w/o, Roller Specification), Positioning Pin Hole:

Series: LEFS, Accuracy: Basic Type, Size: 40, Motor Mounting Position: R (Right Side Parallel), Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 1200mm, Motor Option: w/o Option, Auto Switch Compatibility: None, Grease Application: N (w/o, Roller Specification), Positioning Pin Hole: K (Body Bottom 2 Locations

Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 04 (1/2), Output Specification: K (OUT 1: Analog 4 to 20mA; OUT 2: Analog 4 to 20mA), Temperature Sensor: T (Temperature Sensor), Lead Wire: N (w/o Lead Wire w/M8 Connector), Unit Specification: F (Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °F), Bracket: R (Bracket)

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 300mm, Motor Option: B (w/Lock), Auto Switch Mounting Bracket: C (w/1 pc, Included), Grease Application: with, Positioning Pin Hole: K (Body Bottom, 2 Locations), Actuator Cable

Series: LEFS (Ball Screw Drive), Accuracy: H (High Precision Type), Size: 40, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 300mm, Motor Option: B (w/Lock), Auto Switch Mounting Bracket: C (w/1 pc, Included), Grease Application: with, Positioning Pin Hole: K (Body Bottom, 2 Locations)

Series: LEFS (Ball Screw Drive), Accuracy: H (High Precision Type), Size: 40, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 300mm, Motor Option: B (w/Lock), Auto Switch Mounting Bracket: C (w/1 pc, Included), Grease Application: with, Positioning Pin Hole: K (Body Bottom, 2 Locations), Actuator

Series: LEFS (Ball Screw Drive), Accuracy: H (High Precision Type), Size: 40, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 300mm, Motor Option: B (w/Lock), Auto Switch Mounting Bracket: C (w/1 pc, Included), Grease Application: with, Positioning Pin Hole: K (Body Bottom, 2 Locations), Actuator

Series: LEFS (Ball Screw Drive), Accuracy: H (High Precision Type), Size: 40, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 300mm, Motor Option: B (w/Lock), Auto Switch Mounting Bracket: C (w/1 pc, Included), Grease Application: with, Positioning Pin Hole: K (Body Bottom, 2 Locations), Actuator

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Mounting Position: R (Right Side Parallel), Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 800mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: C (w/1 pc, Included), Grease Application: with, Positioning Pin Hole: K (Body Bottom, 2 Locations),

Series: LEFS (Ball Screw Drive), Accuracy: H (High Precision Type), Size: 40, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: H (Size 25: 20mm, Size 32: 24mm, Size 40: 30mm), Stroke: 1200mm, Motor Option: B (w/Lock), Auto Switch Mounting Bracket: C (w/1 pc, Included), Grease Application: with, Positioning Pin Hole: K (Body Bottom, 2 Locations), Actuator Cable

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 500mm, Motor Option: B (w/Lock), Auto Switch Mounting Bracket: None, Grease Application: N (w/o, Roller Specification), Positioning Pin Hole: K (Body Bottom, 2 Locations), Actuator