Aluminum High Vacuum Angle Valve

10-8 Nil A B C None w, e, r, t w, r, t e 1.3 x 10-11 (FKM) 1.3 x 10-9 DSeal material 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 XSA 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

Compact

LEY -X5 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 11LEFS 1000 1000 1000 1000 800 800 800 800 m 11LEJS L3 [mm] L3 [mm] L3 [mm] L3 [mm] 600 600 600 600 L3 Z 25A400 400 400 400 200 200 200 200 LEC 0 0 2 4 6 8 10 0 0 5 10 15 20 0 0 0 5 10 15 20 0 2 4 6 8 10 LEC S Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 500 1000 1000 LEC SS-T 800 400 800 800 L4 LEC Y

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(Including r, t and y) No. Part no. Description Material Qty VVQ4000 1 VFS r VVQ4000-80A-1 Gasket HNBR 10 Type Port thread type t VVQ4000-80A-2 Gasket HNBR 10 VFR Nil Rc N NPT T NPTF F G y VVQ4000-80A-4 Clip Stainless steel 10 A For 1 station C For 2 stations Note 3) Note) Spare parts consist of sets containing 10 pcs. each.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

End plate t t Series Part no. SX3000-77-1A SX5000-77-1A 10-SY3000 10-SY5000 Series Part no. SX3000-77-1A SX5000-77-1A 10-SY3000 10-SY5000 SUP port EXH port Label for block disk The labels shown below are used on manifold stations containing SUP/EXH block disk(s) to show their location. (3 pcs. each) VZ3000-123-1A t t Series Assembly part no. Port size Series Assembly part no.

Vacuum Pad

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

Thermo-chiller/Rack Mount Type

Applicable model HRR012/018--10-T/MT*1 HRR012/018/024/030--20-T HRR012/018/024/030--20-MT1 Pump Rated flow (50/60 Hz)2, 3 L/min 7 (0.36 MPa)/10 (0.42 MPa) 10 (0.42 MPa)/14 (0.40 MPa) 10 (0.32 MPa)/14 (0.32 MPa) Maximum pump head (50/60 Hz) m 50 50 50 Output W 350 550 Circuit protector A 15 15 (10 A for standard) Recommended earth leakage breaker capacity A 15 Cooling capacity4 W The cooling

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

) Symbol Description Applicable size 10 15 20 30 40 Description Shaft type Applicable size 10 15 20 30 40 Shaft type Symbol XA39 Shaft through-hole Shaft through-hole Shaft through-hole S, Y K, T J S, Y K, T J Y K J J XA31 XA33 XA37 XA45 XA47 XA48 XA51 S, Y J, K, T J, K, T J, K, T J, K, T S, Y J, K, T Shaft-end female thread Shaft-end female thread Stepped round shaft Middle-cut chamfer

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

detail (Switch groove) 11.5 40 (T-slot pitch) 36 45 9.4 3-5H10 depth 5 4.5 10 18 Stroke + 145 80 40 30 T-slot dimensions The body mounting reference plane and work piece mounting reference plane should be used as standards when mounting onto equipment.

Modular F.R.L. Unit

Description Model AC10B AC20B AC25B AC30B AC40B AC40B-06 AC50B AC55B AC60B Round G27-10-R1 G36-10-01 G36-10-01 G36-10-01 G46-10-02 G46-10-02 G46-10-02 G46-10-02 G46-10-02 Pressure gauge Note 1) Square Note 2) embedded type 1.0MPa GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS Attachments Accessories G27-10-R1 Note 3) G36-2-01 G36-2-01 G36-2-01 G46-2-02 G46-2-02 G46

Table of Contents

, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 For nozzle size 18, 20 e r t For nozzle size 10, 13, 15 [For ZSE4 spec.]

MGP

slot 4-YY depth YL 6H7 depth 10 b a 6H7 c d X0.02 X 7 e 6H7 5 10 XX details e 22.5 30 Bore (mm) 80 100 a 13.3 15.3 b 20.3 23.3 c 12 13.5 d 8 10 WB XX section Z WA HA: T slot hexagon socket head cap screw 2-Cushion valve Through 4-OA 4-OB counter bore depth 8 4-MM depth ML Through 4-NN XX section L Z WA XX section X0.02 X0.02 R DA DB T U VB VA X H PW 2-Rc3/8 GB GC GA 6H7 depth 10 6H7 depth

MGP

dimensions 6H7 depth 10 b a X 0.02 c d X 6H7 e 7 (mm) e 22.5 30 Bore size (mm) 80 100 d 8 10 c 12 13.5 b 20.3 23.3 a 13.3 15.3 6H7 5 10 Section XX Section XX detail WB WA Z Section XX 4-MM depth ML Bottom view HA: T-slot for hexagon bolt 4-OA through L Z WA 4-NN through 4-OB depth of counter bore 8 Section XX X 0.02 X 0.02 DA VB VA R H U T X PW DB 6H7 depth 10 GC 6H7 depth 10 2-Rc 3/8 PB

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HED Polypropylene skid HEA Model Weight [kg] Dimensions [mm] HRSE012-A-10 35 Height 745 x Width 465 x Depth 575 HRSE018-A-10 HRSE012-A-10-T 42 Height 745 x Width 465 x Depth 620 HRSE018-A-10-T HRSE012-A-20 38 Height 745 x Width 465 x Depth 575 HRSE018-A-20 HRSE024-A-20 HRSE012-A-20-T 45 Height 745 x Width 465 x Depth 620 HRSE018-A-20-T HRSE024-A-20-T HRSE012-A-23 41 Height 790 x Width 470

Series VQ Base Mounted Metal Seal/Rubber Seal

AXT661-14AN-10 3 pcs.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Axial Piping Type Single Acting, Single Rod, Spring Return/Extend Series CQP2 12, 16, 20, 25, 32, 40, 50 How to Order Without auto switch 50 10 T CQP2 B J79W S 50 10 T CDQP2 B With auto switch Number of auto switches Built-in magnet Auto switch 2 pcs. 1 pc. n pcs.

Title not found

Beler 10 tab e ar bn br derais. a5-jcylinder stroke (mm) Refer to Stroke Va alionslabe ,i6)air cusnion ffi Wilh ancushion applcab e ior N4&Ltypeonly 300 400 t t t t t l l l r t t t t t t l t t t l l l l l @Loct< position 350 Rear lock iiManual release type Hffi gAuto switch type + Beler to cataoq and Besr Pneumalcs iordelails. @Number of auto switches 2 pcs.

Smooth Cylinder/Low Speed Cylinder

A D L MM N R W CJ-T010B 10 +0.048 0 4.5 3.3 29 18 3.1 2 9 40 22 32 12 8 CJ-CR010 CJ-CF010 8 10 13 M4 x 0.7 6 10 8 10 CJ-T016B 16 +0.048 0 2.3 5.5 5 35 20 6.4 14 48 28 38 16 10 CJ-CR016 CJ-CF016 10 12 15 M5 x 0.8 7 12 10 16 T-bracket includes a T-bracket base, single knuckle joint, hexagon socket head cap screw and spring washer. 1250 Series CJ2X Auto Switch Mounting 1 Auto Switch Proper

Speed Controller with Indicator

-M5E-03 5/32 8.2 AS131FS1-U10/32-03 AS131FS1-M5E-07 1/4 11.2 18.6 20.9 20.4 36.6 8 AS131FS1-U10/32-07 M5 x 0.8 10/32UNF 8 10 Series AS-FS Dimensions: Elbow Type Seal method: Sealant For R, NPT thread Indicator window direction: 0 Indicator window direction: 180 D3 W1 W2 X Y Applicable tubing O.D. d A L4 D1 L3 M L2 L1 T H (Width across flats) Metric Size [mm] Model d T (R, NPT) H D1 D3 L1

LEC-OM02704CN

) S O H S T X E T X ( ) * S T X E T X ( ) 6 =A =A (2) 10 S O H S T X E T X ( ) S T X E T X ( ) * 6 ( ) (3) EOT neutral EOT () E O T () (4) o r o r 1 2 or 16 4 8 14 5 14 14.3.2 (1) 16 (ASCII) () SOH STX ETX EOT 01H 02H 03H 04H start of head() start of text() end of text() end of transmission() ctrlA ctrlB ctrlC ctrlD (2) ASCII b8 0 0 0 0 0 0 0 0 b7 0 0 0

Tamper Proof and Flat Head Screw

SMC Pneumatics, Inc. 10 Series ASIII1F-T How to Order ASD 3 3 0 F 01 06 S T Tamper proof type Body size Note) A special tool necessary for flow rate adjustment should be ordered separately. (Part no.: AS-T-1) 2 3 4 5 6 M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard With sealant Note) Sealant is not provided for ports with M5 and 10-32UNF threads.