Fieldbus system EtherNet/IP compatible SI Unit

lower limit 0: disable, 1: enable 7 (ch3) Monitor lower limit 0: disable, 1: enable 5..6 0..7 (ch0) Upper limit value 0x0..0xF 7..8 0..7 (ch0) Lower limit value 0x0..0xF 9..10 0..7 (ch0) Cut-off value 0x0..0xF 11..12 0..7 (ch1) Upper limit value 0x0..0xF 13..14 0..7 (ch1) Lower limit value 0x0..0xF 15..16 0..7 (ch1) Cut-off value 0x0..0xF 17..18 0..7 (ch2) Upper limit value 0x0..0xF 19..20

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

) 192 to 255: 132.8 ms 9 0..7 PortCycleTime 10 0..7 VendorID[0] (MSB) Vendor ID for validation comparison 11 0..7 VendorID[1] (LSB) 12 0..7 Reserved 0 13 0..7 DeviceID[0] (MSB) Device ID for validation comparison 14 0..7 DeviceID[1] 15 0..7 DeviceID[2] (LSB) PortConfig Por t 2 16..25 0..7 See above See above PortConfig Por t 3 26..35 0..7 See above See above PortConfig Por t 4 36..45 0

PSxx-OMH0002CN

"-"()7 D Digit () 1 digit=0.01 MPa 0.01 MPa 0.01,0.02,,0.99,1.00 F 01[MPa] F.S.=1-0=1[MPa] (1F.S.=10.01=0.01[MPa]) F.S.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Refer to "How to Order" on page 7 for auto switch model numbers.

IR1000/2000/3000

Description IR1000 IR1020 IR2000 IR2010 IR2020/2120 IR3000 IR3010 IR3020/3120 IR1010 P362030-201 Bracket P36202028 P36201023 Pressure gauge234 G33-10-01 G43-2-01 G43-10-01 G43-2-01 G43-4-01 G43-10-01 G33-2-01 G43-4-01 G33-4-01 1 A bracket and two mounting screws (M5 x 35) To mount the bracket, remove two body screws (M5 x 30) on the name plate on the opposite side and replace the attached

Swivels

A B Hex 1 Hex 2 Port 1 Port 2 A D Swivels PS410303-4-4 3.11 2.08 .75 1.19 7/16-20 7/16-20 78.9 mm 53.0 mm 19.0 mm 30.2 mm UNF-2A UNF-2A B Hex 2 Hex 1 PS610303-6-6 3.23 2.18 .88 1.31 9/16-18 9/16-18 82.0 mm 55.2 mm 22.2 mm 33.3 mm UNF-2A UNF-2A Port 2 Port 1 PS810303-8-8 3.56 2.38 1.12 1.50 3/4-16 3/4-16 90.3 mm 60.3 mm 28.6 mm 36.5 mm UNF-2A UNF-2A PS810303-10-10 3.76 2.48 1.12 1.50 7/8-

A-HEC-OM-J004

Appendix . 7-1 7.1 Outline Dimensions . 7-1 7.1.1 Liquid Tank .7-1 7.1.2 Controller.7-1 TOC-2 A_HEC-OM-J004-4 Table of Contents 7.2 Specifications . 7-2 7.3 Specifications of Connectors . 7-5 7.3.1 Connection of Liquid Tank and Controller . 7-5 7.3.2 Connection of Power Supply Cable . 7-6 7.3.3 Connector for External Equipment. 7-7 7.4 Communication . 7-8 7.4.1 Specifications . 7-8 7.4.2

HRX-OM-X010

System Maintenance . 7-1 7.1 Water Quality Management . 7-1 7.2 Inspection and Cleaning . 7-2 7.2.1 Daily inspection . 7-2 7.2.2 Quarterly inspection . 7-3 7.3 Storage . 7-3 7.3.1 Draining of circulating fluid out of tank . 7-4 HRZ Series TOC-3 HRX-OM-X010 Table of Contents 7.3.2 Draining of facility water. 7-5 7.4 Periodic Replacement Parts . 7-6 Chapter 8 Appendix . 8-1 8.1 Specification

HRX-OM-I051

from DIO REMOTE to LOCAL. . 5-13 5.4.3 Example 3: Alarm signal of contact signal is changed from N/A to ALARM1. . 5-14 Chapter 6 Error Message and Troubleshooting . 6-1 6.1 Error Message . 6-1 6.2 Troubleshooting . 6-2 Chapter 7 System Maintenance . 7-1 7.1 Water Quality Management . 7-1 7.2 Inspection and Cleaning . 7-2 7.2.1 Daily inspection . 7-2 7.2.2 Quarterly inspection . 7-3 7.3 Storage

HRX-OM-K003

System Maintenance . 7-1 7.1 Water Quality Management . 7-1 7.2 Inspection and Cleaning . 7-2 7.2.1 Daily inspection . 7-2 7.2.2 Quarterly inspection . 7-3 7.3 Storage . 7-3 7.3.1 Draining of circulating fluid out of tank . 7-4 7.3.2 Draining of facility water . 7-5 7.4 Periodic Replacement Parts . 7-6 Chapter 8 Appendix . 8-1 8.1 Specification . 8-1 8.1.1 System specification . 8-1 8.1.2

SMC Wireless System PROFINET compatible

Power Supply Cable with 7/8 Inch Connector/Power Supply Connector Straight connector type Angle connector type Socket connector pin arrangement 7/8 inch (Mini style) -126No.EX-OMW0006-D Field wireable connector Plug connector Socket connector pin arrangement pin arrangement 7/8 inch 7/8 inch (Mini style) (Mini style) Applicable Cable Terminal No.

Pressure Relief 3 Port Valve With Locking Holes

SPECIFICATIONS 6~7 4. HOW TO ORDER 7~8 5. CONSTRUCTION / PARTS LIST 9~10 6. OPTIONAL ASSEMBLY 11 7. DIMENSIONS 12~13 Pressure Relief 3 Port Valve With Locking Holes Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Fieldbus system PROFIBUS DP compatible SI unit

Content 0 to 4 A unit number of 0 to 9 is displayed. 5 Reserved 6 (This bit is fixed to 0) 7 (This bit is fixed to 1) Channel number Bit No. Content 0 to 5 A channel number of 0 to 63 is displayed. 6 Input/Output Type: 00 = Reserved, 01 = Input, 10 = Output 7 -68No.EX-OMN0028-B Diagnostic type Bit No.

SMC Wireless System EtherNet/IP ® compatible

Power Supply Cable with 7/8 Inch Connector/Power Supply Connector Straight connector type Angle connector type Socket connector pin arrangement 7/8 inch (Mini style) -115No.EX-OMU0028-D Field wireable connector Plug connector Socket connector pin arrangement pin arrangement 7/8 inch 7/8 inch (Mini style) (Mini style) Applicable Cable Terminal No.

Ozone Resistant

220-01-F 220-02 220-02-F 320-03 (02) 320-03-F (02) 420-04 420-04-F 121F-M3 131F-M3 121F-M5 (U10, 32) 131F-M5 (U10, 32) 221F-01 231F-01 2211F-01-06 221F-02 231F-02 321F-03 (02) 331F-03 (02) 421F-04 431F-04 1000F 2000F 2050F 3000F 4000F 1001F 2001F 2051F 3001F 4001F 230F 330F 430F 530F 630F 330F 430F 530F 630F Manifold regulator 4-, 5-port solenoid valve VQ Directional control valves 0 1000

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

PSxx-OMG0001CN

-22No.PS-OMG0001CN-H , (2030 ) -23No.PS-OMG0001CN-H PSE300 ( ) No.1 ON ON OFF Yes No No.2 OFF ON No.1 OFF No.3 No.4 No.5 No.6 No.7 -24No.PS-OMG0001CN-H No.8 Yes No No.9 No.9 No.10 No.11 No.12 No.13 No.14 No.15 No.16 -25No.PS-OMG0001CN-H No.

ZSE30/ISE30

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com L ISE30 01 25 M For positive pressure ZSE30 01 25 M For vacuum/low pressure Option 2 Piping specifications Nil None Bracket R 1/8 (With M5 female thread) 01 NPT 1/8 (With M5 female thread) A T1 Straight type 4 One-touch fitting 5/32" One-touch fiting

45

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM