70pvpump

Refer to pages 17-6-3 to 17-6-10 for Safety Instructions and Solenoid Valve Precautions. Operating Environment Maintenance Warning Warning 1.

AIR FILTER

Semi-standard 6 Semi-standard 6 Part no. Part no. C1SF-6(Z)-A AD17-6(Z)-A Note 2 Option Semi-standard Part no. Part no. C1SF-2(Z)-A AD17-2(Z)-A External appearance drawing and part no. Note 1) B in the table shows full dimensions of the product. Refer to 11. DIMENSIONS (P30). Note 2) Min. operating pressure is 0.1MPa. Note 3) "Z" of the part with no.

Lubricator

Note 1) Note 2) For nylon type (material: PA), add -6 to the end of the product number. Example: AL20P-080AS-6 Note 3) For the bumper retainer assembly and bumper seat retainer assembly for the metal bowl with level gauge, add -8 to the end of the product number. Example: AL30P-030AS-8 -9- 6. Bowl Assembly Specifications 6-1.

100

6 !5 !1 !4 Component Parts No.

S070

W with power saving circuit 6 150 (Lead wire AWG#26) 3.5 27 27.5 25 22 3 11 28.5 3.5 4-11-6 Series S070 3 Port Solenoid Valve Compact Direct Operated Dimensions Body ported S070C-G-32 Grommet type R1.1 2 7 7.2 V100 R1.1 Mounting screw (AXT632-106A-2) M2 x 0.4, thread depth 6 mm or more SY SYJ 150 (Lead wire AWG#26) 5 21 5.5 2 (OUT) port VK 5.5 4 4 11.5 9.5 VZ VT 1 (SUP) port 3 (EXH) port

SI Unit for Vacuum Manifold

: PCA-140180 4 Cable length (L) 4 1500 [mm] 5 3000 [mm] 6 5000 [mm] Item Specifications Pin No.

Electric Actuator / Low profile slider type

Eliminate these factors. 6 The table of the actuator with 1) Actuator is used vertically. Actuator cannot be used vertically.

Large Size Vacuum Module: Series ZR

Stations Port location R16 Arrangement (Right valve station which is looked from valve side is first station.) 01 1 Left side Right side R L B 06 6 Refer to (About individual spacer.)

Guide Cylinder Series MGG

5 #6 q t #8 !4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A #2 !0 !9 @0 @1 #1 A' Ball bushing bearing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 Slide bearing y Long stroke 100 @7 80, 100 View A-A Component Parts Component Parts Description No. Description No.

VQC

VQ4 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Connector wiring diagram (mixed wiring) VQZ 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 VQD 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) 6 tube M14 x 1 20 to 50 8 tube Ball joint rotation 15 Buffer Type Pad dia.

EXxx-OMS0026CN

3 3 2 4 4 5 5 6 6 7 7 0 8 1 9 2 Reserved 3 Reserved 3 4 Reserved 5 Reserved 6 Reserved 7 Reserved 01 -63No.EX-OMS0026CN EDS PLC EX600 EDS PLC EX600 EDS ex600_sen3_4_v10.eds ex600_1.ico Logix Designer TM TMEX600 Rockwell Automation Logix Designer EDS Generic Ethernet Module 1EDS [Tools][EDS Hardware Installation Tool] [Option][Register an EDS file(s)][] -64No.EX-OMS0026CN

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Q: 8 Model A B C D F H I J K P Q: 6 Q: 8 Y K P K P ZPT20F10-0-A14 ZPT40F10-0-A14 13 140 18.5 39 51.5 118 136.5 5 12.5 20 22 40 43 13 13 137 15.5 36 50 115 13 133.5 12.5 52.5 50 48.5 ZPT25F10-0-A14 ZPT50F10-0-A14 141 19.5 40 119 137.5 6 13.5 25 28 50 53 ZPT32F10-0-A14 135.5 16 36.5 115.5 134 13 32 35 49 Additional dimensions by stroke(mm) Additional dimensions by stroke(mm) K P Q: 6 Q: 8 K

SRP

Set pressure Gauge port orientation Nil: Standard 0.005 to 0.2MPa 0 OUT IN 1 0.01 to 0.4MPa Knob Gauge port R: R specifications Gauge port JIS symbol Port size Piping port size M5 x 0.8 Rc 1/8 Symbol M5 01 OUT IN Gauge port positions are indicated with the knob on the top side.

SRP

Set pressure Gauge port orientation Nil: Standard 0.005 to 0.2MPa 0 OUT IN 1 0.01 to 0.4MPa Knob Gauge port R: R specifications Gauge port JIS symbol Port size Piping port size M5 x 0.8 Rc 1/8 Symbol M5 01 OUT IN Gauge port positions are indicated with the knob on the top side.

AFF

Symbol Applicable compressor output (guide) Thread type Symbol Nil Type 2C 4C 8C 11C 22C 2.2 kW 3.7 kW 7.5 kW 11 kW 22 kW Symbol Nil Description Page for details P.68 P.69 Rc G1 With differential pressure gauge (GD40-2-01) With IN-OUT flange With differential pressure gauge (GD40-2-01) and IN-OUT flange N.C., N.O. auto drain, drain piping type F N X6 X15 NPT 1 Conforms to ISO1179-1.

2-Color Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30

2-Color Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30 How to Order Option 1 Without lead wire Nil Lead wire with connector (Lead wire length: 2m) L ISE30 01 25 M For positive pressure ZSE30 01 25 M For vacuum/Low pressure Option 2 Piping specification R 1/8 (with M5 female thread) NPT 1/8 (with M5 female thread) 01 T1 None Bracket Nil A Output specification NPN output

Manifold Regulator ARM1000/2000 Series

Note 4) When a regulator is not mounted on the manifold, use the following blank plate assembly (with mounting screws and O-ring) For ARM1000: Part no. 136114A For ARM2000: Part no. 136214A VBA VBAT AP100 ARM2000-4A2-01G Option / Pressure Gauge: G15-10-01 How to Order Symbol Individual IN Common IN G15 10 01 IN 1 Max. display pressure OUT IN 2 1 OUT 2 10 1.0 MPa Not able to set the pressure

BP1000

47.0 2.35 01 59.7 Hastelloy is a registered trademark of Haynes International.

LUBRICATOR

B B Semi-standard 6 Semi-standard 36 Part no. Part no. Port thread Port thread Rc Rc G G NPT C3SL-6(Z)-A NPT C3SL-36(Z)-A C3SL-6-A C3SL-36-A Semi-standard Semi-standard 3W Part no. Port thread Rc G NPT C3SL-3W(Z)-A C3SL-3W-A B External appearance drawing and part no. Semi-standard 36W Part no.