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Particle generation measurement test classify the 13/22-MXQ as grade 3, 4 which is determined by the type of adjuster option that is selected.  After inspection, the 13/22-MXQ is blown with high purity air (clean bench/class M3.5) in a clean environment.  It is then sealed and shipped in an anti-static double bag.

Color Symbol Symbol Color Black White Red Color Blue Yellow Green BU Y G B W R 15-6-13 2 Series TRBU Installation on One-touch Fittings Caution Lengths of tubes to be inserted into One-touch fittings are indicated on the outer layer of TRBU tubes.

C 02 R 1 4 Note) Option C1 (Clear cover has protrusion. / Clear cover is removable.) is not compliant. 14-11-13 13 Pressure Gauge Guide Circuit Diagram Dimensions Without indicator light GP46 Limit indicator NC. (Red) NO. (White) Pointer (Green) COM. (Black) Setting screw Indicator light ( ): R 1/4 With indicator light GP46: With cover ring assembly (For panel mounting) NC.

Linearity 3% F .S. or less AMR Lubrication Not required (Use turbine oil Class 1, ISO VG32, if lubricated.) 0.9 0.9 1.0 1.4 1.4 Weight (kg) ITV Proportional Solenoid Specifications IC 1 (Applicable power amplifier: VEA25) Proportional solenoid recognition symbol VEA25 VBA Applicable power amplifier VEF3121 (Flow type) VEP3121 (Pressure type) Max. current 1 A VE Coil resistance 13 (20C) Rated

V Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 17-1-13 9 Solenoid Valves Flow Characteristics (How to indicate flow characteristics) 1.

VA VCL40: 19/16 VA LVA VCL40: 13 VA Holding LVH Note 1) When the ambient temperature or fluid temperature is 60C or more, use high temperature specifications (class H coil).

PA PAX PB Flow Characteristics Water Air Orifice size (mm ) Port size Av x 10-6 m2 12 (INN.C.) 13 (INN.O.) 12 (INN.C.) 13 (INN.O.) Model C [dm3/(sbar)] C [dm3/(sbar)] Av x 10-6 m2 Cv converted Cv converted b Cv b Cv N.O.

fitting 1 (SUP) port n U side 1 2 3 4 5 D side 6 barb fitting 3 (EXH) port (18) 12 7 5 5 3.5 3.2 3.5 P = 7.2 12.8 n-3.2, 4 barb fitting 2 (OUT) port Dimensions Formulas: L1 = n 7.2 + 14.8, L2 = n 7.2 + 18.4, n: Stations (maximum 20 stations) n L 12 101.2 104.8 19 151.6 155.2 2 29.2 32.8 3 36.4 40 4 43.6 47.2 5 50.8 54.4 6 58 61.6 7 65.2 68.8 8 72.4 76 9 79.6 83.2 10 86.8 90.4 11 94 97.6 13

With surge voltage suppressor Note)"YOZ" is not available Electrical entry G Y YO Grommet DIN connector DIN terminal (Without connector) Note 1) Consult SMC for other voltages. 4.3-11 Series VQ20/30 Dimensions Plug lead unit manifold (VV2Q22) Equation L1= (n1) X 29+49 L2=L110 L3=L410.5 L5=L111.2 Dotted line: DIN rail mounting (-D) Dimensions n: Station (Max.20) L n 20 19 18 17 16 15 14 13

After replacing the coil, the clip is reinstalled by pushing it back in the direction opposite to its removal. 13 World Wide Support... North American Branch Offices For a branch office near you call: 1-800-SMC-SMC1 (762-7621) SMC Pneumatics Inc. (Milwaukee) 16850 W. Victor Road New Berlin, WI 53151 Tel: (262) 827-0080 FAX: (262) 827-0092 SMC Pneumatics Inc.

plug connector, without connector M plug connector, with lead wire M plug connector, without lead wire M plug connector, without connector DlN connector 3 110V AC (50/60Hz) L 04 1 2 4 220V AC (50/60Hz) LN LO 5 24V DC 6 12V DC M 7 240V AC (50/60Hz) MN MO 9 Other Option D DO DlN terminal, without connector Caution Refer to p.0-33 to 0-36 for Safety Instructions and common precautions 5.1-13

Adjustable Roller Lever/VM830-01-13 JIS Symbol 20N F.O.F. At lever length 38.1mm 20 P.T. 30 O.T. 50 T.T. Adjustable Rod Lever/VM830-01-14 JIS Symbol 2.3N F.O.F.

UJ I 2-Forled \bBion DIMENSIONS A B c o E F G H J K M P R s T 1.57 (40) 2.52 (64) 2.20 (56) 1.77 (45) 4.80 (1221 1.97 {50} 0.98 (25) 1 . 1 0 (28) 0.51 (13) 4.45 (113) ?

*{b-40-**+-'o.or 1 : rN)c0r 80 1oo tlnJ' -*--*-*--33 13 = cQ2L:s 5 s'F ."-"c" :^''^" *'."' -.t;^'."d;-:.df o,r's!.4 d.!

(N speci{icaltons) 1 F Hffi l\,4etric lnch l\4ark ng rs eleclroess nicke plared prov ded as standard (N specificatron) Also Available: AS-FG Stainless steel Metal elbow type wiih One.touch Fittings Elbow Type thrad f f i H # ' Noi available on AS12oo [,13 and AS1400-['13 Hffi o a a a a a a a a a a a o a a a a a a a a a a a a a a a a a a . _9q_"9i"1 Tube Sel Design Large T[rbe Insertion Depth

Metric size Inch size Control 3.2 23 01 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" Meter-out Meter-in 0 1 04 06 08 10 12 03 05 07 09 11 13 4 6 8 10 12 With One-touch fitting Use 1/8" tube. 15-9-92 2 Tamper Proof Speed Controller With One-touch Fitting, Elbow Type/Universal Type Needle Valve/Flow Characteristics AS121F AS131F AS221F-01 AS231F-01 AS221F-02 AS231F-02 Inlet pressure: 0.5 MPa Inlet

Max 1.25 9 80 92 108 8 M1 OX 1.S 15 18 M1 Oxl .5 9 63 103.5 MIOx l .S 11 99 116 13' 10 M1 6X2.0 21 22 M12xl .7S 11 123 Ml 2x 1.75 80 Clevis Mount: C0020P 0 -0 OM-DO Special cap bolt (mm) eo.. _ N CD CL ew ev A 0 R CU ex cz RR Ll H H Thread e I (mm) C Depth M8xl .2S M8x l .25 14 117 I .

Note 1) Data Note 2) Note 3) 10-3-13 13 The external dimensions and the related things about auto switches are the same as standard type, double acting, single rod. For Series CM2, refer to Best Pneumatics Vol. 6.

Fittings & Tubing Air Cylinders Rotary Actuators Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R GC GB E GA MM D C J 2.8 2 x P through A 4 x T counterbore E 0.5 B H S Z (mm) 6 depth 4.8 5 S 10 15 20 25 30 5 Z 10 15 20 25 30 Bore size B C D E GA GB GC H J MM P R T A 13 22 3 23 16 15 13 10 3.2 7 M3 x 0.5 31 10 7 6 10 15 24 4 24 33.5 16 15.5 16 11 M4 x 0.7 3.2 9 6 depth 5 64 69 74 79 84 89

8 22 8 15 80 18 M6 x 1 20 40 36 M26 x 1.5 124 13 10 70 41 41.6 3 16 11 29 10 16 92 23 M6 x 1 26 50 46 M32 x 2 150 13 TF TN Nil P (Piping port) ZZ X W TT Model 12-REA25 12-REA32 12-REA40 50 Rc1/8 30 NPT1/8 137 G1/8 17 50 Rc1/8 40 NPT1/8 156 G1/8 19 60 Rc1/4 40 NPT1/4 182 G1/4 22 12-REA50/63 0 L0.2 33 B 2 x 4 x V Effective thread depth 16 2 x P (Piping port) 14 14 8 (R) D X Q Q 14.5 22 I 2