3

Output specifications Symbol OUT1 OUT2 A NPN NPN B PNP PNP C NPN Analog (1 to 5 V) D NPN Analog (4 to 20 mA) E Note 2) PNP Analog (1 to 5 V) F Note 2) PNP Analog (4 to 20 mA) G Note 2) NPN External input Note 3) Unit specifications Nil Unit selection function Note 5) M SI unit only Note 6) Note 5) Since the unit for Japan is fixed to SI due to new measurement law, this option is for overseas

CEP1

D-F9PWV A96V D-A96V F9BV D-F9BV F9BWV D-F9BWV F9BAL D-F9BAL , 2-2-3 *1 C R04-J8M7.3 AC100240V DC24V RS-232C RS-232C + BCD 05 5 10 10 15 15 20 20 *1) ( ) () 2-3 CEP1 CEU5 3 CEU1 , CEP1 CEU5 ,CE1-R,23m ,, (8 ) CEP1 ,CE1-R, CEP1 ()() CEP1 ,CE1-R C C () CEP1, CE1-ROOC CE1-RO5 CE1-R10 CE1-R15 CE1-R20 CE1-R*C 3 3-1 CEP1B12 CEP1B20 () 1.5MPa 1.0MPa 0.15MPa 0.1MPa 50~300mm

Air cylinder

D-M9NAM9PAM9BAM9NAM9PAVM9BAV (2) Make sure that auto switch mounting band is not slanted.

Rotary Gripper Series MRHQ

D-F9B Perpendicular D-F9BV D-F9N Auto switch part no.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-l01 G49-4-l02 0.4 MPa G49-2-l01 G49-2-l02 0.2 MPa Round type Note 2) G49-7-l01 G49-7-l02 0.7 MPa Pressure gauge ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top

Lightweight and Compact

[C] 5 10 15 20 25 30 35 Circulating fluid temperature [C] HRS090-W-20/40 (50 Hz) HRS090-W-20/40 (60 Hz) 14 12 12 10 Facility water temperature 32C Facility water temperature 32C Cooling capacity [kW] Cooling capacity [kW] 10 8 8 6 Facility water temperature 40C Facility water temperature 40C 6 4 4 2 2 0 0 5 10 15 20 25 30 35 Circulating fluid temperature [C] 5 10 15 20 25 30 35 Circulating

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Reduced outgassing Resin materials eliminated Laser marking is employed for the model designation. o u d t g e 2 a c s u s d i Reduction of outgassing due to surface treatment e n o u d t g R e g a 1 c s u s d i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.

PFxx-OMO0004CN

[P_2][n_2][] [H_2][] [F 2] OUT2 OUT1 -40No.PF-OMO0004CN-E b. () [P2L][n2L][] () [P2H][n2H][] [ H2][] [F 2] OUT2 OUT1 -41No.PF-OMO0004CN-E c. 0999,999,999 L 3 (3) [P2.1][n2.1][] (3) [P2.2][n2.2][] (3) [P2.3][n2.3][] [F 2] OUT2 /OUT1 OUT1 -42No.PF-OMO0004CN-E d.

,

15.5 (12-, 14 port) 9 (2-, 4 port) 74.5 66.5 8.5 PE port 23 13.5 SMC 16 16 M5-2 ports 12, 14 port 1/8-2 ports 2, 4 port 1/8 1 port 1/8-2 ports 3, 5 port EVS1-02-FG-D-M0 EVS1-02-F G-D-M0 H J I 136 149 68 21.5 (14 port) 68 21.5 (12 port) 21.5 (14 port) 21.5 (12 port) 8.5 (4 port) 8.5 (2 port) 8.5 (4 port) 8.5 (2 port) 14 4 2 12 14 4 2 12 12 12 25 34 34 18 18 25 14 14 Indicator light Indicator

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

Flow Characteristics/Weight C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 1 2 (P A) 2 3 (A R) Valve model Flow characteristics Weight (g) Operating pressure range (MPa) Port size Grommet DIN terminal 0.10 0.13 0.13 0.10 0.13 0.13 0.13 0.13 0.13 0.13 0.41 0.32 0.32 0.41 0.32 0.59 0.32 0.32 0.59 0.32 2 3 2 3 2 3 VKF33 VKF33 Y VKF33 E VKF33 V VKF33 W VKF334 VKF334Y VKF334E VKF334V VKF334W 0.67

EXxx-OMY0006CN

C. N. C. 34 Fig. 6-1 24 No.EX##-OMY0006CN 7. 7.1. 8 2xM5 (= 1.5 Nm) 2xM5 (SI = 1.5 Nm) 4xM () Fig. 7-1 8 VQC4000 7 25 No.EX##-OMY0006CN 7.1.1. SI 2 / =0.6 Nm O Fig. 7-2 IP65O 7.1.2. SI 1x 2x ( 2.5 mm= 1.3 Nm) Fig. 7-3 IP65 IP65 26 No.EX##-OMY0006CN 7.2.

Series HAW Water Cooled Aftercooler 1

temperature (C) Cooling water pressure drop (MPa) Fluid Inlet air temperature (C) 67 0.7 25 30 40 0.02 17 36 40 45 5 5 25 times heat transfer area As compared to shell and bare tube, the flower fin tube has 25 times the heat transfer area. 0.03 0.03 0.06 0.002 Air: Compressed air, Cooling water: Industrial water/Fresh water Even heat exchange Sharp edge of flower fin causes air turbulence

EX500-GPR1A.eng

Application 8 7 6 5 4 3 2 Communication connector 1 9 Ground terminal Used for grounding EX500 Part Names Station number switch protective cover Set address and bus terminator by using the switches under this cover. ( Note2 ) Display Communication port D ( COM D ) Communication port C ( COM C ) Communication port B ( COM B ) Communication port A ( COM A ) Power supply connector Display the

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

Weight Material: NBR, Mounting: A [g] qWeight Difference by Mounting Style [g] ZHP63BMNA-C6S 184 ZHP80BMNA-C6S 224 ZHP63UMNA-C6S 167 ZHP80UMNA-C6S 175 B C D E F G H 20 5 14 7 25 1 11 wWeight Difference by Material [g] For the ZHPA-00 (without ejector), weight shown above 12 g.

Rotary One-touch Fittings Series KS/KX

t i f h c u o t e n O d a e r h t e l a m ) T P ( R 3 KM12 5 1 M K h c u o t e n O g n i t t i f d o R g n i t t i f h c u o t e n O 3 6 8 0 1 KM15 6 1 M K h c u o t e n O g n i t t i f d o R g n i t t i f h c u o t e n O 3 4 6 Applicable Tube KM16 Tube material Nylon, Soft nylon, Polyurethane KM14 Tube O.D.

VT307

Flow Characteristics/Weight Flow characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Port size Weight Valve model Grommet C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT307 VT307V (Vacuum spec. type) VT307E (Continuous duty type) VT307Y (Energy-saving type) VT307W (Energy-saving, Vacuum spec. type) VT307 VT307V (Vacuum spec. type) VT307E

End Lock Cylinder Series CBG1

P 2-TC TD D I E 0 -0.05 0 -0.05 E AL TE 2-TC K F TA DL2 TF TG A S + Stroke H NA F ZZ + Stroke Section TA With non-locking type manual override (suffix N) With locking type manual override (suffix L) HN HR MO RF WL WL KA 0.1 C 8-J NA (mm) Stroke range Bore size (mm) A AL B1 C D DL2 E F GA GB H H1 HR HN (max.)

Vacuum Equipment

Vacuum Area Diameter (Vacuum pressure: 84 kPa) after Vacuum Suction by Vacuum Pad (mm) Flat U Flat with ribs C Bellows B Deep D Large size H Type Large size bellows HB Material Size Part no.

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

15.5 (12-, 14 port) 9 (2-, 4 port) 74.5 66.5 8.5 PE port 23 13.5 SMC 16 16 M5-2 ports 12, 14 port 1/8-2 ports 2, 4 port 1/8 1 port 1/8-2 ports 3, 5 port EVS1-02-FG-D-M0 EVS1-02-F G-D-M0 H J I 136 149 68 21.5 (14 port) 68 21.5 (12 port) 21.5 (14 port) 21.5 (12 port) 8.5 (4 port) 8.5 (2 port) 8.5 (4 port) 8.5 (2 port) 14 4 2 12 14 4 2 12 12 12 25 34 34 18 18 25 14 14 Indicator light Indicator

VP3145/3165/3185

DIN terminal: VP3185-D Conduit terminal: VP3185-T A B A B VQZ VZ Conduit terminal with indicator light (TL) G 1/2 Max. 11 Applicable cable 6 to 12 VS Light Light VFN Rc 1/4 G 1/2 Rc 1/4 ( ): With indicator light (TL) 4-10-7 8 Made to Order Specifications: Series VP3145/3165/3185 Main Valve Double Acting Type: -X80/X81 How to Order 1 D Z A N X 06 5 1 4 VP31 81 80 Type of actuation Body size