Hydraulic Filters N.C. and N.O. common 2 x Rc (d) Removal dimension G INLET INLET B C E (F) B N COM. N.O. N.C.
Right Left Rear Front w q Parts List e Part no. Applicable model No.
Valve For VCW20 OR-1860-120Nil: NBR F: FKM E: EPDM P: PTFE OR-2380-130For VCW30 Nil: NBR F: FKM E: EPDM P: PTFE OR-2600-180For VCW40 e Nil: NBR F: FKM E: EPDM P: PTFE Manifold For VCW20 r OR-1400-178Nil: NBR F: FKM E: EPDM P: PTFE OR-2670-178When the loosened clip is pulled out in direction e using pinchers, etc., the coil can be removed and replaced in direction r.
Right Left Rear Front w q Parts List e Part no. Applicable model No.
R QA Q GC GB E MM GA D J C 2.8 A Width across flats L 2-P through A1 H E 4-T counter bore 0.5 B S Z (mm) S Z T QA R Q A A1 P GB MM B C D E GA L J H GC Bore size 5 30 40 50 5 10 15 20 25 30 40 50 15 20 25 10 4.5 2 16 12 9 4 20 16 12 11 5.5 4.5 26 20 40 32 8 6 30 27 6 5 16 14 19 16 22 19 21.5 19 116 126 135 145 M6 x 1.0 M5 x 0.8 14 12.5 40 36.5 81 72.5 86 77.5 91 82.5 96 87.5 101 92.5 106
1 attached to the terminal block e. Then, pass the lead wire !0 through the terminal block e and tighten the screw !1 again. Note 1) Tighten within the tightening torque of 0.5 Nm 15%.
Body size Standby E/P regulator Standby regulator Residual Pressure Relief valve 20 EXA1-AC2 30 EXA1-AC1 EXA1-AC2 40 60 EXA1-AC1 -14No.PF-OMA1007-B Names and Functions of Individual Parts Air Management System (Standby E/P regulator type) No.
Cylinder bore MHZ2 D E X 7 Cylinder bore MHZ2 D E X46 Not available when equipped with dust cover/MHZJ2.
66 2 11 55 41 63 36 10 XL*-OMI0010-E 4-2Size 50,63,80,100,160 C E D C E E (KF Flange) (K Flange) Fn Fd J K H B A G A Unit: mm Model A B C D E Fn Fd G H J K XLG-50-1 70 183 80 31 10.5 75 52 77 29 10.5 XLG-63-1 88 209 100 39 11 87 95 70 76.5 36 9 XLG-80-1 90 250 117 45.5 11 114 110 83 105 44 9 XLG-100-1 108 270.5 154 55 11 134 130 102 92 58 9 XLG-160-1 138 339 200 65 11 190 180 153 124 62
M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C
M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C
L1 L2+A5 L3 2 1 V 2 E = W () 2 1000 Collision speed V = 1.4 Va 1 420 2 E = 1 () = 0.088 2 1000 Find the kinetic energy E (J) of the load. ) Correction factor (Reference values) V = 1.4 x 300 = 420 Ea = K E max Find the allowable kinetic energy Ea (J). Confirm that the kinetic energy of the load does not exceed the allowable kinetic energy.
Applicable cylinder D G F H L I C E J K M N Part No.
Valve side exhaust Refer to page 478 for the maintenance parts. 470 XLAQ Series Aluminum One-touch Connection and Release High Vacuum Angle Valve Dimensions C D E E C G H I H V A C F U U M V E A V L Heater (Option) (Maintenance space) Auto switch (Option) B J XLA XL H XLQ XLQ G XM XY DXSA A XVD XGT CYV A (mm) Model A 120 133 178 190 B 38 48 66 79 C 1 1 2 2 D 12 11 11 E 30 40 55 75 F 17
L1 L2+A5 L3 Kinetic Energy 2 1 V 2 E = W () 2 1000 Collision speed V = 1.4 Va 1 420 2 E = x 1 () = 0.088 2 1000 Find the kinetic energy E (J) of the load. ) Correction factor (Reference values) V = 1.4 x 300 = 420 Ea = K E max Find the allowable kinetic energy Ea (J). Confirm that the kinetic energy of the load does not exceed the allowable kinetic energy.
L1 L2+A5 L3 2 1 W V 2 E= ( ) 2 9.8 1000 Collision speed V=1.4 Va *) Corrected coeficient 1 10 420 E= ( ) =0.09 2 9.8 1000 V=1.4 x 300=420 Calculate kinetic energy E(J) of moment. Calculate allwable kinetic energy Ea(J). Check that kinetic energy of moment does not exceed allowable kinetic energy.
2 @1 e u o t @3 !8 @0 @0 @2 !4 !7 !1 !9 !2 @1 @4 e u o t @3 !8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !
2 e @1 q @7 @5 @8 MY CXSM10 CXSM15 CY @0 !5 @9 @4 r w !3 i !0 @2 u t !6 @0 !5 @9@3@4r w !3i!0@2u t!6 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-X 20!4 y e !1 !2 @3 @1 q !4y e !1 !2 q @1 Data CXSM20 to 32 @0 !5 !6 @3 @4rw o i !0 u @2 t !4 y e !1 !
. error code or Note42) Continue (ON) Green Green Green Note34) Note41) Blue (ON) E 8 E 9 Error signal (ON) (ON) (ON) OFF (B contact) Green Green (ON) OFF OFF Maintenance When static neutralization performance is reduced due to contamination, wearing or breakage of emitters.
C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-M9W D-M9V D-M9WV D-M9 D-M9W D-M9V D-M9WV D-M9 D-M9W D-M9V D-M9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E 16.5 25 4.5 18.5 49 6.5 7.5 38 21 MIW8-8D MIS12