Escapements Series MIW/MIS

Operation conditions Operation conditions Point of application L Operating pressure P (MPa) Operating pressure P (MPa) Work piece mass m (Kg) Work piece mass m (Kg) Work piece quantity x (Qty.) Work piece quantity x (Qty.)

VDW Series

(the value under the prescribed conditions) 0.8 0.7 0.6 Subsonic Critical pressure 0.5 0.4 0.45 0.45 Sonic 0.4 0.4 0.35 0.35 0.3 0.3 0.3 0.25 0.2 0.25 0.2 0.2 0.15 0.15 0.1 0.05 0.1 0.1 0.05 S = 0.54 VDW101 10 60 50 40 30 20 10 20 VDW 1.6 S = 1.2 125 100 75 50 S = 3.2 VDW202.3 350 300 250 200 150 100 50 S = 5.8 VDW203.2 600 500 400 300 200 100 S = 2.8 VDW302 300 250 200 150 100 50 VDW303

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Confirmation of allowable lateral load From the graph, the allowable lateral load at L = 50 mm and P = 0.4 MPa is 18 N. Because 2.1 N < 18 N, it is applicable. 30 20 D2. Confirmation of allowable lateral load In the same way, the lateral load at L = 50 mm and P = 0.4 MPa is 48 N from the graph.

HRX-OM-W002

Table 8-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L]

Round Type Low Pressure Hydraulic Cylinder Series CH
M

Round Type Low Pressure Hydraulic Cylinder Series CHM 20, 25, 32, 40 3.5MPa How to Order CHM 25 100 L L With Auto Switch CHDM 25 100 C73 With auto switch (built-in magnet) Number of auto switches Nil S n 2 pcs. 1 pc. "n" pcs.

Refrigerated Air Dryer

P Dimensions (mm) DIN flange 80 A B C D E F G K L M N P Model IDFA150F Port size 950 1290 1332 268 720 1432 475 20 990 217 935 1030 100 IDFAE/F Series Options 1 For How to Order optional models, refer to pages 92, 95 and 98.

Clean Room Rodless Cylinder Series CYP ø15, ø32

(port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P (port h)] HI HP H HL HG HT HS HB HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) K 21 20 JK 10 12 J M6 x 1 M10 x 1.5 HT 19.5 39 HS 27 49.5 HP

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

(port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P (port h)] HI HP H HL HG HT HS HB HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) K 21 20 JK 10 12 J M6 x 1 M10 x 1.5 HT 19.5 39 HS 27 49.5 HP

ZR

ZL Operation Solenoid valve (Double, Single)/Air operated valve Power supply voltage 3, 5, 6, 12, 24 VDC, 100, 110 VAC (50/60Hz) ZY Vacuum pressure switch ZQ 0 to 101 kPa Set pressure range ZSE2-0R-15 ZSE4-00---X105 3% or less Hysteresis ZF 12 to 24 VDC (Ripple 10% or less ) Operating voltage ZP Suction filter unit ZR1-F Vacuum to 100 kPa Operating pressure range ZCU 30 m Filtration degree

Valve Single Unit

Clean appearance P N SS5X3-42 SX340(R) P N SS5X5-41 SX540 P N SS5X5-42 SX540(R) P N SS5X7-42 SX740(R) P N SS5X3-41 SX340 Single base/B mount Common SUP/Common EXH 4 to 12 stations 3 to 12 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P (SUP)/R (EXH) Valve stations (1) In case of a flat cable style, each valve is wired on the print board of manifold

Multi-Axis Step Motor Controller

(Option) JXC-W1 p. 16 VUSB cable (Option) JXC-W1-2 Cable length: 3 m p. 16 VController setting software (Option) JXC-W1-1 p. 16 PC Provided by customer. *1 The connected actuators should be ordered separately.

MGC

Refer to p.0-44 to 0-46 for common precautions of auto switch.

NCA1

Note 2) Refer to p.5.3-5 for lead wire length.

RSH

(Resin or rolled steel) LVariation Standard stroke (mm) Bore size (mm) Series Mounting Action Rod end configuration Standard variation Built-in magnet Locking Cancel cap Proximity switch Option 15 20 30 40 20 32 50 63 80 P P P P P P P P P P P P P P P P P P P P P P P P P Double acting Lever style Double acting with spring RSH Flange Adjustable Single acting 4.3-1 Heavy Duty Stopper Cylinder

Ionizer

V to +400 V +30 V to +100 V Within 30 V 30 V to 100 V 100 V to 400 V 400 V or lower Light ON Positive Static neutralization completion Flash at 4 Hz Detects the electric potential difference and outputs in an analog voltage.

Digital Pressure Switch ( compatible)

Direct parameters page 1 DPP1 address Access Parameter name Initial value (dec) Contents 0x07 R Vendor ID 0x0083(131) SMC Corporation 0x08 0x00022A(554) 0x00022B(555) 0x00022C(556) 0x00022D(557) 0x00022E(558) 0x00022F(559) 0x000230(560) 0x000231(561) ISE20C-L(-M)-* ISE20C-L-P-* ZSE20C-L(-M)-* ZSE20C-L-P-* ZSE20CF-L(-M)-* ZSE20CF-L-P-* ISE20CH-L(-M)-* ISE20CH-L-P-* 0x09 R Device ID 0x0A 0x0B

Air Slide Table

(mm) Table displacement (mm) MXQR20-50 MXQR20-30 MXQR20-40 MXQR20-100 MXQR20-125 MXQR20-150 MXQR20-40 MXQR20-100 MXQR20-125 MXQR20-150 0.06 MXQR20-50 MXQR20-150 MXQR20-100 0.08 MXQR20-125 MXQR20-30 0.04 MXQR20-20 MXQR20-100 0.04 MXQR20-20 MXQR20-10 0.04 0.02 MXQR20-10 0.02 0 0 0 100 200 300 100 200 300 400 500 600 100 200 300 Load (N) Load (N) Load (N) 25 25 25 Lr = 200 mm 0.08 MXQR25-150

15

+ A = 100 y, z + A 100 10 y, z + A = 200 y, z + A = 200 y, z + A = 300 y, z + A = 300 1 1 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 700 800 Stroke [mm] Stroke [mm] [Graph 6] Allowable load mass by stroke 32 [Graph 5] Allowable load mass by stroke 25 100 100 y, z + A = 0 y, z + A = 0 y, z + A = 50 y, z + A = 50 10 Load mass [kg] Load mass [kg] 10 y, z + A = 100 y, z + A = 100

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Resin Body SYJ (A) 2 Aluminum/NBR Spool valve w Pilot valve VK e 1 (P) 3 (R) VQZ100-12A Resin/Aluminum P, R plate r r VZ VT VQZ200/300 VT Metal seal Rubber seal VP r e w q r e w q VG VP VQ VQZ N.C. N.C. VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No.

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

Weight Series Stroke[mm] 50 100 150 200 250 300 350 400 450 500 LEKFS16 Product weight[kg] 0.9 1 1.1 1.2 1.3 1.4 1.5 1.5 1.6 1.7 0.12 Additional weight with lock[kg] LEKFS25 Series Stroke[mm] 50 100 150 200 250 300 350 400 450 500 600 700 800 Product weight[kg] 1.7 1.8 1.9 2.1 2.3 2.4 2.5 2.6 2.8 2.9 3.2 3.4 3.7 0.26 Additional weight with lock[kg] LEKFS32 Series Stroke[mm] 50 100 150 200