Compact Vacuum Unit

V B 0.185 6 ZB0020-K1Vacuum pump system Release pressure SUP (PD) port 1 M5 thread depth 0.158 Port open to atmosphere Air pressure SUP Vacuum pressure SUP (PV) port Supply valve M5 thread depth 0.158 PV Release valve 0.04 PD 0.287 0.394 Silencer cover (Detachable) V (inch) 10 11 J1 Q2 L(O) M(O) ZB Port type A B C2 C4 N1 N3 L2 L4 LN1 LN3 0.16 0.3 0.29 0.3 0.33 0.33 0.33 0.33 3.09 3.22 3.22

CXS

IC circuit A96V A96 5 V Reed switch Yes Yes Grommet 100 V 24 V 12 V A93 M9N M9P M9B F9NW F9PW F9BW F9BA A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV 2-wire Relay, PLC 3-wire (NPN) IC circuit 5 V,12 V 2-wire 3-wire (PNP) 12 V Solid state switch Relay, PLC Grommet 5 V,12 V 24 V 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color indication) 2-wire 12 V Water resistant (2-color

CXS

IC circuit A96V A96 5 V Reed switch Yes Yes Grommet 100 V 24 V 12 V A93 M9N M9P M9B F9NW F9PW F9BW F9BA A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV 2-wire Relay, PLC 3-wire (NPN) IC circuit 5 V,12 V 2-wire 3-wire (PNP) 12 V Solid state switch Relay, PLC Grommet 5 V,12 V 24 V 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color indication) 2-wire 12 V Water resistant (2-color

Plug-in Unit

65.5 P=25 A A A B A B A B A B A B 21 21 63 9 A A A A A A A 143 163 66 41.5 9 B B B B B SI unit Input block 10 n 1 2 3 4 5 6 7 Stations D-side 8 U-side Formulas L1 = 25n + 106 (Maximum 16 single wiring stations) L2: For one input block.

AC

2401 P3 JIS B 2401 P22 JIS B 2401 P5 131545 JIS B 2401 P5 131647 JIS B 2401 P5 131647 JIS B 2401 P5 JIS B 2401 G50 JIS B 2401 P6 JIS B 2401 G55 131336 JIS B 2401 P14 1.5-34 AR1000 to 6060 Dimensions AR1000 to 5060 Panel mounting hole AR1000 to 3060: Max. 3.5t AR4060/5060: Max. 5t AR6060 Model Port size A B C D M N P E F G H J K L Bracket mounting dimensions 25 40 53 53 70 75 90 95 11 15 25

2-Color Display Digital Flow Switch Series PFM

A B A B 4 (5/32") 10.1 8.1 4 (5/32") 10.1 36.1 6 10.3 8.3 6 10.3 36.3 8 (5/16") 12 10 8 (5/16") 12 37 1/4 10.3 8.3 1/4 10.3 36.3 PFM S-01/02--X693 PFM S-01/02--X694 7 5 7 5 10.2 10.2 (34.2) 43 1 43 1 A PFM A 51.5 (Max. 58.5) 51.5 (Max. 58.5) PFMV IN OUT 3 (34.2) PF2A 13 3 13 PF2W PF2D C 18 C 18 OUT IN B 48 20 20 48 B IF 2 x 3.4 2 x 3.4 C (Width across flats) C (Width across flats) A B A B

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

B B B B TM SZ 5.4 16.5 VP4 L1 30.5 L2 S0700 38 VQ 1 2 3 4 5 6 7 8 n Stations D side U side VQ4 VQ5 VQC 123.5 SMC SMC SMC SMC SMC VQZ 88.5 B B B B B B B B SQ 47 37.5 A A A A A A A A VFS 2 11.5 9 37.5 28 42 4(A), 2(B) port 2n x Rc 1/8, 1/4 VFR EX123: 2 x G 1/2 EX124: 4 x G 1/2 Use a dripproof plug assembly (AXT100-B04A) for the unused conduit port (G 1/2).

53

Note 2) 400 V type is provided with an earth leakage breaker -B as standard.

MXW

47 27 27 B 128 203 108 153 178 MXW12 W 15 15 35 15 15 V 140 215 120 165 190 A 55.5 30.5 30.5 30.5 30.5 30.5 B 140 215 240 165 265 190 MXW16 W 43.5 18.5 18.5 18.5 18.5 18.5 V 152 227 252 177 277 202 A 39.5 39.5 64.5 39.5 39.5 39.5 39.5 B 222.5 247.5 172.5 272.5 197.5 297.5 322.5 MXW20 W 27.5 27.5 52.5 27.5 27.5 27.5 27.5 V 234.5 259.5 184.5 284.5 209.5 309.5

EXxx-OMZ0016

EXW1 EXW1 Up to 100 m V.1.0/V.2.0 Available*1 EXW1 EXW1+EX600 *2 V.1.0 NA EXW1 EX600 Up to 10 m V.1.0 NA EX600 EXW1 Up to 10 m V.1.0 NA Available*3 EX600 EXW1+EX600 Up to 10 m V.1.0 NA Available*3 EX600 EX600 Up to 10 m V.1.0 NA Available *1: Available in protocol V.2.0. *2: Up to 100 m between an EXW1 series Base and Remote, and up to 10 m between an EXW1 series Base and an EX600-W series

Compact Rotary Actuator Series CRQ2

12 V Reed switch Solid state switch 12 V IC circuit Diagnostic indication (2-color display) 5 V, 12 V Relay, PLC Yes Grommet 24 V 12 V IC circuit 5 V, 12 V Water resistant (2-color indication) M9PAV M9BAV 12 V 3-wire (NPN equiv.)

VS 8-2/VS 8-4

There is a danger of malfunction or damage to the reduced wiring system or input/output equipment. +24 V +24 V Power supply for output Power supply for output 0 V 0 V Power supply for control/input +24 V Power supply for control/input 24 V 4. Do not install a unit in a place where it can be used as a foothold.

Plate Cylinder

12 V IC circuit Reed auto switch Solid state auto switch 12 V IC circuit 5 V, 12 V Diagnostic indication (2-color indication) Relay, PLC Grommet Yes 24 V 12 V IC circuit 5 V, 12 V Water resistant (2-color indication) M9PAV M9PA M9BAV M9BA 12 V Magnetic field resistant (2-color indication) P3DW Note 2) 3-wire (NPN equivalent) A96V A96 5 V 12 V IC circuit Yes Relay, PLC 24 V Grommet

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Y69B Y7NWV Y7PWV Y7BWV IC circuit 5 V, 12 V 3-wire (PNP) 2-wire 12 V 3-wire (NPN) 3-wire (PNP) IC circuit Relay, PLC Diagnostic indication (2-color indication) 5 V, 12 V Grommet 24 V 2-wire 12 V Water resistant (2-color indication) Y7BA Solid state switches marked with are produced upon receipt of order.

Digital Flow Switch ( compatible)

: 50 PF2MC7###-##-A/B#-### NPN (1 output) + External input type Maximum applied voltage: 28 V Maximum load current: 80 mA Internal voltage drop: 1.5 V or less External input: Input voltage 0.4 V or less (reed or solid state input) for 30 msec. or longer -22No.PF-OMZ0002-A PF2MC7###-##-B#-### PNP (2 outputs) type Maximum load current: 80 mA Internal voltage drop: 1.5 V or less PF2MC7###-#

CNA

MGG (Max.)W1 B DX Z + Stroke MGC DDH10 hole 90 B MGF 4-DT B DS A DH DF CY1 DO DO DC DE DU DU DL DA 4-DR MY1 Rotation angle (mm) Bore (mm) 40 50 63 80 100 Bore (mm) 40 50 63 A B A + B + 90 Part No.

rep-filter-e

(b) Incorrect mounting of V band (Not correctly fit with collar of cover) Fig. (b) Incorrect mounting of V-band [V-band for replacement] Part no: CY-27S Actuators Modular F.R.L. Pressure Control Equipment Retainer T bracket Caution Clean V-band and the contact surface between the cover and the case before mounting. Dirty contact surface lead to cause leakage.

Industrial Filters Replacement Procedure

(b) Incorrect mounting of V band (Not correctly fit with collar of cover) Fig. (b) Incorrect mounting of V-band [V-band for replacement] Part no: CY-27S Actuators Modular F.R.L. Pressure Control Equipment Retainer T bracket Caution Clean V-band and the contact surface between the cover and the case before mounting. Dirty contact surface lead to cause leakage.

Slider Type/Ball Bushing Bearing

V Relay, PLC 2-wire IC circuit 5 V, 12 V 12 V 100 V or less 24 V Connector IC circuit 5 V, 12 V Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot guarantee water resistance.

SMC Wireless System PROFINET compatible

Signal name 1 24 V 1 24 V (Control and input) (Control and input) 2 24 V (Output) 2 24 V (Output) 3 0 V (Control and input) 3 0 V (Control and input) 4 0 V (Output) 4 0 V (Output) 5 Not used (4) EX600-ED5-# PWR IN: M12 4-pin Plug A-coded PWR OUT: M12 5-pin Socket A-coded Configuration Pin No. Signal name Configuration Pin No.