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L / t \ t k N H*#N NVZ3320 NVZ3240 NVZ334O A P / ^ l | , r l \ l l \ ^ d l / l a !

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

L / t \ t k N H*#N NVZ3320 NVZ3240 NVZ334O A P / ^ l | , r l \ l l \ ^ d l / l a !

MXW

D-A9V 10 6 6 8.5 10 D-M9 D-F9W D-M9V D-F9WV 5.5 (4) 3 (2) 3 (3) 4 (3) 6 (4) Interference Note) Figures in parentheses are the case for D-M9, D-M9V switch types.

LJ1H

B A C D Non-standard Motors: The following motors will be mounted when a motor mounted type is specified.

Direct Solenoid

f21 n. g!4) 31t1 l,loB thln 8 rtrtlo.n @itact tctoP. DritENsroNs A B c D E F G H J K lul N o P R s T u 3.43 (84 2.43 (72) 1.89 (48) 2.61 {67) 3.54 {so) 1.73 (44) 1.81 (46) 3.54 (90) 1.97 (s0) 0.79 (20) 0.35 (91 5.12 (130) 4.

IIIIIII

A B c D E F G H J K M N 4.37 : 1 1 1 1 3 . 1 5 (80) 1 . 1 0 (2Al 1.22 (31)0.06 (1.5) ',.12 {3) 1.57 (40) 1.06 (271 1.42 (36) 1.26 (321 1.20 30.5' ).2t (6) Millimeters in Parentheses F O,F 7.05 lbs (3 2 kg) T T 90' '75 PSIG (5 Kgflcm2) A B c D E F G H J K ll N A B c D E F G H J K M N o 4.5() 114.31 3.30 83.8) 1.25 t31.8 1.20 (30.5) 0.89 '22.5) 0.06 (1.s) ). 12 (3) 1.57 (40) .42 (36) 1 2 6

ITV-E

These i nst ruct i ons i ndi cat e t he l evel of pot ent i al hazard by l abel s of CAU TI O N W ARN I N G , or D AN G ER . To ensure saf et y, be sure t o observe I SO 4414, J I S B 8370 and ot her saf et y pract i ces. Expl anat i on of l abel Label M eani ng of l abel W ARN I N G O perat or error coul d resul t i n seri ous i nj ury or l oss of l i f e.

LEC-OM02904

AC200230V AC100120V 40 M5 3.24[Nm] M5 3.24[Nm] 6 AC100120V AC200230V AC100120V AC200230V L1 L1 PE PE L2 2-M5 2-M5 L2 L3 CNP1 CNP1 N N P1 P1 M4 1.2[Nm] P2 P2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L11 L11 L21 L21 U U CNP3 V CNP3 V W W 9 2 9 (2) LECSS-S8 [mm] 5 40 6 6 6 (80) (170) 6 6 () CN4 CN2L CN2 CN1B CN1A CN3 CN5 CNP1 L1 L2 L3 N P1 P2 P C D L11 L21 U V W L1 L2 () L3 N P1 CNP2 P2

VQZ1000/2000/3000

Insert D at the end of the manifold part number.

O

These i nst ruct i ons i ndi cat e t he l evel of pot ent i al hazard by l abel s of CAU TI O N W ARN I N G , or D AN G ER . To ensure saf et y, be sure t o observe I SO 4414, J I S B 8370 and ot her saf et y pract i ces. Expl anat i on of l abel Label M eani ng of l abel W ARN I N G O perat or error coul d resul t i n seri ous i nj ury or l oss of l i f e.

O

These i nst ruct i ons i ndi cat e t he l evel of pot ent i al hazard by l abel s of CAU TI O N W ARN I N G , or D AN G ER . To ensure saf et y, be sure t o observe I SO 4414, J I S B 8370 and ot her saf et y pract i ces. Expl anat i on of l abel Label M eani ng of l abel W ARN I N G O perat or error coul d resul t i n seri ous i nj ury or l oss of l i f e.

Slider Type/Ball Bushing Bearing

B A (mm) Applicable auto switch D-A72 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7V/J79C D-F7W/J79W D-F7WV D-F7BA/F7BAV D-F79F Other than the models listed in How to Order, the following auto switches are applicable. For detailed specifications, refer to page 1627.

1

6)*1 55 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mA 25 25 40 25 + 35 (n 2) 2 (n = 2, 4, 6)*1 60 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mV 25 25 35 20 + 35 (n 2) 2 (n = 2, 4, 6)*1 35 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mWV D-M9mAV 25 25 35 20 + 35 (n 2) 2 (n = 2, 4, 6)*1 35 + 35 (n 2) (n = 2, 3, 4, 5) *1 When n is an odd number, an even number that is one larger than the odd number is to be used for the

Mechanical Valves Series NVM, NVFM, NVZNI

A B c D E F G H J K M N 4.37 : 1 1 1 1 3 . 1 5 (80) 1 . 1 0 (2Al 1.22 (31)0.06 (1.5) ',.12 {3) 1.57 (40) 1.06 (271 1.42 (36) 1.26 (321 1.20 30.5' ).2t (6) Millimeters in Parentheses F O,F 7.05 lbs (3 2 kg) T T 90' '75 PSIG (5 Kgflcm2) A B c D E F G H J K ll N A B c D E F G H J K M N o 4.5() 114.31 3.30 83.8) 1.25 t31.8 1.20 (30.5) 0.89 '22.5) 0.06 (1.s) ). 12 (3) 1.57 (40) .42 (36) 1 2 6

7

SMC 8 x 18 VXS VXB F S D Q VXE VXP Conduit C E U 280 VXR VXH 23 B G1/2 VXF R T VX3 A IN OUT N SMC VXA 8 x 18 F S Q D Flat terminal C E U 11 R T B A IN OUT N SMC 8 x 18 S Q D F (mm) Electrical entry Model Flat terminal Conduit terminal Conduit Applicable flange A B C E F N Q R S D T T U U U 84 (92) V T 90 (98) 179.5 (187.5) 92.5 (100.5) 92.5 (100.5) 98.5 (106.5) 192.5 (200.5) 98 (106) 98

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

C D 15, 20 (mm) Applicable switch model Bore size (mm) D-A9 D-F9, D-A9W A B C D A B C D 15 56.5 17.5 76.5 21.5 72.5 60.5 87.5 67.5 20 39.5 19.5 23.5 83.5 35.5 71.5 Note 1) Auto switches cannot be installed in Area C in the case of 15.

VM

D.

TABLE OF CONTENTS

General Purpose Type Buna N FKM Neoprene EPDM Code # Code. Duro. Code. Duro. Code. Duro. Code. Duro. Durometer A (80-90) V (70-80) G (75-85) U (80-90) B (70-80) I (80-90) R (70-80) X (70-80) C (55-65) N (90-95) L (80-90) D (70-80) H (70-80) P (90-100) Property Acrylonitrile Fluoroelastomer G. N.

MY2

(V), D-F9P(V), D-F9B(V) Auto Switch Specifications Grommet D-F9, D-F9V (with indicator light) D-F9N D-F9NV D-F9P D-F9PV D-F9B Perpendicular D-F9BV Auto switch part no.

Vacuum System Peripherals:

ZZYX3 45 F J Common specifications Ejector mounting position Positive common Negative common Nil N U side D side U D SUP/EXH block assembly specifications Mounting position of connector Standard, Internal pilot specifications External pilot specifications Number of ejectors 1 to 10 stations Nil R S RS U side D side U D Voltage specifications Internal pilot, Built-in silencer External pilot