IDX-OM-W025

Service Record 14 Service Record 14-1 Service Record It is recommended to keep a maintenance/service record.

Air Slide Table Series MXJ

Reed Auto Switch: D-A9 (mm) Stroke B A Stroke C Stroke Model 5 10 15 20 5 5 10 10 15 15 20 20 MXJ4 MXJ6 MXJ8 9 4 14 0.5 14 0.5 3 9 4 14 0.5 14 0.5 18 -0.5 10 5 25 0.5 9 4 14 -0.5 14 -0.5 25 0.5 Solid State Auto Switch, 2-Color Indication Solid State Auto Switch: D-M9, D-M9W (mm) Stroke B A Stroke C Stroke Model 20 15 10 5 20 15 10 5 15 20 10 5 MXJ4 MXJ6 MXJ8 4.5 4.5 18 18 8 13 7 3.5

3 Port Solenoid Valve/

A B C D E F G H J K Y300T-A 4.2 82 41 71.5 35 14 7 19 4 41 Y400T-A 5.2 96 48 86.1 40 18 9 26 5 50 Ordering Example Dual residual pressure release valve with soft start-up function VP544-5DZ1-03-X538 1 pc. Filter regulator AW30-03G-A 1 pc. Spacer with bracket Spacer with bracket Y300T-A 3 pcs. Piping adapter E300-03-A 2 pcs. Each product is not assembled.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

Port size ASV Model M3 x 0.5 ASV120F-M3 0.3 0.3 AK M5 x 0.8 ASV220F-M5 1.3 1.3 R 1/8 ASV310F-01 8 7 ASS R 1/4 ASV310F-02 8 7 R 1/8 ASV410F-01 14 13.5 ASR R 1/4 ASV410F-02 14 13.5 R 3/8 ASV410F-03 14 13.5 ASF R 1/4 ASV510F-02 27 23 R 3/8 ASV510F-03 29 27 R 1/2 ASV510F-04 29 27 10-32 UNF ASV220F-U10/32 1.3 1.3 NPT 1/8 ASV310F-N01 8 7 NPT 1/4 ASV310F-N02 8 7 NPT 1/8 ASV410F-N01 14 13.5 NPT 1

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

35 7 61 86.5 39 23 14 35 7 61 B C D E F G H Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 ZH05BS-01-01 ZH05BL-01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-01-01 ZH05BL-01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 57 12 3.2

Process Valve

Model Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U VNB2-10A VNB2-15A VNB3-20A VNB4-25A 3 8 1 2 3 4 1 144.5 55 125.5 52 26 4.5 24.3 2.3 25 34 63 42 28 14 72.5 80.5 75 80 84.5 124 60.5 73 135.5 151.5 137 153 156 172 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 80 90 50 60 35 44 17.5 22 84 100 92 108 84 90 89 95 93.5 99.5 Port size: 10A, 15A, 20A, 25A Vacuum pilot K L N

5 Port Solenoid Valve, Series VQC

Example: OMRON Corporation XS2Z-12 4 1 Signal H CAN_H 4 Signal L CAN_L 5 Compatible with DeviceNet specification Micro Style connector.

Digital Gap Checker

[March 2018] H: Contents revised in several places. [June 2018] I: Contents revised in several places.

2/3 Port Valve for Various

Insulation oil A H Polyacetal Note 1) Note 1) Non-leak (10 6 Pam 3/s) Brake oil Water (up to 60C) B P A H Stainless steel Note 1) If using for other fluids, please contact SMC.

Digital Flow Switch (Integrated display type)

mA -83No.PF-OMM0005-N Dimensions PF3W704/720/740/711 Basic type Symbol Piping port size A AA B D E F G H J K L N P Model PF3W704 3/8 70 50 30 66 40.6 15.2 24 14 35 26 18 13.6 2.7 depth 14 PF3W720 3/8, 1/2 78 54 30 66 40.6 15.2 27 18 39 30 18 13.6 2.7 depth 12 PF3W740 1/2, 3/4 98 71 38 68 48.6 19.2 32 28 49 35 28 16.8 2.7 depth 12 PF3W711 3/4, 1 124 92 46 77 57.6 23 41 42 63 48 28 18 3.5

VHK

(mm) Model H Bracket mounting dimensions Q Weight (g) 1(P) R 2(A) 2(A) R 3(R)* L3 L4 L5 L6 M1 M2 L1 L2 Bracket assembly no.

OMR0032

. 14 (7) Test operation . 14 3.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

I J K L M N OO NN P Model 2-5.5 through 2-M4 x 0.7 thread depth 6 2-M5 x 0.8 thread depth 7.5 2-M5 x 0.8 thread depth 8 CXS20 64 25 62 23 50 28 6 12 12 30 10 M6 x 1.0 x 18.5l 53 11.5 2-M5 x 0.8 2-9.5 counterbore depth 5.3 2-6.9 through CXS25 80 30 78 28 60 35 6 12 12 30 12 M6 x 1.0 x 18.5l 64 14 2-M6 x 1.0 2-11 counterbore depth 6.3 2-6.9 through CXS32 98 38 96 36 75 44 8 16 14 30 16 M8 x

Electric Actuator / Low profile slider type

Fixing bolt (2pcs) Stroke adjusting unit LEMB LEMH/C LEMHT Recommended Model Bolt tightening torque [Nm] LEMB M4 1.5 LEMC/H/HT25 M3 0.63 LEMC/H/HT32 M4 1.5 -40- 6.4 Precaution on maintenance Warning 1. Turn off the power supply before maintenance and replacement of the product. [Maintenance frequency] Perform maintenance according to the table below.

Series MXP Precision Air Slide Table

Contents 6 2 pieces each of No.12 and 13 MXPJ6-PS 166 166 Precision Air Slide Table Series MXP Dimensions 6 MXPJ6 Scale:100% 4-M30.5, 3 deep 7 5 H 3 D B 18 10.05 3.5 16.5 14 13 20 6 6 F 6 5 2-M40.7 Bottom hole diameter 3.3 Piping port 13.5 2-M30.5 170.05 (Plug:M-3P) Base side for mounting B D M 1 Stroke : S 5 J Z 2.4 Piping port 2-M30.5 (mm) Model F H J M S Z MXPJ65 25 38 27 37 5 44 MXPJ6

Compact Rotary Actuator

A u t o s w i t c h A u t o s w i t c h s p e c i f i c a t i o n A u t o s w i t c h i n s t a l l a t i o n A u t o s w i t c h s e t p o s i t i o n I n t e r n a l s t r u c t u r e a n d o p e r a t i o n p r i n c i p l e C u s h i o n s M a i n t e n a n c e I n s p e c t i o n P e r i o d i c i n s p e c t i o n D i sassem ble and reassem bl e C a u t i o n o f d i

IDX-OM-W094

ANR) 1.00 0.89 0.80 256 m 3/h(ANR) 7.2 GWP (GWP) GWP Regulation (EU) No 517/2014 Regulation EU No 517/2014 (IPCC AR4 ) IPCC AR4 R410A 2,088 2,090 2,088 2,090 R410A 1 IDFA60/70/80/90 Series 7-2 IDX-OM-W094 7.3 Port size Compressed air inlet Compressed air outlet Port size A B E D G F C P J M N H K O L mm A B C D E F G H J K L M N O P IDFA60 R1 307 745 605 161 405 681 94 71 46 12.5

Lubrication Equipment

Mounting orientation is Upper direction Model Port size Rc(PT) 63 63 80 85 90 100 B C A INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 1/4 141 164.5 170 180 230 251 15 15 15 20 22 22 3/8 1/4, 1/2 3/8, 3/4 3/4, Bracket dimensions Model Port size B C D E A 1 F 345 419.2 K 57 49.6 J 14 14 H 95 120 G 32.5 0 1 1 1 1 2 4, 1 2, 1 175 250 175 250 87.5 125 460 613 135 209 4, 3 ALD600

Lubricator Series AL10 to 60

maintenance (mm) With bracket B With float switch B 374 383 383 382 385 C E Model Port size H 25 18 16 35 35 P 47 47 AL30 AL40 AL40-06 AL50 AL60 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 324 333 333 332 335 38 40 38 41 45 53 70 75 90 95 14-2-65

Series KC Self-seal Fittings

Female connector elbow union: KBL T Connecting thread Weight (g) H (Hex.) 14 Part No.