,

connector 15.5 (12-, 14 port) 9 (2-, 4 port) 74.5 66.5 8.5 PE port 23 13.5 SMC 16 16 M5-2 ports 12, 14 port 1/8-2 ports 2, 4 port 1/8 1 port 1/8-2 ports 3, 5 port EVS1-02-FG-D-M0 EVS1-02-F G-D-M0 H J I 136 149 68 21.5 (14 port) 68 21.5 (12 port) 21.5 (14 port) 21.5 (12 port) 8.5 (4 port) 8.5 (2 port) 8.5 (4 port) 8.5 (2 port) 14 4 2 12 14 4 2 12 12 12 25 34 34 18 18 25 14 14 Indicator light

,

connector 15.5 (12-, 14 port) 9 (2-, 4 port) 74.5 66.5 8.5 PE port 23 13.5 SMC 16 16 M5-2 ports 12, 14 port 1/8-2 ports 2, 4 port 1/8 1 port 1/8-2 ports 3, 5 port EVS1-02-FG-D-M0 EVS1-02-F G-D-M0 H J I 136 149 68 21.5 (14 port) 68 21.5 (12 port) 21.5 (14 port) 21.5 (12 port) 8.5 (4 port) 8.5 (2 port) 8.5 (4 port) 8.5 (2 port) 14 4 2 12 14 4 2 12 12 12 25 34 34 18 18 25 14 14 Indicator light

SYJ Series

DC12V 12V SY100-61-3-06 AC100V 100V SY100-61-2-01 Type D DIN connectors have the N indication at the end of rated voltage symbol. (For DIN connectors without lights, N is not indicated. Please refer to the name plate to distinguish.) AC200V 200V SY100-61-2-02 AC110V 110V SY100-61-2-03 Dimensions are the same as type D DIN connector.

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

(Example) SS3YJ7-20-03 . 1 set (manifold base) SYJ712-5LZ-01 . 2 sets (valve) SYJ700-10-1A . 1 set (blanking plate assembly) SS3YJ7-42R-03-01 . 1 set (manifold base) SYJ714R-5G . 2 sets (valve) SYJ700-10-2A . 1 set (blanking plate assembly) The asterisk denotes the symbol for assembly.

9.8

w, and then fit claw 2 of the product horizontally until it clicks. e Claw 2 q When selecting other fittings, check that there is no interference with surrounding equipment and enough space for maintenance.

LX Series Compact Electric Actuators

91) connection examples 3 wire NPN/AND connection 3 wire NPN/OR connection 2 wire 2 pcs-/AND conneclion 2 wire 2 pcsJOR conneclion o o When 2 swilches are connecied by ANO, load vollage willdecrease at ON and these connections may cause malfunction of load. Indication lights up when bolh swilches are ON.

CYV

6 $2 #2 !3 #3 !7 !2 @5 @4 r @3 e @6 @1 @2 #1 t y $1 u w q E' Section E-E' CYV32 t !9 $0 @1 @2 y @4 @3 u @6 #9 @5 Description Material Note Parts list Description Material Note No. No.

ZSE30/ISE30

supply voltage of 24V Minimum load impedance: 50 Voltage output Analog output Note 3) Current output Hysteresis mode Hysteresis Variable Window comparator mode 3 1/2-digit, 7-segment indicator, 2-color display (red and green) Sampling cycle: 5 times/s 2% F.S. 2 digits (25C) 2% F.S. 1 digit (25C) Lights up when output is ON (Green) 2% F.S. or less (based on 25C) IP40 Operating: 0 to 50C;

Vacuum Pad with Ejector

Description Note 1 Stud 2 Strainer Mesh size: 100 mesh 3 Mounting bracket 4 Lock nut 2 pcs. included for male thread mounting (Not included for female thread mounting) 7 Lock plate Replacement Parts No. Description Part no.

VQ4000

SY SYJ 0 VQ4 0 1 Plug-in SX 2 5 VQ4 1 Plug lead VK VZ Enclosure Configuration Dust-proof 2 position single 3 position closed center VF (A) 4 (B) 2 (A) 4 (B) 2 Dust tight, jet proof (Applicable to IP 65) W 3 1 VFR 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Manual override 2 position double 3 position exhaust center (A) 4 (B) 2 (A) 4 (B) 2 VP7 Metal Rubber B: Locking slotted style : Non-locking

Plate Cylinder with Lock Series MLU

Switch 1 Relay contact Blue Brown Brown Brown Relay Black Blue Black Black Switch 2 Switch 2 Switch 2 Blue Blue The indicator lights will light up when both switches are turned ON. 2-wire with 2 switch AND connection 2-wire with 2 switch OR connection (Reed switch) Because there is no current leakage, the load voltage will not increase when turned OFF.

212

Applicable model LVR20 LVR40 LVR50 03 3 x 2 LVR20 LVR40 LVR50 03 1/8" x 0.086" 04 4 x 3 05 3/16" x 1/8" 06 6 x 4 07 1/4" x 5/32" 10 10 x 8 11 3/8" x 1/4" 12 12 x 10 13 1/2" x 3/8" 19 19 x 16 19 3/4" x 5/8" LQ3 Metric size Inch size Symbol Applicable tubing size Applicable model Symbol Applicable tubing O.D.

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

Note 3) Includes one O-ring and 2 mounting screws. [ ]: Pressure gauge cover only. Note 4) Lead wire with connector (2 m), adapter, lock pin, O-ring (1 pc.), and mounting screws (2 pcs.) are included. [ ]: Switch body only.

Pressure Relief 3 Port Valve With Locking Holes

Under the New Measurement Law, products for overseas use only (SI unit type for use in Japan). 02 1/4 X X X 03 3/8 X X 04 1/2 X 06 3/4 X X Options 10 1 X Nil B With bracket Handle / Bonnet material S Built-in Silencer (EXH port) A Flame resistant PBT B: Packed together S: Assembled for shipping B Aluminum 7 - (2) Double action type VHS 4 510 04 A BS Double Action Made to Order Body size

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Note 3) Includes one O-ring and 2 mounting screws. [ ]: Pressure gauge cover only. Note 4) Lead wire with connector (2 m), adapter, lock pin, O-ring (1 pc.), and mounting screws (2 pcs.) are included. [ ]: Switch body only.

Regulator Valve

Option Rated voltage Voltage symbol Part no. 100 VAC 100V VK300-82-2-01 110 VAC 110V VK300-82-2-03 200 VAC 200V VK300-82-2-02 Note) When requiring a gauge different than that mentioned above, specify the model number. 220 VAC 220V VK300-82-2-04 Option is packed with it.

AMPSeries

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

Exhaust Cleaner for Clean Rooms AMP Series

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

CKZ2N

2 Cover cap screw q Switch actuator Note 2) CKZN-D050 !0 Socket head cap screw o Spring washer r Bumper w Stopper bolt 50 Note 2) CKZN-B050 !1 Seal washer Note 2) CKZN-K050 CKZN-D050 CKZN-B050 !3 Short head cap screw !4 q Switch actuator Note 2) CKZN-D063 !

Moisture Control Tube

(ANR) Nominal filtration rating (m) Port size 0.3 (Filtration efficiency 99.9%) 300 to 12000 AM 1/8 to 2 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2009 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer