SI unit for EtherNet/IP TM

Colour on the feed holes Cable colour Signal Cable O.D. 4.0 to 8.0 mm Electric wire cross section (Twist line) AWG26 to 22 YE=Yellow or OGWH=Orange/ White 1 Orange/ White TD+ WH=White or GNWH=Green/ White 2 Green/ White RD+ 3 Orange OG=Orange TD4 Green BU=Blue or GN=Green RD-40No.EX-OMP0013-E (3) Cable with communication connector Part number: EX9-AC 01 0EN-PSRJ Cable length (L) 01 1000 [

ARX Series

/4 Piping port size NPT 1/8, 1/4 Pressure gauge port size 435 (3.0) Proof pressure psig (MPa) 290 (2.0) Maximum operating pressure psig (MPa) ARX20-N02 7~120 (0.05 to 0.85) Standard Regulating pressure range psig (MPa) 7~45 (0.05 to 0.3) Low pressure Fluid Air ARX20-N01BG Ambient and fluid temperature 23~140F ( 5 to 60C) (with no freezing) Weight lbs (Kgf) .24 (0.11) How to Order ARX2 0 01

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

Load factor: ((Load weight x 9.8) /Theoretical force) x 100% Note) 2 position single, 4/2 5/3 (A/B R1/R2) Conditions Base mounted Series CJ2 Series CM2 Series MB/CA1 TO604 x 1 m Tube x Length SQ1000 Speed controller AS3001F-06 Silencer AN110-01 Tube x Length T0604 x 1 m T1075 x 1 m T1209 x 1 m Speed controller AS4001F-10 AS3001F-06 SQ2000 Silencer AN200-02 2-3-1 2 Series SQ1000/2000 Precautions

SY3000/5000/7000/9000

5 Port Solenoid Valve Body Ported/Single Unit Series SY3000/5000/7000/9000 How to Order 5 L SY 5 1 20 01 Series Bracket 3 SY3000 5 SY5000 Nil: Without bracket F1: With foot bracket A, B port size Thread piping 7 9 SY7000 SY9000 2 position single only Symbol Port size M5 x 0.8 SY3000 Applicable series M5 1 8 01 SY5000 1 4 SY7000 02 02 03 Type of actuation Coil specifications 1 4 Standard Nil

Body Size: 20, Backflow: without Backflow Function, Thread: N (NPT), IN Port Size: 01 (1/8), OUT Port Size: 01 (1/8), Options: H (w/Set Nut, for Panel Mount), Set Pressure: 1 (0.02 to 0.2 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Downward, Pressure Unit: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

VER2000/4000

AXT503-23A G36-10-01 AXT510-32A G36-10-01 Flow control interface Pressure gauge Model Selection Applicable cylinder bore size: 25 to 125 For model selection, refer to Selecting Electro-pneumatic Proportional Valve on page 706. 704 Series VER2000/4000 5 Port Electro-Pneumatic Proportional Valve How to Order Port size Nil Without sub-plate 02 03 1 4 3 8 ARJ VER2000 02 Series VER2000 AR425

AZ1000

Single Stage Regulator for Ultra High Purity Low to intermediate flow Series AZ1000 For UHP gas delivery High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity Standard: to 30 slpm HF (option): to 120 slpm Body material: 316L SS Hastelloy internals available for corrosion resistance How to Order Port Number q w e r AZ10 S FV4 FV4 01 2PW Delivery pressure Delivery pressure 1 to

Compact Direct Operated 2 Port Solenoid Valve for Water and Air SeriesVDW10/20/30 VX2 How to Order Valves (Single Unit) VXD VD W 2 1 1 G 2 01 VXZ For Water, Air, Vacuum VXE Made to Order (Refer to page 244.) Series VXP 1 10 Valve type Option 2 20 VXR

Compact Direct Operated 2 Port Solenoid Valve for Water and Air SeriesVDW10/20/30 VX2 How to Order Valves (Single Unit) VXD For Water, Air, Vacuum VD W 2 1 1 G 2 01 VXZ VXE Made to Order (Refer to page 244.) Series VXP 1 2 3 10 N.C.

Note) CE compliant: Electrical entry is applicable only for the DIN terminal. [Option] 3 Port Solenoid Valve Direct Operated Poppet Type Series VT307 Rubber Seal

How to Order 307 5 F G 1 V T 01 Body type T O Body ported For manifold CE-compliant Valve option Nil Q None CE-compliant Nil E Y V W Standard type Continuous duty type Energy-saving type Vacuum specification type Electrical entry and light/surge voltage suppressor: D/DO/DZ/DOZ only Bracket Nil F None With bracket Energy-saving type, Vacuum specification type Semi-standard Pressure specifications

PFM7

Port size Instruction manual Symbol Description Flow rate range 10 With instruction manual (Leaflet: Japanese and English) None Nil N 25 50 11 01 02 N01 N02 F01 F02 C4 C6 C8 N7 Rc1/8 Rc1/4 NPT1/8 NPT1/4 G1/8 G1/4 Unit specification With unit switching function M Nil Fixed SI unit Note) Note) Fixed unit: Real-time flow rate: l/min Accumulated flow: l 4 (5/32") one-touch fitting 6 one-touch

Body Size: 2 (1/8, 1/4), Type: 2 (Elbow), Control Type: 0 (Meter-out), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: N (NPT), Port Size: 01 (1/8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 01 (ø1/8), Sealant: without Sealant, Push lock: A (Push-lock)

Body Size: 2 (1/8, 1/4), Type: 2 (Elbow), Control Type: 0 (Meter-out), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: N (NPT), Port Size: 01 (1/8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 01 (ø1/8), Sealant: S (with Sealant), Push lock: A (Push-lock)

Body Size: 2 (1/8, 1/4), Type: 2 (Elbow), Control Type: 0 (Meter-out), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: N (NPT), Port Size: 01 (1/8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 01 (ø1/8)

Body Size: 2 (1/8, 1/4), Type: 2 (Elbow), Control Type: 0 (Meter-out), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: N (NPT), Port Size: 01 (1/8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 01 (ø1/8), Sealant: S (with Sealant)

Body Size: 2 (1/8, 1/4), Type: 2 (Elbow), Control Type: 1 (Meter-in), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: N (NPT), Port Size: 01 (1/8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 01 (ø1/8)

Body Size: 2 (1/8, 1/4), Type: 2 (Elbow), Control Type: 1 (Meter-in), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: N (NPT), Port Size: 01 (1/8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 01 (ø1/8), Sealant: S (with Sealant)

Body Size: 2 (1/8, 1/4), Type: 3 (Universal), Control Type: 0 (Meter-out), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: N (NPT), Port Size: 01 (1/8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 01 (ø1/8)

Body Size: 2 (1/8, 1/4), Type: 3 (Universal), Control Type: 0 (Meter-out), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: N (NPT), Port Size: 01 (1/8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 01 (ø1/8), Sealant: S (with Sealant)

Body Size: 2 (1/8, 1/4), Type: 3 (Universal), Control Type: 1 (Meter-in), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: N (NPT), Port Size: 01 (1/8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 01 (ø1/8)

Body Size: 2 (1/8, 1/4), Type: 3 (Universal), Control Type: 1 (Meter-in), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: N (NPT), Port Size: 01 (1/8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 01 (ø1/8), Sealant: S (with Sealant)