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L ZY O L ZF G H F ZP K J SP ZCUK B C E D I A 2 x 4.5 AMJ AMV AEP HEP Related Equipment A B C D E F G H I J K L Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC051-01 ZFC051-03 58.5 12.75 12.75 2 3.2 33 25 10 10.5 10.5 12 8.5 13.75 4 58 12.5 12.5 1/8" 5/32" ZFC100-04 4 ZFC100-06 6 30 10 18 11.6 19.5 23 20 29 53.2 9.1 14.1 ZFC101-03 5/32" ZFC101-07 1/4" ZFC200-06 6 ZFC200-08 8 34 14 22 15.6 23.1 27

Allowable kinetic energy (mJ) Adjustable rotation time range that ensures stable operation (s/90) Size 32 40 0.2 to 1 23 0.2 to 1 28 Formula of moment of inertia is subject to load shape. Refer to the moment of inertia formula on page 11-10-3. 2.

LX N NA NN P S Bore size (mm) D20 41 21 8 8 13 55 20 18 8 40 4 25 40 62 15.5 13 26 5 8 28 5 6.8 102 3.2 M8 x 1.25 15 24 M20 x 1.5 1/8 131 25 45 25 8 8 13 55 20 22 10 47 4 28 40 62 19.5 17 32 6 8 33.5 5.5 6.8 102 3.2 M10 x 1.25 15 30 M26 x 1.5 135 1/8 -X 32 45 25 8 8 13 55 20 22 12 47 4 28 40 64 19.5 17 32 6 8 37.5 5.5 6.8 104 3.2 M10 x 1.25 15 34.5 M26 x 1.5 137 1/8 40 50 27 11 10 16 75 23

After replacing the actuator, be sure to conduct a test run before actually using the product. 8-16-23

(When power is supplied) 21 22 System error. 23 Internal component has failed. -90No.EX-OMO0027-A Digital input unit (EX600-DX), Digital output unit (EX600-DY) Table.

SI 2 16 16 Valves32 32 Valves 2 4 D 012 31 Byte 16 Valves 32 Valves 0 Valve coils 0-7 Valve coils 0-7 1 Valve coils 8-15 Valve coils 8-15 2 Valve coils 16-23 3 Valve coils 24-31 . 6-3 39 No.EX-OMW0014CN-A 6.4.

No.PF-OMN0009CN-F () / / PF3W5## SMC 2 11 14 15 16 17 19 22 23 24 25 28 28 32 40 41 48 -1No.PF-OMN0009CN-F (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218

Fig. 3-17 Wiring for cable communication (400V) HRLE Series 3.3Installation Procedure 3-23 HRX-OM-Z002 Chapter 3 Transport and Set Up 3. Turn on the breaker switch located on the back of the product. ON Fig. 3-18 Powered 4. Attach the power supply terminal cover using 4 screws.

22 21 20 High temp. cut off alarm ERR12 Low temp. cut off alarm ERR13 Unused Output failure alarm ERR15 D2 23 22 21 20 Upper temperature limit alarm WRN Lower temperature limit alarm WRN Thermostat alarm ERR14 DC power supply failure alarm ERR11 D3 23 22 21 20 External sensor failure alarm ERR18 Internal sensor failure alarm ERR17 During Auto tuning or auto tuning warning ERR19 Flow switch

13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 51 Revision history G: Revise Safety Instructions.

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

(g) Size 1 2 3 7 Basic Type 75 105 150 250 High precision Type 80 115 165 265 * Values excluding the weight of auto switch Effective torque 0.8 7 Effective torque (Nm) 0.6 3 0.4 2 0.2 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Operating pressure (MPa) 19 - Internal construction and parts MSQ1 to 7 20 11 18 12 17 23 21 2 24 7 1 15 14 13 6 14 15 24 5 10 9 16 22 8 4 3 19 24 O ring 4 23 Hexagon socket set

MRQB32,40 18 1 17 2 16 2 34 2 15 1 33 O 1 14 1 32 4 13 2 31 2 12 O 1 30 1 11 2 29 1 10 1 28 S 1 9 1 27 S 1 8 O 2 26 1 7 1 25 2 6 1 24 4 5 1 23 4 4 1 22 4 3 1 21 O 3 2 1 20 O 1 1 1 19 1 12 14 2 28 1 13 2 27 1 12 4 26 1 11 1 25 R 1 10 1 32 24 2 9 2 23 2 8 4 22 8 7 1 21 2 6 2 20 2 5 1 19 2 4 1 18 O 4 3 1 17 O 4 2 1 16 4 1 1 15

5-4. . 23 5-5. . 23 5-6. . 24 6. . 24 1 - (ISO/IEC)(JIS)*1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960

Please download this software from our website. http://www.smcworld.com/ Contents Safety Instructions . 3 Precautions for product specific . 5 Outlines of Product . 23 . System configuration example . 23 . Features . 24 . How to Order . 25 . Specification Table . 26 . Construction . 27 . Accessories . 28 Installation and Initial Setting . 29 .

Please download this software from our website. http://www.smcworld.com/ Contents Safety Instructions . 3 Precautions for product specific . 5 Outlines of Product .23 . System Construction Example . 23 . Features . 24 . How to Order . 25 . Specification Table . 26 . Construction . 27 . Accessories . 28 Installation and Initial Setting .29 .

LEC-OM08003 // LEC-T1 Series LEC6 LECPA TB Ver2.1 .5 .7 1. .9 1.1 .9 1.9 2.10 1.2 .11 1.11 2. .12 3. .13 3.1 .13 (1).13 (2)Tree .13 3. .14 (1).14 (2)Tree .15 4.16 5. .17 5.1 .18 5.2 .19 (1).19 (2).19 5.3 .20 (1).21 (1-1) LECPLECA 22 (2) .23 (2-1) LECPLECA 23 (2-1-a) TB Ver1.**. 23 (2-1-b) TB Ver2.**. 25 (2-2) LECPLECA 27 (2-2-a) TB Ver1.**. 27 (2-2-b) TB Ver2.**. 29 (2-3) LECPLECA .32 1

INP (31)(28)(23)(20)(15)(12)(7)(4) Start to move to the position set in Step No.3. BUSY (32)(29)(24)(21)(16)(13)(8)(5) (19) Step No.3 is turned ON. (OUT1 and OUT0 are turned ON) Note) (20) INP is turned OFF. (21) BUSY is turned ON. (22) The DRIVE is turned OFF. Flow chart (Reference) (23) INP is turned ON. (1) Select Step No.1. (Turn IN0 ON.) (24) BUSY is turned OFF.

Controller and its peripheral devices / Specific product precautions 23 10.1 Design and selection 23 10.2 Handling 24 10.3 Installation 25 10.4 Wiring 25 10.5 Power supply 25 10.6 Grounding 26 10.7 Maintenace 26 2 No.JXC-OMW1019-A LECP6 Series / Controller 1. Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

External Wiring Diagram . 22 4.1 CN1: Power connector . 22 4.2 CN2: Motor power connector and CN3: Encoder connector . 22 4.3 CN4: Serial I/O connector . 22 1 - (1) Connection with the teaching box . 22 (2) Connection with a PC . 23 4.4 CN5: Parallel I/O connector . 23 5.