Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 01 (Screw-in Rc 1/8), VAC: 01 (Screw-in Rc 1/8), EXH: 01 (Screw-in Rc 1/8), Accessories: N (w/o Bracket, w/o Silencer)

Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 01 (Screw-in Rc 1/8), VAC: 01 (Screw-in Rc 1/8), EXH: 01 (Screw-in Rc 1/8)

20.0

Ground wire (1.5 m)/Accessories IZH-A-01 High-voltage measuring handle/Option IZH-C-01 Soft case/Accessories IZH-B-01 High-voltage measuring handle Ground wire Soft case Note) Be sure to use a high-voltage measuring handle in situations such as during high-voltage measurement when there is a possibility of personnel coming in contact with electricity.

VXA31/32

LVQ 1 (1.5 mm) 2 (2.2 mm) 3 (3 mm) 4 (4 mm) VXA31 VXA32 LQ 01 ( ) 1 8 02 ( ) 1 4 02 ( ) 1 4 03 ( ) 3 8 LVN TI/ TIL Ordering example (Example) Series VXA31, Orifice size 1.5 mm, Rc 1/8 (Part no.) VXA3114-01 PA PAX PB 17-3-103 The VX series will be revised shortly.

Size: 2 (1/4 Basis), Construction: 0 (Diaphragm Style), Basis: 0 (M5X0.8), Thread: F (G), Port Size: 02 [Rc(PT) 1/4], Temperature Option: H (High Temperature, -5 to 80°C)

Size: 2 (1/4 Basis), Construction: 0 (Diaphragm Style), Basis: 0 (M5X0.8), Thread: N (NPT), Port Size: 01 [Rc(PT)1/8], Temperature Option: H (High Temperature, -5 to 80°C)

Size: 2 (1/4 Basis), Construction: 0 (Diaphragm Style), Basis: 0 (M5X0.8), Thread: N (NPT), Port Size: 02 [Rc(PT) 1/4], Temperature Option: H (High Temperature, -5 to 80°C)

Size: 2 (1/4 Basis), Construction: 0 (Diaphragm Style), Basis: 0 (M5X0.8), Thread: Rc(PT), Port Size: 02 [Rc(PT) 1/4], Temperature Option: H (High Temperature, -5 to 80°C)

Type: Quick Exhaust Valves, Body Material: Aluminum Diecast, Adhesive Material: Nitrile Rubber, Input Side, Port Type P (P1): Female Thread, Output Side Port Type A: Female Thread, Exhaust Side Port Type R: Female Thread, Connection Dia.: 1/4, Types of Screw: Rc, Sonic Conductance IN -> OUT [dm3/(s/bar)]: 7, Option: High-Temperature Specification

Type: Quick Exhaust Valves, Body Material: Aluminum Diecast, Adhesive Material: Nitrile Rubber, Input Side, Port Type P (P1): Female Thread, Output Side Port Type A: Female Thread, Exhaust Side Port Type R: Female Thread, Connection Dia.: 1/4, Types of Screw: G, Sonic Conductance IN -> OUT [dm3/(s/bar)]: 7, Option: High-Temperature Specification

Type: Quick Exhaust Valves, Body Material: Aluminum Diecast, Adhesive Material: Nitrile Rubber, Input Side, Port Type P (P1): Female Thread, Output Side Port Type A: Female Thread, Exhaust Side Port Type R: Female Thread, Connection Dia.: 1/8, Types of Screw: NPT, Sonic Conductance IN -> OUT [dm3/(s/bar)]: 5, Option: High-Temperature Specification

Type: Quick Exhaust Valves, Body Material: Aluminum Diecast, Adhesive Material: Nitrile Rubber, Input Side, Port Type P (P1): Female Thread, Output Side Port Type A: Female Thread, Exhaust Side Port Type R: Female Thread, Connection Dia.: 1/4, Types of Screw: NPT, Sonic Conductance IN -> OUT [dm3/(s/bar)]: 7, Option: High-Temperature Specification

PFxx-OMX0002

to 6000 L/min 120 to 12000 L/min Instantaneous flow 30 to 3150 L/min 60 to 6300 L/min 120 to 12600 L/min Set point range Accumulated flow 0 to 999,999,999,990 L 0 to 999,999,999,900 L Flow specifications Instantaneous flow 2 L/min 5 L/min 10 L/min Minimum resolution Accumulated flow 10 L 100 L Accumulated volume per pulse (Pulse width = 50 msec.)

Air Cylinder

159 + l 150 172 + l 136 158 + l 149 171 + l 32 141 163 + l 156 178 + l 141 163 + l 156 178 + l 40 164 184 + l 182 202 + l 159 (168) 179 (188) + l 177 (186) 197 (206) + l 50 190 210 + l 210 230 + l 185 (197) 205 (217) + l 205 (217) 225 (237) + l 63 195 215 + l 217 237 + l 190 (202) 210 (222) + l 212 (224) 232 (244) + l 80 236 245 + l 254 263 + l 230 (244) 239 (253) + l 248 (262) 257 (277)

3

Sensor Flow range 0.5 L/min 2 L/min 5 L/min 20 L/min 40 L/min 250 L/min 140 L/min 100 L/min 350 L/min 0.5 L/min 4 L/min PF3W704 PF3W504 0.35 L/min 5.5 L/min 5.5 L/min 0.35 L/min 2 L/min 16 L/min PF3W720 PF3W520 1.7 L/min 1.7 L/min 22 L/min 22 L/min 5 L/min 40 L/min PF3W740 PF3W540 3.5 L/min 3.5 L/min 55 L/min 55 L/min 10 L/min 100 L/min PF3W711 PF3W511 7 L/min 7 L/min 140 L/min 140 L/min

Hydraulic

L (Example) A80CL None .

Digital Flow Switch

3000 L/min 6000 L/min 12000 L/min 30 L/min 3000 L/min PF3A703H 3150 L/min 30 L/min 0 L/min 3150 L/min 60 L/min 6000 L/min PF3A706H 6300 L/min 60 L/min 6300 L/min 0 L/min 120 L/min 12000 L/min 12600 L/min 12600 L/min PF3A712H 120 L/min 0 L/min Rated flow range Set point range Display range Analog Output Output Output Flow/Analog Output 0 L/min A*2 B Voltage output (1 to 5 V)*1 1 V 1.04 V

Refrigerated Thermo-chiller

Note 10) Mass in the dry state without circulating fluids. 80 Thermo-chiller Series HRZ Cooling Capacity HRZ001-L/002-L/004-L/008-L HRZ001-H/002-H/004-H/008-H 16 10 9 HRZ008-L HRZ008-H 14 Cooling capacity (kW) Cooling capacity (kW) 8 12 7 HRZ004-H 10 HRG HRGC HRZ HRW HEC HEB HED Technical Data Related Products 6 HRZ004-L 8 5 4 6 HRZ002-L 3 4 HRZ002-H 2 HRZ001-L 2 1 HRZ001-H 0 0 20 10 0 10

PFxx-OMX0007

(Displays 0 when the value is (Displays 0 when the value is below 10 L/min) below 20 L/min) 20 to 1050 L/min 40 to 2100 L/min 2.0 0 to 2%F.S. (Displays 0 when the value is (Displays 0 when the value is below 20 L/min) below 40 L/min) 30 to 1050 L/min 60 to 2100 L/min 3.0 0 to 3%F.S.

Digital Flow Switch ( compatible)

L/min Set flow range Instantaneous flow 5 to 525 L/min 10 to 1050 L/min 20 to 2100 L/min rate Accumulated flow 0 to 999,999,990 L Flow Instantaneous flow 1 L/min setting unit Min.