Main Body/Related Components: Main Body, Structure: Fixed, Orifice Format: Multi-Orifice, Operating Environment: Standard, Nominal Mounting Screw (M): 25, Body Material: [Steel] Rolled Steel, Maximum Absorbed Energy(J): 19.6, Stroke(mm): 8, Thread Nominal(mm): M25, Maximum Collision Velocity(m/s): 3, Overall length(mm): 52, Max.

Main Body/Related Components: Main Body, Structure: Fixed, Orifice Format: Multi-Orifice, Operating Environment: Standard, Nominal Mounting Screw (M): 25, Body Material: [Steel] Rolled Steel, Maximum Absorbed Energy(J): 19.6, Stroke(mm): 8, Thread Nominal(mm): M25, Maximum Collision Velocity(m/s): 3, Overall length(mm): 52, Max.

VDW30/40-XF

s2 / 90 m/s2 P7, P10 (Quick fastener) C4, C6, C8, C10 (One-touch fitting) Port size Orifice diameter 1, 3, 4.5, 6 Rated voltage 24 VDC, 12 VDC 10% of rated voltage Allowable voltage fluctuation Coil insulation type Class B 500 VDC, 10 M or more Insulation resistance Voltage limit 1800 VAC, 1 sec., 3 mA or less Simulation noise: 500 Vp-p (Based on 1 sec. pulse width, 50 10 Hz frequency noise

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Max. pressure 1 MPa 1.75 MPa Water resistance Insulation resistance 100 M (500 DC by megameter) 1500 VAC for one min. Withstand voltage Contact 1ab Port size 3/4, 1 Micro Switch Ratings Non inductive load (A) Inductive load (A) Load resistance Inductive load Light load Motor load Voltage N.C. N.O. N.C. N.O. N.C. N.O. N.C.

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

Auto switch model Lead wire length (m) Note 1) Applicable load Indicator light Yes Applicable model Load voltage Type Special function Electrical entry Wiring (Output) 0.5 Nil 3 (L) 5 Note 2) DC Perpendicular 10 16 20 25 In-line AC (Z) M9NV F8N M9PV F8P M9BV F8B M9N M9P M9B 3-wire (NPN) Solid state auto switch 5 V 12 V IC circuit Relay PLC 3-wire (PNP) 24 V Grommet 2-wire 12 V Note

CV/MVGQ

MXW MXP Grommet, L/M plug connector With light (lZ) MG MGP MGQ MGG MGC MGF CY1 MY1 3.5-5

AFF

Compressed air 1.0 MPa Fluid Max. operating pressure Min. operating pressure 0.05 MPa 1.5 MPa Proof pressure Ambient and fluid temperature Filtration degree Element life 5 to 60C 3 m (95% particle size collection) 2 years (1 year for A type) or when pressure drop reaches 0.1 MPa 0.1 MPa (N.O. type) or 0.15 MPa (N.C. type) in the case of types with auto-drain.

High Power Cylinder Series RHC

Load voltage Lead wire length (m) Auto switch model DC AC Indicator light Special function Wiring (output) Electrical entry Applicable loads Type Reed switch Solid state switch 0.5 (Nil) 3 (L) 5 (Z) None (N) Refer to Page 2 for part numbers of air cylinder mounting brackets other than the basic type. 3 wire (NPN equiv.)

5 Port Solenoid Valve Series SQ1000/2000

The solenoids are counted as Single : 1 point Double, 3P: 2 points Dual 3 port: 2 points Manifold mounting Symbol Mounting DIN rail mount type Direct mount type D E How to Order Valves 1 1 1 Y 5 B C6 Series SQ 3 Manifold block Specifications Without manifold block With manifold block With manifold block Built-in back pressure check valve Symbol Nil Note 1) SQ1000 SQ2000 1 2 M Note 2) Type

NARM Series

56) (16) (9) (18) (19) (52) (9) (11.5) (4.8) NARM2000 .18 1.36 1.69 1.10 1.06 2.76 .79 .45 .94 1.10 2.60 .45 .65 .19 (4.5) (34.5) (43) (28) (27) (70) (20) (11.5) (24) (28) (66) (11.5) (16.5) (4.8) Dimensions by number of stations Model Symbol A C E F G H J K M P NARM1000 L1 1.42 2.17 2.91 3.66 4.41 5.16 5.91 6.65 7.40 8.15 (36) (55) (74) (93) (112) (131) (150) (169) (188) (207) L2 1.06 1.81

Electric Actuator/Slider Type Motor Parallel Type Series LEFS LEFS16, 25, 32, 40 Step Motor (Servo/24 VDC) Servo Motor (24 VDC) ®

Only 1.5 m cables usable with open collector. 1 For details about controllers/driver and compatible motors, refer to the compatible controllers/driver below. 2 Only available for the motor type Step motor.

70pvvna

H (Conduit terminal: T) VXA I (DIN terminal: D) VN Main port Rc A H I J K L M R B F G N S C P T D Q U E Model LVC VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 52 2.3 42 26 25 28 4.5 34 14 72.5 80.5 74.5 79.5 82.5 124 125.5 142.5 24.3 55 LVA 60.5 73 1 80 90 84 100 92 108 62 72 2.3 2.3 50 60 31 36 30 35 35 40 5.5 6.5 43 49 17.5 20 83.5 89.5 88.5 94.5 91.5 97.5 135.5 151.5 137 153 154

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

W K G G Q + Stroke Z + Stroke (mm) Model B C CB D F G GP GW H HA HC HP HB HT K J x E A 10.5 181. 16.6 181. 5 33 31.5 32 30 171. 31 171. 2 4.2 171. 14 M5 x 0.8 x 7 12-CY3R15 19.5 19.5 21.6 191. 6 39 37.5 39 36 211. 38 241. 3 5.2 241. 11 M6 x 1 x 8 12-CY3R20 18.5 19.5 26.4 18.5 6 44 42.5 44 41 23.5 43 23.5 3 5.2 23.5 15 M6 x 1 x 8 12-CY3R25 10.5 111. 33.6 10.5 7 55 53.5 55 52 291. 54 291. 3

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

B Counterbore depth C T Y 0 -0.1 L Cylinder tube outer circumference: TC WP Hard chrome plated + special treatment X F GW 4 x LD GP D QW PW 2 x P (Piping port) 4 x 3.2 2 x 4 x MM Thread depth M W K Z + Stroke Q + Stroke WP G G 4 x 6.5 12-CY3R6 (mm) A 7 9 10.5 9 8.5 10.5 10 14 15 F 5.5 6.5 8 9 8.5 10.5 13 17 18 HC 18 25 31 38 43 54 66 84 96 HP 10.5 14 17 24 23.5 29 36 45 51 K 7 9 14 11 15

Process Valve

H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 144.5 55 125.5 52 42 26 29 4.5 14 24.3 72.5 2.3 80.5 25 75 34 80 84.5 124 135.5 151.5 137 153 156 172 60.5 73 1 80 90 62 72 50 60 31 36 35 40 5.5 6.5 17.5 20 28.3 33.3 84 100 2.3 2.3 92 108 30 35 84 90 43 49 89 95 93.5 99.5 Port

Steam Valve

G (Valve open) Q N R Pilot port 12(P1) Indicator (Option) 1 8 2 x (Back side 10(P2)) VNA P1 4 x P S VNB F U D E SGC Bracket (Option) A B 15 SGH VNC 1(A) (Back side 2(B)) Main port T C Port size: refer to table below A B VNH VND VND Main port 1(A), 2(B) A B C D E F G M N P Q R S T U Model VCC VND20D-10A VND20D-15A VND30D-20A VND40D-25A 3 8 1 2 3 4 1 63 42 28 14 73.5 81.5 4 52 26 4.5 24.3 2.3

Air Cooled Aftercooler Series HAA 1

The drain pipe must have a minimum pipe bore of 10 mm, and a maximum length of 5 m (when installing an optional auto-drain).

Series HAW Water Cooled Aftercooler 1

The drain pipe must have a minimum pipe bore of 10 mm, and a maximum length of 5 m (when installing an optional auto drain).

Fluoropolymer Piping Equipment

Basic size With reducer Refer to the pamphlet High-Purity Fluoropolymer Fittings Hyper Fitting/LQ1, 2 Series Work Procedure Instructions (M-E05-1) for connecting tubing and special tools. (Downloadable from our web site.)

A_HEC-OM-J017

Length of communication cable for RS-485 shall be limited to around 500[m] in total, and that for RS232C shall be 15[m]. If communication cable for RS-485 is longer, connect terminating resistance (220,1/2w) to each and terminal of the host computer and the farthest Thermo-con. 3) Turn on the power switch of Thermo-con. 4) Select communication types for all Thermo-cons.