17

Load voltage Wiring (Output) Auto switch model Lead wire length (m) Indicator light Electrical entry Pre-wired Type Special function connector Applicable load DC AC Perpendicular In-line 0.5 (Nil) 3 (L) 5 (Z) 1 (M) M9N M9P M9B M9NW M9PW M9BW M9NA1 M9NV M9PV M9BV M9NWV M9PWV M9BWV M9NAV1 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire Solid

VXD21/22/23

8 8 14 23 39 47 47 48 39 65 78 86 42 46 56 52 56 66 63 80 90 3 8 1 2 32.5 118 (136) 17.5 23 39 45.5 3 4 VXD2150 VXD2260 1 VXD2152 VXD2262 36.5 133 (150) 20 25.5 41.5 49.5 ( ): N.O. 17-3-40 9 Series VXD21/22/23 Pilot Operated 2 Port Solenoid Valve For Air, Gas, Water and Oil The VX series will be revised shortly.

Fluoropolymer Piping Equipment

Page 4 6 8 10 12 19 1/8" 3/16" 1/4" 3/8" 1/2" Material: Super PFA LQHB LQHB TL TIL TL TIL TL Metric Size TLM TILM TLM TILM P.948 TD TID TD TID TIL Inch Size TH TIH TH TIH Material: PFA 2, 3, 4, 6, 8, 10, 12, 16, 19, 25 TLM Metric Size From page 949 1/8", 3/16", 1/4", 3/8", 1/2", 3/4" 1", 1 1/4" TILM Inch Size 4 6 8 10 12 1/8" 3/16" 1/4" 3/8" 1/2" 4 6 8 10 12 1/8" 3/16" 1/4" 3/8" 1/2" 3/4"

VP3145/3165/3185

How to Use DIN Terminal 3. Assembly 1) Terminal block (3) connected with housing (4) should be reinstated.

VXA21/22

ports are Rc(PT) 3/8.

CU

Special function Type Electrical entry Wiring (output) Indicator light Applicable load 0.5 (Nil) 3 (L) 5 (Z) DC AC Perpendicular In-line 5V 12V IC circuit 100V or less Reed switch Solid state switch A90 No A90V Relay PLC 2-wire 24V Grommet 12V A93 100V A93V Yes 3-wire (NPN equiv.) 3-wire (NPN) 3-wire (PNP) IC circuit 5V A96 A96V F9N F9NV IC circuit 5V 12V F9P F9PV 2-wire 12V F9B F9BV

Dedicated Controller

Contact pin (preassembled) N 3 Terminal Pin no.

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

x 10 -3 kgm 0.04 8 I = 0.5 x = 0.1 x 10 -3 kgm I = (1.04 + 1.25) x 10 -3 = 2.29 x 10 -3 kgm Gripper: I 17 Rotary Actuator Technical Data 3 Air Consumption Air consumption is the volume of air which is expended by the rotary actuator's reciprocal operation inside the actuator and in the piping between the actuator and the switching valve, etc.

Wedge Cam Operation Gripper Series MHK2

Lead wire: In-line entry Lead wire: Perpendicular entry L L L Unit: mm In-line Perpendicular Lead wire Auto switch Finger position Air gripper D-F9BV D-F9B D-F9NV D-F9N D-F9BA Open 2 7 MHK2-12 Closed 7 3 12 Open 2 6 MHK2-16 Closed 8 1 1 3 13 Open 1 MHK2-20 Closed 5 1 11 Open MHK2-25 Closed 6 2 12 Open 3 MHKL2-12 Closed 3 7 12 Open 1 MHKL2-16 Closed 1 1 3 8 13 Open MHKL2-20 Closed

Pin Clamp Cylinder Series CKQ/CLKQ

3 u q !9 y @7 @0 @6 @5 @4 Auto switch !8 @1 @2 !6 !1 @3 !7 !0 !5 !

Series SY100 3 Port Solenoid Valve Rubber Seal

Station L 2 20.5 3 31 4 41.5 5 52 6 62.5 7 73 8 83.5 9 94 10 104.5 2.1-12 Series SY100 31 Type Manifold: Top Ported/SS3Y1-31Station Grommet (G), (H) 11.5 P=10.5 (Pitch) n-M3 X 0.5 (A port) 27.5 5 Manual override SY 3 5 G: 300 H: 600 SYJ 28 (In case of DC) R R 9 (Lead wire length) 15.6 34.5 (In case of AC) 21.5 10 25 VK P P + + + + + VZ 4-M5 X 0.8 (P/R port) VT L2 3 2-3.5 (Mounting holes)

VXA21/22

8 17-3-104

HEC-OM-S008

CONTENTS 1 Preparation for Communication . 1-1 2 Specifications of Communication Method . 2-1 3 Communication Format (same as current HEC series) . 3-1 3.1 Control code used for communication . 3-1 3.2 Command code list . 3-1 3.3 Communication procedures and format . 3-2 3.4 Calculation of Check Sum . 3-4 4 Details of Communication Format . 4-1 4.1 Temperature setting (without writing FRAM

Cylinder with Lock Series CLS

(Example) CDLSL140-100 3 wire (NPN equiv.)

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

B-1 A-1 B-2 A-2 B-3 A-3 Connector C terminal no. Signal Cable color S Standard cable Brown Red Orange Yellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

10

The rotating eccentric angle to the stroke end must be 2 3.

IP8000 E/P positioner is more compact than the IP6000 with improved visibility of the pressure indicator.  Other features include an improved enclosure protection IP65, interchangeable mounting, excellent shock and vibration performance, and a 1/2 split range available by simple span adjustment.  The IP200 cylinder positioner provides accurate and stable positioning of air cylinders.  The

IP8000 E/P positioner is more compact than the IP6000 with improved visibility of the pressure indicator.  Other features include an improved enclosure protection IP65, interchangeable mounting, excellent shock and vibration performance, and a 1/2 split range available by simple span adjustment.  The IP200 cylinder positioner provides accurate and stable positioning of air cylinders.  The

High Vacuum L Type Valve

(Refer to Chapter 7, Parts Replacement Procedure (P. 14 to 18) for details.) 6 XL-OMS0001-B 3. Product Specific Precautions 3 Precautions 3 Be sure to read before handling Maintenance Parts Caution SMC specified parts should be used for maintenance service. Refer to Chapter 5, Construction and Dimensions" (P. 11) for the part indication numbers.

XL-OMY0002

1. 2. 3. 4. 2 XL-OMY0002 / 1 1.5 *3) 3)1 1 () 3 XL-OMY0002 1 &/ 1.52 2 ( ) 5 5 P-01-11 P-06-3 4 XL-OMY0002 2.2 A6063SUS316LSUS304 5 P11 FKM 3 3[]P8 60 , 245250Hz 30m/s 5 XL-OMY0002 /H0 H4 H5 () 510% O 0.1mm0.2mm O 9 P15 3 3P7P8 5 P11 O 10 P16 P19 6 XL-OMY0002 3. 3 5 P11 25 40 50 XLD25-30-1 XLD40-30-1 XLD50-30-1 XLD25-30-1H XLD40-30-1H XLD50-30-1H 63 80 100