Series CQ2

Series CQ2 Compact Cylinder Double Acting: Single Rod Dimensions (mm) Dimensions are the same with and without auto switches. 1in = 25.4mm 180 2 x 4-31.5 depth of counter bore 26 29 29 2-Rc 1/2 (port size) 40 52 52 4-19 through 162 204 4.5 3 Note 1) Flat washer 4 pcs. 2 x 4-M22 x 2.5 thread depth 38 102 + Stroke 17 36 M24 x 3 effective thread depth 33 119 + Stroke 162 204 Note 1) 2 x 4-M22

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

3 2 1 4 3 2 1 Load Load Load Load Main circuit Main circuit (Gray) CH2_OUT1 (Gray) CH2_OUT1 NC NC 4 3 2 1 4 3 2 1 Sensor Sensor (Red) CH3_OUT1 (Red) CH3_OUT1 NC NC (Green) CH4_OUT1 (Green) CH4_OUT1 4 3 2 1 4 3 2 1 NC NC DC () DC () (Blue) (Blue) 52 Series PF2D Description Remote Type/Display Unit PF2D300, 301 RESET button ( + button) If the UP and DOWN buttons are pressed simultaneously

Large Bore Compact Cylinder Series CQ2

Series CQ2 Compact Cylinder Double Acting: Single Rod Dimensions (mm) Dimensions are the same with and without auto switches. 1in = 25.4mm 180 2 x 4-31.5 depth of counter bore 26 29 29 2-Rc 1/2 (port size) 40 52 52 4-19 through 162 204 4.5 3 Note 1) Flat washer 4 pcs. 2 x 4-M22 x 2.5 thread depth 38 102 + Stroke 17 36 M24 x 3 effective thread depth 33 119 + Stroke 162 204 Note 1) 2 x 4-M22

MXU

Piping is possible from 3 directions.

MXU

63 51.5 24 25 18 67.5 68 56.5 24 30 24 75.5 76 64.5 34 40 32 79.5 80 68.5 34 45 35 8-3-7 8 Series MXU Dimensions: MXU16 (mm) Stroke (mm) 5 10 15 20 25 30 TS Z S NS LS BS 65.5 66 52 24 24 20 65.5 66 52 24 24 20 75.5 76 62 34 35 30 75.5 76 62 34 35 30 85.5 86 72 40 45 40 90.5 91 77 40 50 45 8-3-8 9 Compact Slide Series MXU Construction MXU6 (6) MXU10 (10) MX MTS MY CY MG CX MXU16 (16) D-X

Pin Clamp Cylinders

mm) Shim mounting position (Up to 3 mm) Guide pin fixing bolt () Guide pin fixing bolt () 100 + Shim thickness 100 + Shim thickness Shim mounting position (Up to 3 mm) Shim mounting position (Up to 3 mm) MK MK2T 30 + Shim thickness 30 + Shim thickness CK1 CLK2 CLKG CKQ CLKQ CK CLK CK CLK 22 through CKQ Description Part no.

Clean Room Regulator/Fluoro Resin Type Series SRF30

3 No.

EXxx-OMN0027CN

4 3 2 1 0 Byte 0 0 Bit No. 0 1 1 1 2 1 3 1 4 1 5 (0) 6 1 7 1 2 7 6 5 4 3 2 1 0 Byte 1 0 1 Bit No. 0 1 1 1 2 (1) 3 1 4 1FREEZE 5 1SYNC 6 (0) 7 1 3 7 6 5 4 3 2 1 0 Byte 2 0 0 0 0 0 0 0 Bit No. 06 (0) 7 1 PROFIBUS DP Byte 3 PROFIBUS FFh ID Byte 45 IDEX600-SPRA ID 1411h -72No.EX-OMN0027CN-D Header 7 6 5 4 3 2 1 0 Byte 6 0 0 0 0 1 1 0 1 Bit No. 07 0Eh(13 ) System diag.1 7 6 5 4 3 2 1

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 10 17 19 17 19 20 18 21 20 18 21 20 22 21 25 22 21 25 23 22 25 23 22 25 21 25 22 27 38 30 32 39 31 32 37 38 44 66 38 43 65 53 53 68 51 52 67 KFL04-01 KFL04-02 KFL06-01 KFL06-02 KFL06-03 KFL08U-01 KFL08U-02 KFL08U-03 KFL08N-01 KFL08N-02 KFL08N-03 KFL10U-02 KFL10U-03 KFL10U-04 KFL10N-02 KFL10N-03

Series KG Stainless Steel One-touch Fittings

8 KGY08-03 17 47 30.5 37 1 8 KGY10-01 27 49.5 31 R(PT) 1 4 3 8 KGY10-02 KGY10-03 50.5 52 30 32 17 29 10 21 28.4 40.0 18.5 26.5 17 39 1 2 KGY10-04 36 54.5 66 31 41 22 1 4 3 8 KGY12-02 KGY12-03 53.5 55 31 33 17 12 22 45.4 57.4 20.9 17 28.5 1 2 KGY12-04 37 57.5 22 68 3 8 KGY16-03 26.5 38 20.9 34 25 81 (81) 113 (113) 65.5 112 16 22 1 2 KGY16-04 41 67 116 Reference dimensions after R(PT) thread

PF2D

SN E 21 LQ1 Nut type fittings without a nut (including insert bushings) in one place Fitting type Union elbow T E Union tee Class Applicable tubing size Reducing Reducing Class Applicable tubing size (inch) No. 3 No. 3 Applicable tubing size (mm) 1 A 10 x 8 3/8" x 1/4" SMC SMC SMC 3 2 3 B 8 x 6 1/4" x 5/32" 3 3 4 A 6 x 4 1/2" x 3/8" P Panel mount union U 4 1 4 B 12 x 10 3/8" x 1/4" Union

Electro-Pneumatic Positioner, POSITIONER, 805, 2.6 lb

The cost effective and clean looking AC series allows you to pick a combination of modular style air preparation equipment that best suits your needs. The series, available in 8 size options to ensure optimum performance, offers energy savings, with higher flow rates. Simple assembly and maintenance reduces downtime. Air filter, mist separator and regulator unit , Clean looking, modular

Electro-Pneumatic Positioner, POSITIONER, 805, 2.60000 lb

MTS

0 o @2 @3 !5 u t !8 @1 r @4 w MX MTS MY 12 to 40 CY @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !

PF2D

Note 3) The system accuracy when combined with PF2D5.

Type: 001 (Smart Lever Type), Pressure Gauge: 3 (1.0 MPa), Specifications: 3 (w/ HART Transmission Function), Accessories: None (Standard), External Scale Plate: None, LCD Window: None, Connection, Air - Electric: 3 (NPT1/4 - NPT1/2)

Type: 001 (Smart Lever Type), Pressure Gauge: 3 (1.0 MPa), Specifications: 0 (Basic), Accessories: None (Standard), External Scale Plate: None, LCD Window: None, Connection, Air - Electric: 3 (NPT1/4 - NPT1/2)

Type: Smart Lever Type, Pressure Gauge: 1.0 MPa, Specifications: w/ HART Transmission Function, Accessories: None (Standard), External Scale Plate: None, LCD Window: None, Connection, Air - Electric: NPT1/4 - NPT1/2, CE Compliant: -

Type: Relay Device, Type: Smart lever type, Specification: Basic type, Pressure(MPa): 1.0, Fork lever type fitting: N/A, Lever unit: N/A, External scale plate: N/A, Body cover with window for LCD: N/A, Air connection port: 1/4NPT, Conduit connection port: 1/2NPT, Explosion-proof structure: Standard product, Ambient temperature(°C): -20 to 80, CE compatible: CE-non-compliant product