resistance [m/s2] Note 4)Actuation typeGuide typeOperating temperature range [nC]Operating humidity range [%RH]Motor output/SizeMotor typeEncoderPowerconsumption [W] Note 5)Standby power consumption when operating [W] Note 6)Max. instantaneous power consumption [W] Note 7)Type Note 8)Holding force [N]Power consumption at 20nC [W] Note 9)Rated voltage [V]HorizontalVerticalLEFB32S3300, 400

resistance [m/s2] Note 4)Actuation typeGuide typeOperating temperature range [nC]Operating humidity range [%RH]Motor output/SizeMotor typeEncoderPowerconsumption [W] Note 5)Standby power consumption when operating [W] Note 6)Max. instantaneous power consumption [W] Note 7)Type Note 8)Holding force [N]Power consumption at 20nC [W] Note 9)Rated voltage [V]HorizontalVerticalLEFB32S3300, 400

resistance [m/s2] Note 4)Actuation typeGuide typeOperating temperature range [nC]Operating humidity range [%RH]Motor output/SizeMotor typeEncoderPowerconsumption [W] Note 5)Standby power consumption when operating [W] Note 6)Max. instantaneous power consumption [W] Note 7)Type Note 8)Holding force [N]Power consumption at 20nC [W] Note 9)Rated voltage [V]HorizontalVerticalLEFB32S3300, 400

The ZSE2 series is a compact, pressure switch (for vacuum pressure) and can be integrated with ZX or ZR vacuum systems. The ZSE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., N63, "VACUUM SWITCH

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Silencer Tubing bore x Length Speed controller Silencer Tubing bore x Length Speed controller Silencer Tubing bore x Length Speed controller Silencer AS2051F-06 AN120-M5 AS3001F-06 AN110-01 SY3120-C6 SY3140-01 T0806 x 1 m AS3001F-06 T0806 x 1 m AS3001F-08 AS3001F-06 T0604 x 1 m T0604 x 1 m SY5120-01 SY5140-02 AS3001F-08 AN101-01 AN101-01 T1075 x 1 m AS4001F-10 T0604 x 1 m T0604 x 1 m T1075

Table of Contents

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

ZP

Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 ZP3B-T2A(J/K)6-B5 ZP3B-T2A(J/K)10-B5 ZP3B-T2A(JB/K)15-B5 ZP3B-T2A(JB/K)20-B5 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet. Note 3) Fitting is ordered separately.

ZP

Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 ZP3B-T2A(J/K)6-B5 ZP3B-T2A(J/K)10-B5 ZP3B-T2A(JB/K)15-B5 ZP3B-T2A(JB/K)20-B5 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet. Note 3) Fitting is ordered separately.

ZP

2 F G H J K L M N P Vacuum inlet direction q Pad dia.

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Nil Grommet (0.6 m) L Grommet (3 m) Nil Y M5 x 0.8 M6 x 1 (Option) C Connector (0.6 m) Filter case CL Connector (3 m) Caution 1. The case is made of polycarbonate.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

) [ ]: AC Grommet (G), (H): 10-SYJ34MG H-M5 M5 x 0.8 (A port) 14 5 10 2-3.2 (For mounting) 26.4 17 3 2.5 Manual override A 11 G: Approx. 300 H: Approx. 600 (Lead wire length) 48.6[50.8] (Light/surge voltage suppressor) 41.5[48.5] + M5 x 0.8 (X port) 35.6 28.5 26.1 X R P 13 5 5 10 M5 x 0.8 (P, R port) 10 8.6 7.5 17.5 23 L plug connector (L): 10-SYJ34M-L-M5 M plug connector (M): 10-SYJ34M-M-M5

ZP

Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 ZP3B-T2A(J/K)6-B5 ZP3B-T2A(J/K)10-B5 ZP3B-T2A(JB/K)15-B5 ZP3B-T2A(JB/K)20-B5 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet. Note 3) Fitting is ordered separately.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com R 3 P 1 30 17 6.5 15 2 2 2 2 2 8 0.5 0.5 P = 11 10 M5: M5 thread 2n-M5 4(A), 2(B) port 35 4 L2 38 L1 42 M plug connector (M) 1 2 3 4 5 n U side D side Stations Direct manual override (Non-locking) 24 15 43 L plug connector (L) Dimensions n: Stations n L 11 12 13 14 15 16 17 18 19 20 28 20 39 31

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

12.7 11 3 28.1 [35.1] P R1 15 R2 M5 x 0.8 (P, R1, R2 port) 21 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors L plug connector (L): 10-SYJ5 23-L-M5 3 4 5 M plug connector (M): 10-SYJ5 23-M-M5 3 4 5 DIN terminal (D, Y): 10-SYJ5 23-M5 M8 connector (WO): 10-SYJ5 23-WO-M5 3 4 5 3 4 5 D Y Approx. 300 (Lead wire length) Applicable

SX

Speed controller Silencer Tube x Length Speed controller Silencer SX3140-01 SX3120-C6 AS3001F-06 AN110-01 AS2051F-06 AN120-M5 T0604 x 1 m T0806 x 1 m AS3001F-08 T0604 x 1 m T0806 x 1 m AS3001F-08 SX5140-02 SX5120-01 AS3001F-06 AS3001F-06 AN101-01 AN101-01 AS4001F-10 T0604 x 1 m T1075 x 1 m T1209 x 1 m AS3001F-06 T0604 x 1 m AS3001F-06 T1075 x 1 m AS4001F-10 SX7140-03 SX7120-02 SV AS200-02

V

www.stevenengineering.com I 2.61 SOLENOID VALVES SERIES (N)VZ300 H O W T O O R D E R M A N I F O L D T Y P E 40 B O T T O M P O R T E D D I M E N S I O N S M A N I F O L D T Y P E 40 B O T T O M P O R T E D (N)VV3Z3 40 2 N U M B E R O F S TAT I O N S 02 2 stations to 20 20 stations S I Z E O F A, B P O R T M5 10-32Nom (P, R Port PT) M5T 10-32Nom (P, R Port NPTF) 01T 1/8 NPTF ACCESSORIES M

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NPTF 1/8 Connector type (Lead wire: 0.6 m) T1 C Connector type (Lead wire: 3 m) CL Note) Single mounting style: M5 x 0.8 (female) threaded.

Table of Contents

28 x n)+36 IC 18 28 52.5 28 5.3 VBA 5.5 SMC SMC L2 dimension Stations 1 2 3 4 5 6 7 8 9 M DIN rail part no.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

(-F2) G H 22.5 28.5 [35.5] (A, B port) M5 x 0.8 28.5 [35.5] 2 18.5 23.5 25 P 16.9 (15) EA EB M5 x 0.8 (P, EA, EB port) For manifold gasket positioning 2 x 1.5 die-cast hole 19 22.5 L plug connector (L): 10-SY3120-L(-F2) M plug connector (M): 10-SY3120-M(-F2) C4, N3 C6, N7 M8 connector (WO): 10-SY3120-WO(-F2) C4, N3 C6, N7 C4, N3 C6, N7 28.5 [35.5] 13.1 (Lead wire length) 33 Approx. 300 (Lead

Vacuum Pad

Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 ZP3B-T2A(J/K)6-B5 ZP3B-T2A(J/K)10-B5 ZP3B-T2A(JB/K)15-B5 ZP3B-T2A(JB/K)20-B5 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet. Note 3) Fitting is ordered separately.